Electrical properties of SrTiO3/BaTiO3 strained superlattice films prepared by atomic layer metallorganic chemical vapor deposition

Journal of the Electrochemical Society

Volumn 147, Issue 12, 2000, Pages 4615-4617

  Wang, Zaiyang ^a   Oda, Shunri ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; CURRENT DENSITY; DIELECTRIC FILMS; DIELECTRIC PROPERTIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; STRONTIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

ATOMIC LAYER METALLORGANIC CHEMICAL VAPOR DEPOSITION (ALMOCVD); SUPERLATTICE FILMS;

SUPERLATTICES;

EID: 0034506497     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1394111     Document Type: Article

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