Fabrication of ohmic Au/Cr contacts on top of cubic Boron Nitride films

Diamond and Related Materials

Volumn 16, Issue 1, 2007, Pages 46-49

  Yin, H ^a   Boyen, H G ^a   Zhang, X W ^a   Ziemann, P ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

Cubic boron nitride; Electrical contact; Ohmic property

Indexed keywords

ADHESION; BORON COMPOUNDS; CUBIC BORON NITRIDE; EVAPORATION; OHMIC CONTACTS; PULSED LASER APPLICATIONS;

MECHANICAL BEHAVIOR; OHMIC PROPERTY; PULSED LASER ABLATION (PLD);

THIN FILMS;

EID: 33751242760     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2006.03.018     Document Type: Article

References (19)

1. Vel L., Demazeau G., and Etourneau J. Mater. Sci. Eng., B, Solid-State Mater. Adv. Technol. 10 (1991) 149
2. Wentorf Jr. R.H. J. Chem. Phys. 36 (1962) 1990
3. Mishima O., Era K., Tanaka J., and Yamaoka S. Appl. Phys. Lett. 53 (1988) 962
4. Sugino T., Kawasaki S., Tanioka K., and Shirafuji J. Appl. Phys. Lett. 71 (1997) 2704
5. Sugino T., Kawasaki S., Tanioka K., and Shirafuji J. Diamond Relat. Mater. 7 (1998) 632
6. Pryor R.W., and Busta H. Appl. Phys. Lett. 68 (1996) 1802
7. Taniguchi T., Tanaka J., Mishima O., Ohsawa T., and Yamaoka S. Appl. Phys. Lett. 62 (1993) 576
8. Vetter U., Reinke P., Ronning C., Hofsaess H., Schaaf P., Bharuth-Ram K., and Taniguchi T. Diamond Relat. Mater. 12 (2003) 1182
9. Zhang X.W., Boyen H.-G., Deyneka N., Ziemann P., Banhart F., and Schreck M. Nat. Mater. 4 (2003) 312
10. S.M. Sze, Physics of Semiconductor Devices, Second Edition, John Wiley and Sons, Inc, p. 306.
11. Wang C.-X., Wang G.-X., Zhang T.-C., Liu H.-W., Han Y.-H., Luo J.-F., Gao C.-X., and Zou G.-T. Appl. Phys. Lett. 83 (2003) 4854
12. Werbowy A., Szmidt J., Sokolowska A., Olszyna A., and Mitura S. Diamond Relat. Mater. 5 (1996) 1017
13. Lu M., Bousetta A., Bensaoula A., Waters K., and Schultz J.A. Appl. Phys. Lett. 68 (1996) 622
14. Biersack J.P., and Haggmark L.G. Nucl. Instrum. Methods 174 (1980) 257
15. Boyen H.-G., Widmayer P., Schwertberger D., Deyneka N., and Ziemann P. Appl. Phys. Lett. 76 (2000) 709
16. Koslowski B., Strobel S., Wenig M.J., Martschat R., and Ziemann P. Diamond Relat. Mater. 7 (1998) 322
17. Ullmann J., Kellock A.J., and Baglin A.E.E. Thin Solid Films 341 (1999) 238
18. Krieger M., Plettl A., Steiner R., Boyen H.-G., and Ziemann P. Appl. Phys., A 78 (2004) 327
19. Steinbach D., Flöter A., Güttler H., Zachai R., and Ziemann P. Diamond Relat. Mater. 8 (1999) 273