Photo-, thermal and humidity sensitivity characteristics of sr1-xLaxTiO3 film on SiO2/Si substrate

Sensors and Actuators, A: Physical

Volumn 63, Issue 3, 1997, Pages 223-226

  Li, G Q ^a   Lai, P T ^b   Zeng, S H ^a   Huang, M Q ^a   Cheng, Y C ^b  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Humidity sensitivity; Photosensitivity; Sr1 xLaxTiO3 thin films; Thermal sensitivity

Indexed keywords

ABSORPTION SPECTROSCOPY; ATMOSPHERIC HUMIDITY; DEPOSITION; INTEGRATED CIRCUIT MANUFACTURE; ION IMPLANTATION; PHOTOSENSITIVITY; THERMAL CONDUCTIVITY; THIN FILM DEVICES;

BANDGAP; HUMIDITY SENSITIVITY; ION BEAM SPUTTERING; STRONTIUM LANTHANUM TITANATE;

THIN FILMS;

EID: 0031340541     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80509-2     Document Type: Article

References (12)

1. L.H. Parker and A.F. Tasch, Ferro-electric materials for 64 Mb and 256 Mb DRAMs, IEEE Circuits and Devices Magazine, 6 (1990) 17-26.
2. 3 thin-film capacitor in silicon, Appl. Phys. Lett., 57 (1990) 2431-2433.
3. J.T. Evans and R. Womack, An experimental 512-bit nonvolatile memory for ferro-electric storage cell, J. Solid-State Circuits, 23 (1988) 1171-1175.
4. 3, J. Am. Ceram. Soc., 68 (1985) 555-558.
5. 3, J. Am. Ceram. Soc., 47 (1964) 484-490.
6. S.N. Chen, E.S. Ramakrishnan, R.S. Huang and W.W. Grannemann, A new thin-film humidity micro-sensor, IEEE Electron Device Lett., EDL-5 (1984) 452-453.
7. 3/Si structure, Appl. Phys. Lett., 66 (1995) 2436-2438.
8. Y. Shimizu, M. Shimabukuro, H. Arai and T. Seiyama, Enhancement of humidity sensitivity for perovskite-type oxides having semi-conductivity, Chem. Lett., 7 (1985) 917-920.
9. H.A. Saner and J.R. Fisher, Processing of positive temperature coefficient thermistors, J. Am. Ceram. Soc., 43 (1960) 297-300.
10. T. Seiyama, N. Yamazoe and H. Arai, Ceramic humidity sensors, Sensors and Actuators 4 (1983) 85-95.
11. A. Kahn and A. Leyendecker, Electronic energy bands in strontium titanate, Phys. Rev. A, 135 (1964) 1321-1325.
12. B.R. Nag, Electron Transport in Compound Semiconductors, Springer, Berlin, 1980.