Integrated gas sensor based on tin oxide thin-film and improved micro-hotplate

Sensors and Actuators, B: Chemical

Volumn B46, Issue 3, 1998, Pages 174-179

  Tang, Zhenan ^a   Fung, Samuel K H ^a   Wong, Darwin T W ^a   Chan, Philip C H ^a   Sin, Johnny K O ^a   Cheung, Peter W ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

GAS CHROMATOGRAPHY; GAS FUEL ANALYSIS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SPUTTERING; THIN FILM DEVICES; TIN COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

INTEGRATED GAS SENSORS; MICRO HOTPLATES (MHP); TIN OXIDE THIN FILMS;

CHEMICAL SENSORS;

EID: 0032022190     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-4005(98)00118-x     Document Type: Article

References (4)

1. J.S. Suehle R.E. Cavicchi M. Gaitan Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing IEEE Electron. Device Lett. 14 3 1993 118 120
2. S.K.H. Fung, P.C.H. Chan, J.K.O. Sin, P.W. Cheung, Micro-hotplate for thin film gas sensor: Fabrication using CMOS technology, in: IEEE Electron Device and Material Symposium, Tech. Digest, Taiwan, 1994, pp. 6-1-1.
3. S.K.H. Fung, Z. Tang, P.C.H. Chan, J.K.O. Sin, P.W. Cheung, Thermal analysis and design of a micro-hotplate for integrated gas sensor applications, in: Eurosensors IX, Dig., Stockholm, Sweden, 1995, pp. 818–821.
4. Z. Tang, S.K.H. Fung, D.T.W. Wong, P.C.H. Chan, J.K.O. Sin, P.W. Cheung, An automated precision gas sensor characterization system, in: Proceedings of IEEE Tencon'95 on Microelectronics and VLSI, Hong Kong, November 7–10, 1995, pp. 187–190.