Constitution of thick oxygen-containing cubic boron nitride films

Surface and Coatings Technology

Volumn 200, Issue 22-23 SPEC. ISS., 2006, Pages 6465-6468

  Ulrich, S ^a   Nold, E ^a   Sell, K ^a   Stuber M ^a   Ye, J ^a   Ziebert, C ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CERAMIC COATINGS; COMPOSITION; COMPRESSIVE STRESS; CRYSTAL LATTICES; CRYSTALLOGRAPHY; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; NUCLEATION; STOICHIOMETRY; X RAY DIFFRACTION ANALYSIS;

CRYSTALLOGRAPHIC STRUCTURE; CUBIC BORON NITRIDE FILMS; NUCLEATION LAYER; OXYGEN-CONTAINING FILMS; REACTIVE MAGNETRON SPUTTERING;

CUBIC BORON NITRIDE;

AUGER ELECTRON SPECTROSCOPY; CERAMIC COATINGS; COMPOSITION; COMPRESSIVE STRESS; CRYSTAL LATTICES; CRYSTALLOGRAPHY; CUBIC BORON NITRIDE; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; NUCLEATION; STOICHIOMETRY; X RAY DIFFRACTION ANALYSIS;

EID: 33748135622     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.11.118     Document Type: Article

References (16)

1. Mirkarimi P.B., McCarty K.F., and Medlin D.L. Mater. Sci. Eng., R Rep. 21 (1997) 47
2. Kulisch W., and Ulrich S. Thin Solid Films 423 (2003) 183
3. Ulrich S., Theel T., Schwan J., and Ehrhardt H. Surf. Coat. Technol. 97 (1997) 45
4. Cardinale G.F., Mirkarimi P.B., McCarty K.F., Klaus E.J., Medlin D.L., Clift W.M., and Howitt D.G. Thin Solid Films 253 (1994) 130
5. Kim I.-H., Kim S.-H., and Kim K.-B. J. Vac. Sci. Technol., A 16 (1998) 2295
6. Matsumoto S., and Zhang W.J. Diamond Relat. Mater. 10 (2001) 1868
7. Yamamoto K., Keunecke M., and Bewilogua K. Thin Solid Films 377-378 (2000) 331
8. Boyen H.-G., Widmayer P., Schwertberger D., Deyneka N., and Ziemann P. Appl. Phys. Lett. 76 (2000) 709
9. Lunk K.-L., and Ulmer J. Surf. Coat. Technol. 92 (1997) 96
10. Litvinov D., Taylor II C.A., and Clarke R. Diamond Relat. Mater. 7 (1998) 360
11. Sell K., Ulrich S., Nold E., Ye J., Leiste H., Stüber M., and Holleck H. Surf. Coat. Technol. 174-175 (2003) 1121
12. Setsuhara Y., Kumagai M., Suzuki M., Suzuki T., and Miyake S. Surf. Coat. Technol. 116-119 (1999) 100
13. Kester D.J., Ailey K.S., Davis R.F., and More K.L. J. Mater. Res. 8 (1993) 1213
14. Gielisse P.J., Mitra S.S., Plendl J.N., Griffs R.D., Mansur L.C., Marshall R., and Pascoe E.A. Phys. Rev. 155 (1967) 1039
15. Geick R., and Perry C.H. Phys. Rev. 146 (1966) 543
16. Rodríguez M.G., Kharissova O.V., and Ortiz-Méndez U. Rev. Adv. Mater. Sci. 7 (2004) 55