Cubic boron nitride films by d.c. and r.f. magnetron sputtering: Layer characterization and process diagnostics

Diamond and Related Materials

Volumn 5, Issue 10, 1996, Pages 1103-1112

  Hahn, J ^a   Friedrich, M ^a   Pintaske, R ^a   Schaller, M ^a   Kahl, N ^a   Zahn, D R T ^a   Richter, F ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Cubic boron nitride; Film properties; Film sputtering; Plasma diagnostics

Indexed keywords

EID: 30244511194     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00507-2     Document Type: Article

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