Growth of cubic boron nitride films on Si by ion beam assisted deposition at the high temperatures

Diamond and Related Materials

Volumn 13, Issue 3, 2004, Pages 473-481

  Deyneka, N ^a   Zhang, X W ^a   Boyen, H G ^a   Ziemann, P ^a   Banhart, F ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Cubic boron nitride films; Fourier transformed infrared spectroscopy; Ion beam assisted deposition; X ray diffraction

Indexed keywords

CUBIC BORON NITRIDE; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BEAM ASSISTED DEPOSITION; NUCLEATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; X RAY DIFFRACTION;

CUBIC BORON NITRIDE (C-BN) FILMS; NEAR-EDGE SPECTROSCOPY;

METALLIC FILMS;

DIAMOND;

EID: 1842633387     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2003.11.072     Document Type: Article

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