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Volumn 203, Issue 10-11, 2009, Pages 1452-1456

Comparison and combination of several stress relief methods for cubic boron nitride films deposited by ion beam assisted deposition

Author keywords

Cubic boron nitride; Fourier transformed infrared spectroscopy; Ion beam assisted deposition; Stress relaxation

Indexed keywords

BEAM PLASMA INTERACTIONS; BORON; CUBIC BORON NITRIDE; DEPOSITION; FOURIER TRANSFORMS; INFRARED SPECTROSCOPY; ION BEAM ASSISTED DEPOSITION; ION BEAMS; ION BOMBARDMENT; IONS; NITRIDES; RESIDUAL STRESSES; SILICON; SPECTROSCOPIC ANALYSIS; SPECTRUM ANALYSIS; STRESS RELAXATION; STRESS RELIEF;

EID: 58549112173     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.11.021     Document Type: Article
Times cited : (14)

References (35)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.