SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 16, Issue 3, 2007, Pages 642-644

Direct nucleation of cubic boron nitride on silicon substrate

(3) Yang, Hangsheng a Iwamoto, Chihiro a Yoshida, Toyonobu a

a UNIVERSITY OF TOKYO (Japan)

Author keywords

Boron nitride; cBN; Chemical vapor deposition; Electron microscopy

Indexed keywords

CRYSTAL GROWTH; NANOSTRUCTURED MATERIALS; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CBN; DIRECT NUCLEATION; NANOSTRUCTURES;

CUBIC BORON NITRIDE;

EID: 33846799340 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2006.11.041 Document Type: Article

Times cited : (18)

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