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Journal of the Electrochemical Society

Volumn 148, Issue 4, 2001, Pages

Atomic Layer Deposition of High Dielectric Constant Nanolaminates

(2) Zhang, H a Solanki, R a

a OREGON HEALTH AND SCIENCE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002305629 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1355690 Document Type: Article

Times cited : (50)

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