SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 544, Issue , 2013, Pages 2-12

Doping and electrical properties of cubic boron nitride thin films: A critical review

(1) Zhang, X W a

a INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

Cubic boron nitride; Doping; Electrical properties; Implantation; Thin films

Indexed keywords

CHEMICAL STABILITY; DEPOSITION; DOPING (ADDITIVES); ELECTRIC PROPERTIES; ELECTRONIC STRUCTURE; ENERGY GAP; FILM GROWTH; ION IMPLANTATION; NITRIDES; SEMICONDUCTOR DOPING; SEMICONDUCTOR JUNCTIONS; THERMAL CONDUCTIVITY; THIN FILMS;

BORON NITRIDE THIN FILMS; CUBIC BORON NITRIDE (CBN); ELECTRONIC APPLICATION; HIGH BREAKDOWN FIELDS; HIGH TEMPERATURE ELECTRONIC DEVICES; HIGH THERMAL CONDUCTIVITY; N AND P-TYPE CONDUCTIONS; THIN-FILM DEPOSITION TECHNIQUE;

CUBIC BORON NITRIDE;

EID: 84901849895 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2013.07.001 Document Type: Conference Paper

Times cited : (59)

References (85)

1
- 0031339504
- P. B. Mirkarimi, K. F. McCarty, D. L. Medlin, Mater. Sci. Eng., R 21 (1997) 47.
- (1997) Mater. Sci. Eng., R , vol.21 , pp. 47
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³

2
- 0000623285
- T. Yoshida, Diamond Relat. Mater. 5 (1996) 501.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 501
- Yoshida, T.¹

3
- 36049014921
- W. J. Zhang, Y. M. Chong, I. Bello, S. T. Lee, J. Phys. D: Appl. Phys. 40 (2007) 6159.
- (2007) J. Phys. D: Appl. Phys. , vol.40 , pp. 6159
- Zhang, W.J.¹ Chong, Y.M.² Bello, I.³ Lee, S.T.⁴

4
- 1542565540
- R. H. Wentorf Jr., J. Chem. Phys. 26 (1957) 956.
- (1957) J. Chem. Phys. , vol.26 , pp. 956
- Wentorf Jr., R.H.¹

5
- 0032140759
- M. Ferhat, A. Zaoui, M. Certier, H. Aourag, Physica B 252 (1998) 229.
- (1998) Physica B , vol.252 , pp. 229
- Ferhat, M.¹ Zaoui, A.² Certier, M.³ Aourag, H.⁴

6
- 0000998401
- R. H. Wentorf Jr., J. Chem. Phys. 34 (1961) 809.
- (1961) J. Chem. Phys. , vol.34 , pp. 809
- Wentorf Jr., R.H.¹

7
- 0001405179
- M. Sokolowski, J. Cryst. Growth 46 (1979) 136.
- (1979) J. Cryst. Growth , vol.46 , pp. 136
- Sokolowski, M.¹

8
- 0001079019
- D. L. Medlin, T. A. Friedmann, P. B. Mirkarimi, G. F. Cardinale, K. F. McCarty, J. Appl. Phys. 79 (1996) 3567.
- (1996) J. Appl. Phys. , vol.79 , pp. 3567
- Medlin, D.L.¹ Friedmann, T.A.² Mirkarimi, P.B.³ Cardinale, G.F.⁴ McCarty, K.F.⁵

9
- 30244511194
- J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D. R. T. Zahn, F. Richter, Diamond Relat. Mater. 5 (1996) 1103.
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1103
- Hahn, J.¹ Friedrich, M.² Pintaske, R.³ Schaller, M.⁴ Kahl, N.⁵ Zahn, D.R.T.⁶ Richter, F.⁷

10
- 0038785719
- Y. K. Le, H. Oechsner, Thin Solid Films 437 (2003) 83.
- (2003) Thin Solid Films , vol.437 , pp. 83
- Le, Y.K.¹ Oechsner, H.²

11
- 0032620792
- J. Pascallon, V. Stambouli, S. Ilias, D. Bouchier, G. Nouet, F. Silva, A. Gicquel, Diamond Relat. Mater. 8 (1999) 325.
- (1999) Diamond Relat. Mater. , vol.8 , pp. 325
- Pascallon, J.¹ Stambouli, V.² Ilias, S.³ Bouchier, D.⁴ Nouet, G.⁵ Silva, F.⁶ Gicquel, A.⁷

12
- 1842633387
- N. Deyneka, X. W. Zhang, H.-G. Boyen, P. Ziemann, F. Banhart, Diamond Relat. Mater. 13 (2004) 473.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 473
- Deyneka, N.¹ Zhang, X.W.² Boyen, H.-G.³ Ziemann, P.⁴ Banhart, F.⁵

13
- 21344467455
- H. Hofsaess, H. Feldermann, M. Sebastian, C. Ronning, Phys. Rev. B 55 (1997) 230.
- (1997) Phys. Rev. B , vol.55 , pp. 230
- Hofsaess, H.¹ Feldermann, H.² Sebastian, M.³ Ronning, C.⁴

14
- 1342302491
- T. S. Yang, Y. P. Cheng, C. L. Cheng, M. S. Wong, Thin Solid Films 447 (448) (2004) 136.
- (2004) Thin Solid Films , vol.447 , Issue.448 , pp. 136
- Yang, T.S.¹ Cheng, Y.P.² Cheng, C.L.³ Wong, M.S.⁴

15
- 0037439911
- W. Kulisch, S. Ulrich, Thin Solid Films 423 (2003) 183.
- (2003) Thin Solid Films , vol.423 , pp. 183
- Kulisch, W.¹ Ulrich, S.²

16
- 0034187817
- K.-B. Kim, S.-H. Kim, J. Vac. Sci. Technol. A 18 (2000) 900.
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 900
- Kim, K.-B.¹ Kim, S.-H.²

17
- 0034249464
- X. W. Zhang, Y. J. Zou, H. Yan, B. Wang, G. H. Chen, S. P. Wong, Mater. Lett. 45(2000)111.
- (2000) Mater. Lett. , vol.45 , pp. 111
- Zhang, X.W.¹ Zou, Y.J.² Yan, H.³ Wang, B.⁴ Chen, G.H.⁵ Wong, S.P.⁶

18
- 0000817854
- H.-G. Boyen, P. Widmayer, D. Schwertberger, N. Deyneka, P. Ziemann, Appl. Phys. Lett. 76 (2000) 709.
- (2000) Appl. Phys. Lett. , vol.76 , pp. 709
- Boyen, H.-G.¹ Widmayer, P.² Schwertberger, D.³ Deyneka, N.⁴ Ziemann, P.⁵

19
- 21344472165
- X. W. Zhang, H. Yin, H.-G. Boyen, P. Ziemann, M. Ozawa, Diamond Relat. Mater. 14 (2005) 1482.
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1482
- Zhang, X.W.¹ Yin, H.² Boyen, H.-G.³ Ziemann, P.⁴ Ozawa, M.⁵

20
- 0031994161
- D. Litvinov, C. A. Taylor, R. Clarke, Diamond Relat. Mater. 7 (1998) 360.
- (1998) Diamond Relat. Mater. , vol.7 , pp. 360
- Litvinov, D.¹ Taylor, C.A.² Clarke, R.³

21
- 1342305086
- B. Abendroth, R. Gago, A. Kolitsch, W. Moeller, Thin Solid Films 447 (448) (2004) 131.
- (2004) Thin Solid Films , vol.447 , Issue.448 , pp. 131
- Abendroth, B.¹ Gago, R.² Kolitsch, A.³ Moeller, W.⁴

22
- 0031191484
- X. A. Zhao, C. W. Ong, K. F. Chan, Y. M. Ng, Y. C. Tsang, C. L. Choy, P. W. Chan, J. Vac. Sci. Technol. A 15 (1997) 2297.
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 2297
- Zhao, X.A.¹ Ong, C.W.² Chan, K.F.³ Ng, Y.M.⁴ Tsang, Y.C.⁵ Choy, C.L.⁶ Chan, P.W.⁷

23
- 33748135622
- S. Ulrich, E. Nold, K. Sell, M. Stüber, J. Ye, C. Ziebert, Surf. Coat. Technol. 200 (2006) 6465.
- (2006) Surf. Coat. Technol. , vol.200 , pp. 6465
- Ulrich, S.¹ Nold, E.² Sell, K.³ Stüber, M.⁴ Ye, J.⁵ Ziebert, C.⁶

24
- 58549112173
- Y. M. Fan, X. W. Zhang, J. B. You, H. R. Tan, N. F. Chen, Surf. Coat. Technol. 203 (2009) 1452.
- (2009) Surf. Coat. Technol. , vol.203 , pp. 1452
- Fan, Y.M.¹ Zhang, X.W.² You, J.B.³ Tan, H.R.⁴ Chen, N.F.⁵

25
- 17644436665
- A. Klett, R. Freudenstein, W. Kulisch, Thin Solid Films 398 (399) (2001) 130.
- (2001) Thin Solid Films , vol.398 , Issue.399 , pp. 130
- Klett, A.¹ Freudenstein, R.² Kulisch, W.³

26
- 0033707202
- S. Matsumoto, W. J. Zhang, Jpn. J. Appl. Phys. 39 (2000) L442.
- (2000) Jpn. J. Appl. Phys. , vol.39
- Matsumoto, S.¹ Zhang, W.J.²

27
- 0035449628
- S. Matsumoto, W. J. Zhang, Diamond Relat. Mater. 10 (2001) 1868.
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1868
- Matsumoto, S.¹ Zhang, W.J.²

28
- 0035476397
- H. Feldermann, C. Ronning, H. Hofsaess, Y. L. Huang, M. Seibt, J. Appl. Phys. 90 (2001) 3248.
- (2001) J. Appl. Phys. , vol.90 , pp. 3248
- Feldermann, H.¹ Ronning, C.² Hofsaess, H.³ Huang, Y.L.⁴ Seibt, M.⁵

29
- 0141819201
- X. W. Zhang, H.-G. Boyen, N. Deyneka, P. Ziemann, F. Banhart, M. Schreck, Nat. Mater. 2 (2003) 312.
- (2003) Nat. Mater. , vol.2 , pp. 312
- Zhang, X.W.¹ Boyen, H.-G.² Deyneka, N.³ Ziemann, P.⁴ Banhart, F.⁵ Schreck, M.⁶

30
- 12344278801
- X. W. Zhang, H.-G. Boyen, P. Ziemann, F. Banhart, Appl. Phys. A 80 (2005) 735.
- (2005) Appl. Phys. A , vol.80 , pp. 735
- Zhang, X.W.¹ Boyen, H.-G.² Ziemann, P.³ Banhart, F.⁴

31
- 19444367304
- W. J. Zhang, I. Bello, Y. Lifshitz, K. M. Chan, X. M. Meng, Y. Wu, C. Y. Chan, S. T. Lee, Adv. Mater. 16 (2004) 1405.
- (2004) Adv. Mater. , vol.16 , pp. 1405
- Zhang, W.J.¹ Bello, I.² Lifshitz, Y.³ Chan, K.M.⁴ Meng, X.M.⁵ Wu, Y.⁶ Chan, C.Y.⁷ Lee, S.T.⁸

32
- 2442495119
- X. W. Zhang, H.-G. Boyen, P. Ziemann, M. Ozawa, F. Banhart, M. Schreck, Diamond Relat. Mater. 13 (2004) 1144.
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1144
- Zhang, X.W.¹ Boyen, H.-G.² Ziemann, P.³ Ozawa, M.⁴ Banhart, F.⁵ Schreck, M.⁶

33
- 0036841219
- C. Iwamoto, H. S. Yang, T. Yoshida, Diamond Relat. Mater. 11 (2002) 1854.
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1854
- Iwamoto, C.¹ Yang, H.S.² Yoshida, T.³

34
- 0041766637
- H. S. Yang, C. Iwamoto, T. Yoshida, J. Appl. Phys. 94 (2003) 1248.
- (2003) J. Appl. Phys. , vol.94 , pp. 1248
- Yang, H.S.¹ Iwamoto, C.² Yoshida, T.³

35
- 21344456716
- X. W. Zhang, H.-G. Boyen, H. Yin, P. Ziemann, F. Banhart, Diamond Relat. Mater. 14 (2005) 1474.
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1474
- Zhang, X.W.¹ Boyen, H.-G.² Yin, H.³ Ziemann, P.⁴ Banhart, F.⁵

36
- 33846799340
- H. S. Yang, C. Iwamoto, T. Yoshida, Diamond Relat. Mater. 16 (2007) 642.
- (2007) Diamond Relat. Mater. , vol.16 , pp. 642
- Yang, H.S.¹ Iwamoto, C.² Yoshida, T.³

37
- 0036478404
- T. Taniguchi, T. Teraji, S. Koizumi, K. Watanabe, S. Yamaoka, Jpn. J. Appl. Phys. 41 (2002) L109.
- (2002) Jpn. J. Appl. Phys. , vol.41
- Taniguchi, T.¹ Teraji, T.² Koizumi, S.³ Watanabe, K.⁴ Yamaoka, S.⁵

38
- 0029407171
- A. R. Phani, S. Manorama, V. J. Rao, Semicond. Sci. Technol. 10 (1995) 1520.
- (1995) Semicond. Sci. Technol. , vol.10 , pp. 1520
- Phani, A.R.¹ Manorama, S.² Rao, V.J.³

39
- 0007614621
- M. Lu, A. Bousetta, A. Bensaoula, K. Waters, J. A. Schultz, Appl. Phys. Lett. 68 (1996) 622.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 622
- Lu, M.¹ Bousetta, A.² Bensaoula, A.³ Waters, K.⁴ Schultz, J.A.⁵

40
- 0042378369
- K. Nose, K. Tachibana, T. Yoshida, Appl. Phys. Lett. 83 (2003) 943.
- (2003) Appl. Phys. Lett. , vol.83 , pp. 943
- Nose, K.¹ Tachibana, K.² Yoshida, T.³

41
- 0023649268
- O. Mishima, J. Tanaka, S. Yamaoka, O. Fukunaga, Science 238 (1987) 181.
- (1987) Science , vol.238 , pp. 181
- Mishima, O.¹ Tanaka, J.² Yamaoka, S.³ Fukunaga, O.⁴

42
- 21544478106
- O. Mishima, E. Koh, J. Tanaka, S. Yamaoka, Appl. Phys. Lett. 53 (1988) 962.
- (1988) Appl. Phys. Lett. , vol.53 , pp. 962
- Mishima, O.¹ Koh, E.² Tanaka, J.³ Yamaoka, S.⁴

43
- 10044272003
- K. Bewilogua, M. Keunecke, K. Weigel, E. Wiemann, Thin Solid Films 469 (470) (2004) 86.
- (2004) Thin Solid Films , vol.469 , Issue.470 , pp. 86
- Bewilogua, K.¹ Keunecke, M.² Weigel, K.³ Wiemann, E.⁴

44
- 0037508553
- C. Y. Chan, W. J. Zhang, X. M. Meng, K. M. Chan, I. Bello, Y. Lifshitz, S. T. Lee, Diamond Relat. Mater. 12 (2003) 1162.
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1162
- Chan, C.Y.¹ Zhang, W.J.² Meng, X.M.³ Chan, K.M.⁴ Bello, I.⁵ Lifshitz, Y.⁶ Lee, S.T.⁷

45
- 0036467042
- S. N. Mohammad, Solid State Electron. 46 (2002) 203.
- (2002) Solid State Electron. , vol.46 , pp. 203
- Mohammad, S.N.¹

46
- 28944455695
- C. B. Samantaray, R. N. Singh, Int. Mater. Rev. 50 (2005) 313.
- (2005) Int. Mater. Rev. , vol.50 , pp. 313
- Samantaray, C.B.¹ Singh, R.N.²

47
- 0000636418
- V. A. Gubanov, Z. W. Lu, M. K. Barry, C. Y. Fong, Phys. Rev. B 53 (1996) 4377.
- (1996) Phys. Rev. B , vol.53 , pp. 4377
- Gubanov, V.A.¹ Lu, Z.W.² Barry, M.K.³ Fong, C.Y.⁴

48
- 0000187447
- W. Orellana, H. Chacham, Appl. Phys. Lett. 74 (1999) 2984.
- (1999) Appl. Phys. Lett. , vol.74 , pp. 2984
- Orellana, W.¹ Chacham, H.²

49
- 0037480116
- V. A. Gubanov, E. A. Pentaleri, C. Y. Fong, B. M. Klein, Phys. Rev. B 56 (1997) 13077.
- (1997) Phys. Rev. B , vol.56 , pp. 13077
- Gubanov, V.A.¹ Pentaleri, E.A.² Fong, C.Y.³ Klein, B.M.⁴

50
- 0009382954
- J. L. P. Castineira, J. R. Leite, L. M. R. Scolfaro, R. Enderlein, J. L. A. Alves, H. W. L. Alves, Mater. Sci. Eng., B 51 (1998) 53.
- (1998) Mater. Sci. Eng., B , vol.51 , pp. 53
- Castineira, J.L.P.¹ Leite, J.R.² Scolfaro, L.M.R.³ Enderlein, R.⁴ Alves, J.L.A.⁵ Alves, H.W.L.⁶

51
- 84860382040
- Y. B. Li, H. X. Jiang, G. Z. Yuan, A. L. Chen, X. Wang, T. G. Dai, H. S. Yang, J. Alloys Compd. 531 (2012) 82.
- (2012) J. Alloys Compd. , vol.531 , pp. 82
- Li, Y.B.¹ Jiang, H.X.² Yuan, G.Z.³ Chen, A.L.⁴ Wang, X.⁵ Dai, T.G.⁶ Yang, H.S.⁷

52
- 0034667136
- W. Orellana, H. Chacham, Phys. Rev. B 62 (2000) 10135.
- (2000) Phys. Rev. B , vol.62 , pp. 10135
- Orellana, W.¹ Chacham, H.²

53
- 0001492043
- P. Piquini, R. Mota, T. M. Schmidt, A. Fazzio, Phys. Rev. B 56 (1997) 3556.
- (1997) Phys. Rev. B , vol.56 , pp. 3556
- Piquini, P.¹ Mota, R.² Schmidt, T.M.³ Fazzio, A.⁴

54
- 0001268519
- I. Gorczyca, A. Svane, N. E. Christensen, Phys. Rev. B 60 (1999) 8147.
- (1999) Phys. Rev. B , vol.60 , pp. 8147
- Gorczyca, I.¹ Svane, A.² Christensen, N.E.³

55
- 54049102388
- F. B. Tian, Y. H. Liu, Y. M. Ma, T. Cui, B. B. Liu, G. T. Zou, Diamond Relat. Mater. 17 (2008) 2025.
- (2008) Diamond Relat. Mater. , vol.17 , pp. 2025
- Tian, F.B.¹ Liu, Y.H.² Ma, Y.M.³ Cui, T.⁴ Liu, B.B.⁵ Zou, G.T.⁶

56
- 0037846175
- T. Taniguchi, S. Koizumi, K. Watanabe, I. Sakaguchi, T. Sekiguchi, S. Yamaoka, Diamond Relat. Mater. 12 (2003) 1098.
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1098
- Taniguchi, T.¹ Koizumi, S.² Watanabe, K.³ Sakaguchi, I.⁴ Sekiguchi, T.⁵ Yamaoka, S.⁶

57
- 0030143399
- J. Szmidt, A. Werbowy, L. Jarzi-bowski, T. Gebicki, I. Petrakova, A. Sokolowska, A. Olszyna, J. Mater. Sci. 31 (1996) 2609.
- (1996) J. Mater. Sci. , vol.31 , pp. 2609
- Szmidt, J.¹ Werbowy, A.² Jarzi-Bowski, L.³ Gebicki, T.⁴ Petrakova, I.⁵ Sokolowska, A.⁶ Olszyna, A.⁷

58
- 75849141768
- H. S. Yang, N. Kurebayashi, T. Yoshida, Mater. Sci. Forum 638-642 (2010) 2956.
- (2010) Mater. Sci. Forum , vol.638-642 , pp. 2956
- Yang, H.S.¹ Kurebayashi, N.² Yoshida, T.³

59
- 79960175154
- J. X. Deng, Q. X. Guo, T. Li, Y. Qin, X. L. Yang, P. Yang, Vacuum 86 (2011) 48.
- (2011) Vacuum , vol.86 , pp. 48
- Deng, J.X.¹ Guo, Q.X.² Li, T.³ Qin, Y.⁴ Yang, X.L.⁵ Yang, P.⁶

60
- 84859601931
- J. X. Deng, Y. Qin, L. Kong, X. L. Yang, T. Li, W. P. Zhao, P. Yang, Chin. Phys. B 21 (2012) 047202.
- (2012) Chin. Phys. B , vol.21 , pp. 047202
- Deng, J.X.¹ Qin, Y.² Kong, L.³ Yang, X.L.⁴ Li, T.⁵ Zhao, W.P.⁶ Yang, P.⁷

61
- 84887933062
- X. W. Zhang, Z. G. Yin, F. T. Si, H. L. Gao, X. Liu, X. L. Zhang, Chin. Sci. Bull. (2013), http://dx. doi. org/10. 1007/s11434-013-6039-0.
- (2013) Chin. Sci. Bull.
- Zhang, X.W.¹ Yin, Z.G.² Si, F.T.³ Gao, H.L.⁴ Liu, X.⁵ Zhang, X.L.⁶

62
- 0000733217
- C. Ronning, A. D. Banks, B. L. McCarson, R. Schlesser, Z. Sitar, R. F. Davis, B. L. Ward, R. J. Nemanich, J. Appl. Phys. 84 (1998) 5046.
- (1998) J. Appl. Phys. , vol.84 , pp. 5046
- Ronning, C.¹ Banks, A.D.² McCarson, B.L.³ Schlesser, R.⁴ Sitar, Z.⁵ Davis, R.F.⁶ Ward, B.L.⁷ Nemanich, R.J.⁸

63
- 77957373807
- J. Ying, X. W. Zhang, Y. M. Fan, H. R. Tan, Z. G. Yin, Diamond Relat. Mater. 19 (2010) 1371.
- (2010) Diamond Relat. Mater. , vol.19 , pp. 1371
- Ying, J.¹ Zhang, X.W.² Fan, Y.M.³ Tan, H.R.⁴ Yin, Z.G.⁵

64
- 40749115183
- H. Yin, H.-G. Boyen, P. Ziemann, B. Dohuard, L. Houssiau, F. Renaux, M. Hecq, C. Bittencourt, Diamond Relat. Mater. 17 (2008) 276.
- (2008) Diamond Relat. Mater. , vol.17 , pp. 276
- Yin, H.¹ Boyen, H.-G.² Ziemann, P.³ Dohuard, B.⁴ Houssiau, L.⁵ Renaux, F.⁶ Hecq, M.⁷ Bittencourt, C.⁸

65
- 33846475426
- H. Oba, K. Nose, T. Yoshida, Surf. Coat. Technol. 201 (2007) 5502.
- (2007) Surf. Coat. Technol. , vol.201 , pp. 5502
- Oba, H.¹ Nose, K.² Yoshida, T.³

66
- 79551667382
- J. Ying, X. W. Zhang, Z. G. Yin, H. R. Tan, S. G. Zhang, Y. M. Fan, J. Appl. Phys. 109 (2011) 023716.
- (2011) J. Appl. Phys. , vol.109 , pp. 023716
- Ying, J.¹ Zhang, X.W.² Yin, Z.G.³ Tan, H.R.⁴ Zhang, S.G.⁵ Fan, Y.M.⁶

67
- 84856533628
- I. Bello, Y. M. Chong, Q. Ye, Y. Yang, B. He, O. Kutsay, H. E. Wang, C. Yan, S. K. Jha, J. A. Zapien, W. J. Zhang, Vacuum 86 (2012) 575.
- (2012) Vacuum , vol.86 , pp. 575
- Bello, I.¹ Chong, Y.M.² Ye, Q.³ Yang, Y.⁴ He, B.⁵ Kutsay, O.⁶ Wang, H.E.⁷ Yan, C.⁸ Jha, S.K.⁹ Zapien, J.A.¹⁰ Zhang, W.J.¹¹

68
- 48849093891
- H. Yin, I. Pongrac, P. Ziemann, J. Appl. Phys. 104 (2008) 023703.
- (2008) J. Appl. Phys. , vol.104 , pp. 023703
- Yin, H.¹ Pongrac, I.² Ziemann, P.³

69
- 0033729067
- H. Tomokage, N. Nomura, T. Taniguchi, T. Ando, Diamond Relat. Mater. 9 (2000) 605.
- (2000) Diamond Relat. Mater. , vol.9 , pp. 605
- Tomokage, H.¹ Nomura, N.² Taniguchi, T.³ Ando, T.⁴

70
- 0000918148
- T. Taniguchi, J. Tanaka, O. Mishima, T. Ohsawa, S. Yamaoka, Appl. Phys. Lett. 62 (1993) 576.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 576
- Taniguchi, T.¹ Tanaka, J.² Mishima, O.³ Ohsawa, T.⁴ Yamaoka, S.⁵

71
- 35348984957
- E. M. Shishonok, T. Taniguchi, T. Sekiguchi, Phys. Solid State 49 (2007) 1884.
- (2007) Phys. Solid State , vol.49 , pp. 1884
- Shishonok, E.M.¹ Taniguchi, T.² Sekiguchi, T.³

72
- 40849089264
- B. He, W. J. Zhang, Y. S. Zou, Y. M. Chong, Q. Ye, A. L. Ji, Y. Yang, I. Bello, S. T. Lee, G. H. Chen, Appl. Phys. Lett. 92 (2008) 102108.
- (2008) Appl. Phys. Lett. , vol.92 , pp. 102108
- He, B.¹ Zhang, W.J.² Zou, Y.S.³ Chong, Y.M.⁴ Ye, Q.⁵ Ji, A.L.⁶ Yang, Y.⁷ Bello, I.⁸ Lee, S.T.⁹ Chen, G.H.¹⁰

73
- 63749110631
- K. Kojima, K. Nose, M. Kambara, T. Yoshida, J. Phys. D: Appl. Phys. 42 (2009) 055304.
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 055304
- Kojima, K.¹ Nose, K.² Kambara, M.³ Yoshida, T.⁴

74
- 33748702316
- K. Nose, H. Oba, T. Yoshida, Appl. Phys. Lett. 89 (2006) 112124.
- (2006) Appl. Phys. Lett. , vol.89 , pp. 112124
- Nose, K.¹ Oba, H.² Yoshida, T.³

75
- 34848826527
- K. Nose, T. Yoshida, J. Appl. Phys. 102 (2007) 063711.
- (2007) J. Appl. Phys. , vol.102 , pp. 063711
- Nose, K.¹ Yoshida, T.²

76
- 0347567361
- C. X. Wang, G. W. Yang, T. C. Zhang, H. W. Liu, Y. H. Han, J. F. Luo, C. X. Gao, G. T. Zou, Appl. Phys. Lett. 83 (2003) 4854.
- (2003) Appl. Phys. Lett. , vol.83 , pp. 4854
- Wang, C.X.¹ Yang, G.W.² Zhang, T.C.³ Liu, H.W.⁴ Han, Y.H.⁵ Luo, J.F.⁶ Gao, C.X.⁷ Zou, G.T.⁸

77
- 0037064750
- C. X. Wang, H. W. Liu, X. Li, T. C. Zhang, Y. H. Han, J. F. Luo, C. X. Shen, C. X. Gao, G. T. Zou, J. Phys. Condens. Matter 14 (2002) 10937.
- (2002) J. Phys. Condens. Matter , vol.14 , pp. 10937
- Wang, C.X.¹ Liu, H.W.² Li, X.³ Zhang, T.C.⁴ Han, Y.H.⁵ Luo, J.F.⁶ Shen, C.X.⁷ Gao, C.X.⁸ Zou, G.T.⁹

78
- 33751242760
- H. Yin, H.-G. Boyen, X. W. Zhang, P. Ziemann, Diamond Relat. Mater. 16 (2007) 46.
- (2007) Diamond Relat. Mater. , vol.16 , pp. 46
- Yin, H.¹ Boyen, H.-G.² Zhang, X.W.³ Ziemann, P.⁴

79
- 38949170178
- A. Soltani, H. A. Barkad, M. Mattalah, B. Benbakhti, J.-C. De Jaeger, Y. M. Chong, Y. S. Zou, W. J. Zhang, S. T. Lee, A. BenMoussa, B. Giordanengo, J.-F. Hochedez, Appl. Phys. Lett. 92 (2008) 053501.
- (2008) Appl. Phys. Lett. , vol.92 , pp. 053501
- Soltani, A.¹ Barkad, H.A.² Mattalah, M.³ Benbakhti, B.⁴ De Jaeger, J.-C.⁵ Chong, Y.M.⁶ Zou, Y.S.⁷ Zhang, W.J.⁸ Lee, S.T.⁹ Benmoussa, A.¹⁰ Giordanengo, B.¹¹ Hochedez, J.-F.¹²

80
- 0001461614
- C. Ronning, E. Dreher, H. Feldermann, M. Gross, M. Sebastian, H. Hofsäss, Diamond Relat. Mater. 6 (1997) 1129.
- (1997) Diamond Relat. Mater. , vol.6 , pp. 1129
- Ronning, C.¹ Dreher, E.² Feldermann, H.³ Gross, M.⁴ Sebastian, M.⁵ Hofsäss, H.⁶

81
- 22844442433
- K. Nose, H. S. Yang, T. Yoshida, Diamond Relat. Mater. 14 (2005) 1297.
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1297
- Nose, K.¹ Yang, H.S.² Yoshida, T.³

82
- 84876150402
- K. Teii, T. Hori, Y. Mizusako, S. Matsumoto, ACS Appl. Mater. Interfaces 5 (2013) 2535.
- (2013) ACS Appl. Mater. Interfaces , vol.5 , pp. 2535
- Teii, K.¹ Hori, T.² Mizusako, Y.³ Matsumoto, S.⁴

83
- 27744559974
- K. Nose, H. S. Yang, H. Oba, T. Yoshida, Diamond Relat. Mater. 14 (2005) 1960.
- (2005) Diamond Relat. Mater. , vol.14 , pp. 1960
- Nose, K.¹ Yang, H.S.² Oba, H.³ Yoshida, T.⁴

84
- 70349644980
- M. Brötzmann, U. Vetter, H. Hofsäss, J. Appl. Phys. 106 (2009) 063704.
- (2009) J. Appl. Phys. , vol.106 , pp. 063704
- Brötzmann, M.¹ Vetter, U.² Hofsäss, H.³

85
- 41849100017
- B. He, G. H. Chen, Z. Z. Li, J. X. Deng, W. J. Zhang, Chin. Phys. Lett. 25 (2008) 219.
- (2008) Chin. Phys. Lett. , vol.25 , pp. 219
- He, B.¹ Chen, G.H.² Li, Z.Z.³ Deng, J.X.⁴ Zhang, W.J.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.