Electronic transport in heavily Si doped cubic boron nitride films epitaxially grown on diamond(001)

Journal of Applied Physics

Volumn 104, Issue 2, 2008, Pages

  Yin, Hong ^a   Pongrac, Ivan ^a   Ziemann, Paul ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; BORON NITRIDE; CONCENTRATION (PROCESS); DIAMOND FILMS; DIAMONDS; NITRIDES; NONMETALS; SILICON; TRANSPORT PROPERTIES;

CUBIC BORON NITRIDE FILMS; CUBIC PHASE; ELECTRONIC TRANSPORT PROPERTIES; ELECTRONIC TRANSPORTS; EPITAXIALLY GROWN; PHASE ANALYSIS; SI IMPLANTATION;

CUBIC BORON NITRIDE;

EID: 48849093891     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2956739     Document Type: Article

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