Field-effect-induced gas sensitivity changes in metal oxides

Sensors and Actuators, B: Chemical

Volumn 43, Issue 1-3, 1997, Pages 132-139

  Hellmich, W ^a   Muller G ^a   Braunmuhl Ch Bosch v ^a   Doll, T ^b   Eisele, I ^b  

^a DAIMLER AG   (Germany)

^b BUNDESWEHR UNIVERSITY MUNICH   (Germany)

Author keywords

Chemical sensors (gas); Field effect; Metal oxides; Selectivity control; Sensor arrays

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRIC INSULATION; FIELD EFFECT SEMICONDUCTOR DEVICES; METALS; MOSFET DEVICES; OXIDES; SEMICONDUCTOR DEVICE MANUFACTURE;

BIAS VOLTAGE; GAS SENSITIVITY CHANGES; SELECTIVITY CONTROL; SENSOR ARRAYS; THIN DIELECTRIC LAYER;

CHEMICAL SENSORS;

EID: 0031223967     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00195-0     Document Type: Article

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