Deposition, structure, and hardness of polycrystalline transition-metal nitride superlattice films

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2500-2507

  Chu, X ^a   Wong, M S ^a,b   Sproul, W D ^a,c   Barnett, S A ^a  

^a Northwestern University   (United States)

^b Institute of Materials Science and Engineering   (Taiwan)

^c Sputtered Films Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; DEPOSITION; DISLOCATIONS (CRYSTALS); ELASTIC MODULI; HARDNESS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; METALLIC SUPERLATTICES; POLYCRYSTALLINE MATERIALS; STEEL; STRAIN; SUBSTRATES;

COHERENCY STRAINS; NITROGEN PARTIAL PRESSURE; POLYCRYSTALLINE TRANSITION METAL NITRIDE SUPERLATTICE FILM; STEEL SUBSTRATES; VICKERS HARDNESS;

PLASTIC FILMS;

EID: 0032623495     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0335     Document Type: Article

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