Sputtered molybdenum oxide thin films for NH3 detection

Sensors and Actuators, B: Chemical

Volumn 36, Issue 1-3, 1996, Pages 320-324

  Mutschall, D ^a   Holzner, K ^a   Obermeier, E ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

Gas sensor; Metal oxide; Molybdenum trioxide; Reactive sputtering

Indexed keywords

AMMONIA; ANNEALING; CHEMICAL SENSORS; ELECTRIC CONDUCTIVITY MEASUREMENT; MOLYBDENUM COMPOUNDS; MORPHOLOGY; SPUTTER DEPOSITION;

METAL OXIDE; MOLYBDENUM TRIOXIDE; REACTIVE SPUTTERING;

THIN FILMS;

EID: 0030258381     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80089-5     Document Type: Article

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