Influence of the deposition conditions of SnO2 thin films by reactive sputtering on the sensitivity to urban pollutants

Sensors and Actuators, B: Chemical

Volumn 45, Issue 3, 1997, Pages 193-198

  Horrillo, Maria C ^a,b   Serrini, Patrizia ^a   Santos, José ^a,b   Manes, Livio ^a  

^a JOINT RESEARCH CENTRE   (Italy)

^b CSIC   (Spain)

Author keywords

Gas sensors; Pollutants; Thin films; Tin Oxide

Indexed keywords

ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTROCHEMICAL SENSORS; FILM GROWTH; HEAT TREATMENT; IMPURITIES; MAGNETRON SPUTTERING; MORPHOLOGY; OXIDES; PLASMAS; STOICHIOMETRY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

POLLUTANTS; TIN DIOXIDE;

THIN FILMS;

EID: 0031348267     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00293-1     Document Type: Article

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