AFM studies of polycrystalline calcium sulfide thin films grown by atomic layer deposition

Applied Surface Science

Volumn 143, Issue 1, 1999, Pages 191-200

  Dey, Srijata ^a   Yun, Sun Jin ^b  

^a ACADEMIA SINICA   (Taiwan)

^b Microlectron Technology Laboratory   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; CALCIUM COMPOUNDS; DEPOSITION; FILM GROWTH; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SURFACE STRUCTURE;

ATOMIC LAYER DEPOSITION; POLYCRYSTALLINE CALCIUM SULFIDE THIN FILMS;

THIN FILMS;

EID: 0032636595     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00624-2     Document Type: Article

References (12)

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