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Chemistry of Materials

Volumn 14, Issue 5, 2002, Pages 2276-2282

X-ray reflectivity characterization of ZnO/Al2O3 multilayers prepared by atomic layer deposition

(6) Jensen, J M a Oelkers, A B a Toivola, R a Johnson, D C a Elam, J W b George, S M b

a UNIVERSITY OF OREGON (United States)

b UNIVERSITY OF COLORADO (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM OXIDE; METAL OXIDE; ZINC OXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; CRYSTALLIZATION; PHYSICAL PARAMETERS; THICKNESS; VISCOSITY; X RAY DIFFRACTION;

EID: 0036267176 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm011587z Document Type: Article

Times cited : (84)

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