Effects of magnesium doping on growth and electric conductivity of nanocrystalline cubic boron nitride thin films

Journal of Physics D: Applied Physics

Volumn 42, Issue 5, 2009, Pages

  Kojima, K ^a   Nose, K ^b   Kambara, M ^a   Yoshida, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORON NITRIDE THIN FILMS; CUBIC PHASE; DOPED FILMS; FOURIER TRANSFORM INFRA-RED SPECTROSCOPIES; HALL VOLTAGES; IN-SITU; MAGNESIUM CONCENTRATIONS; MAGNESIUM DOPING; NANO-CRYSTALLINE; P-TYPE CONDUCTIONS; UNDOPED FILMS; X- RAY DIFFRACTIONS; X-RAY PHOTOELECTRON SPECTROSCOPIES;

ARGON; BORON; BORON NITRIDE; CARRIER CONCENTRATION; CUBIC BORON NITRIDE; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC CONDUCTIVITY MEASUREMENT; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FOURIER TRANSFORMS; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; MAGNESIUM; MAGNESIUM PRINTING PLATES; NANOCRYSTALLINE MATERIALS; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; SPUTTER DEPOSITION; THIN FILMS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 63749110631     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/5/055304     Document Type: Article

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