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Diamond and Related Materials

Volumn 14, Issue 9, 2005, Pages 1482-1488

Effects of crystalline quality on the phase stability of cubic boron nitride thin films under medium-energy ion irradiation

(5) Zhang, X W a,b Yin, H a Boyen, H G a Ziemann, P a Ozawa, M a

a UNIVERSITY OF ULM (Germany)

b INSTITUTE OF SEMICONDUCTORS (China)

Author keywords

Cubic boron nitride; Ion irradiation; Phase stability; Stress

Indexed keywords

COMPRESSIVE STRESS; CUBIC BORON NITRIDE; DATA ACQUISITION; IONS; RADIATION DAMAGE; TRANSMISSION ELECTRON MICROSCOPY;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY (HRTEM); ION IRRADIATION; IRRADIATION DAMAGE; PHASE STABILITY;

THIN FILMS;

EID: 21344472165 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.03.001 Document Type: Article

Times cited : (17)

References (21)

1
- 0031994395
- P. Widmayer, P. Ziemann, and H.-G. Boyen Diamond Relat. Mater. 7 1998 385
- (1998) Diamond Relat. Mater. , vol.7 , pp. 385
- Widmayer, P.¹ Ziemann, P.² Boyen, H.-G.³

2
- 30244511194
- J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D. Zahn, and F. Richter Diamond Relat. Mater. 5 1996 1103
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1103
- Hahn, J.¹ Friedrich, M.² Pintaske, R.³ Schaller, M.⁴ Kahl, N.⁵ Zahn, D.⁶ Richter, F.⁷

3
- 0001079019
- D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, G.F. Cardinale, and K.F. McCarty J. Appl. Phys. 79 1996 3567
- (1996) J. Appl. Phys. , vol.79 , pp. 3567
- Medlin, D.L.¹ Friedmann, T.A.² Mirkarimi, P.B.³ Cardinale, G.F.⁴ McCarty, K.F.⁵

4
- 21344467455
- H. Hofsass, H. Feldermann, M. Sebastian, and C. Ronning Phys. Rev., B 55 1997 230
- (1997) Phys. Rev., B , vol.55 , pp. 230
- Hofsass, H.¹ Feldermann, H.² Sebastian, M.³ Ronning, C.⁴

5
- 0000522367
- D. Litvinov, and R. Clarke Appl. Phys. Lett. 74 1999 955
- (1999) Appl. Phys. Lett. , vol.74 , pp. 955
- Litvinov, D.¹ Clarke, R.²

6
- 21544477583
- D.R. McKenzie, W.D. McFall, W.G. Sainty, C.A. Davis, and R.E. Collins Diamond Relat. Mater. 2 1993 970
- (1993) Diamond Relat. Mater. , vol.2 , pp. 970
- McKenzie, D.R.¹ McFall, W.D.² Sainty, W.G.³ Davis, C.A.⁴ Collins, R.E.⁵

7
- 0001627483
- P. Widmayer, P. Ziemann, S. Ulrich, and H. Ehrhardt Diamond Relat. Mater. 6 1997 621
- (1997) Diamond Relat. Mater. , vol.6 , pp. 621
- Widmayer, P.¹ Ziemann, P.² Ulrich, S.³ Ehrhardt, H.⁴

8
- 0000817854
- H.-G. Boyen, P. Widmayer, D. Schwertberger, N. Deyneka, and P. Ziemann Appl. Phys. Lett. 76 2000 709
- (2000) Appl. Phys. Lett. , vol.76 , pp. 709
- Boyen, H.-G.¹ Widmayer, P.² Schwertberger, D.³ Deyneka, N.⁴ Ziemann, P.⁵

9
- 0032674370
- J. Ullmann, A.J. Kellock, and A.E.E. Baglin Thin Solid Films 341 1999 238
- (1999) Thin Solid Films , vol.341 , pp. 238
- Ullmann, J.¹ Kellock, A.J.² Baglin, A.E.E.³

10
- 0037012553
- C. Fitz, W. Fukarek, and W. Möller Thin Solid Films 408 2002 155
- (2002) Thin Solid Films , vol.408 , pp. 155
- Fitz, C.¹ Fukarek, W.² Möller, W.³

11
- 4244123073
- C. Fitz, W. Fukarek, A. Kolitsch, and W. Möller Surf. Coat. Technol. 128-129 2000 292
- (2000) Surf. Coat. Technol. , vol.128-129 , pp. 292
- Fitz, C.¹ Fukarek, W.² Kolitsch, A.³ Möller, W.⁴

12
- 0142090633
- R. Gago, M. Vinnichenko, B. Abendroth, A. Kolitsch, and W. Möller J. Vac. Sci. Technol., A, Vac. Surf. Films 21 2003 1739
- (2003) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.21 , pp. 1739
- Gago, R.¹ Vinnichenko, M.² Abendroth, B.³ Kolitsch, A.⁴ Möller, W.⁵

13
- 0035998586
- Y. Yamada-Takamura, and T. Yoshida J. Vac. Sci. Technol., B 20 2002 936
- (2002) J. Vac. Sci. Technol., B , vol.20 , pp. 936
- Yamada-Takamura, Y.¹ Yoshida, T.²

14
- 0347380890
- S. Eyhusen, I. Gerhards, H. Hofsäss, C. Ronning, M. Blomenhofer, J. Zweck, and M. Seibt Diamond Relat. Mater. 12 2003 1877
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1877
- Eyhusen, S.¹ Gerhards, I.² Hofsäss, H.³ Ronning, C.⁴ Blomenhofer, M.⁵ Zweck, J.⁶ Seibt, M.⁷

15
- 1842633387
- N. Deyneka, X.W. Zhang, H.-G. Boyen, P. Ziemann, and F. Banhart Diamond Relat. Mater. 13 2004 473
- (2004) Diamond Relat. Mater. , vol.13 , pp. 473
- Deyneka, N.¹ Zhang, X.W.² Boyen, H.-G.³ Ziemann, P.⁴ Banhart, F.⁵

16
- 0000235265
- J.P. Biersack, and L.G. Haggmark Nucl. Instrum. Methods 174 1980 257 or see web-site: http://www.srim.org
- (1980) Nucl. Instrum. Methods , vol.174 , pp. 257
- Biersack, J.P.¹ Haggmark, L.G.²

17
- 0000595555
- S. Fahy Phys. Rev., B 51 1995 12873
- (1995) Phys. Rev., B , vol.51 , pp. 12873
- Fahy, S.¹

18
- 0008117553
- P. Ziemann, H.-G. Boyen, N. Deyneka, D. Schwertberger, and P. Widmayer Adv. Solid State Phys. 40 2000 423
- (2000) Adv. Solid State Phys. , vol.40 , pp. 423
- Ziemann, P.¹ Boyen, H.-G.² Deyneka, N.³ Schwertberger, D.⁴ Widmayer, P.⁵

19
- 0141819201
- X.W. Zhang, H.-G. Boyen, N. Deyneka, P. Ziemann, F. Banhart, and M. Schreck Nat. Mater. 2 2003 312
- (2003) Nat. Mater. , vol.2 , pp. 312
- Zhang, X.W.¹ Boyen, H.-G.² Deyneka, N.³ Ziemann, P.⁴ Banhart, F.⁵ Schreck, M.⁶

20
- 12344278801
- X.W. Zhang, H.-G. Boyen, and P. Ziemann Appl. Phys., A 80 2005 735
- (2005) Appl. Phys., A , vol.80 , pp. 735
- Zhang, X.W.¹ Boyen, H.-G.² Ziemann, P.³

21
- 0005018087
- C. Uzan-Saguy, C. Cytermann, R. Brener, V. Richter, M. Shaanan, and R. Kalish Appl. Phys. Lett. 67 1995 1194
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1194
- Uzan-Saguy, C.¹ Cytermann, C.² Brener, R.³ Richter, V.⁴ Shaanan, M.⁵ Kalish, R.⁶

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