Structural and electronic properties of boron nitride thin films containing silicon

Journal of Applied Physics

Volumn 84, Issue 9, 1998, Pages 5046-5051

  Ronning, C ^a   Banks, A D ^a   McCarson, B L ^a   Schlesser, R ^a   Sitar, Z ^a   Davis, R F ^a   Ward, B L ^b   Nemanich, R J ^b  

^a North Carolina State University   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000733217     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368752     Document Type: Article

References (26)

1. O. Mishima, J. Tanaka, S. Yamaoka, and O. Fukunaga, Science 238, 181 (1987); Appl. Phys. Lett. 53, 962 (1988).
2. O. Mishima, J. Tanaka, S. Yamaoka, and O. Fukunaga, Science 238, 181 (1987); Appl. Phys. Lett. 53, 962 (1988).
3. M. J. Powers, M. C. Benjamin, L. M. Porter, R. J. Nemanich, R. F. Davis, J. J. Cuomo, G. L. Doll, and S. J. Harris, Appl. Phys. Lett. 67, 3912 (1995).
4. T. Sugino, S. Kawasaki, K. Tanioka, and J. Shirafuji, Appl. Phys. Lett. 71, 2704 (1997); Diamond Relat. Mater. 7, 632 (1998).
5. T. Sugino, S. Kawasaki, K. Tanioka, and J. Shirafuji, Appl. Phys. Lett. 71, 2704 (1997); Diamond Relat. Mater. 7, 632 (1998).
6. C. Ronning, E. Dreher, H. Feldermann, M. Gross, M. Sebastian, and H. Hofsäss, Diamond Relat. Mater. 6, 1129 (1997).
7. J. Szmidt, A. Jakubowski, A. Michalski, and A. Rusek, Thin Solid Films 110, 7 (1983); Diamond Relat. Mater. 1, 681 (1992).
8. J. Szmidt, A. Jakubowski, A. Michalski, and A. Rusek, Thin Solid Films 110, 7 (1983); Diamond Relat. Mater. 1, 681 (1992).
9. A. R. Phani, S. Manorama, and V. J. Rao, Semicond. Sci. Technol. 10, 1520 (1995).
10. D. Litvinov, C. A. Taylor II, and R. Clarke, Diamond Relat. Mater. 7, 360 (1998).
11. R. W. Pryor and H. Busta, J. Appl. Phys. 82, 5148 (1997); Appl. Phys. Lett. 68, 1802 (1996); Mater. Res. Soc. Symp. Proc. 416, 425 (1996).
12. R. W. Pryor and H. Busta, J. Appl. Phys. 82, 5148 (1997); Appl. Phys. Lett. 68, 1802 (1996); Mater. Res. Soc. Symp. Proc. 416, 425 (1996).
13. R. W. Pryor and H. Busta, J. Appl. Phys. 82, 5148 (1997); Appl. Phys. Lett. 68, 1802 (1996); Mater. Res. Soc. Symp. Proc. 416, 425 (1996).
14. X.-A. Zhao, C. W. Ong, K. F. Chan, Y. M. Ng, Y. C. Tsang, C. L. Choy, and P. W. Chan, J. Vac. Sci. Technol. A 15, 2297 (1997).
15. P. B. Mirkarimi, K. F. McCarty, and D. L. Medlin, Mater. Sci. Eng., R. 21, 1 (1997).
16. R. F. Davis, D. J. Kester, and K. S. Ailey, in Chemical Vapor Deposition of Refractory Metals and Ceramics III, edited by B. M. Gallois et al. [Mater. Res. Soc. Symp. Proc. 363, 139 (1995)]; J. Mater. Res, 8, 1213 (1993).
17. R. F. Davis, D. J. Kester, and K. S. Ailey, in Chemical Vapor Deposition of Refractory Metals and Ceramics III, edited by B. M. Gallois et al. [Mater. Res. Soc. Symp. Proc. 363, 139 (1995)]; J. Mater. Res, 8, 1213 (1993).
18. H. Hofsäss, H. Feldermann, M. Sebastian, and C. Ronning, Phys. Rev. B 55, 13230 (1997).
19. H. Hofsäss, H. Feldermann, R. Merk, M. Sebastian, and C. Ronning, Appl. Phys. A: Mater. Sci. Process. 66, 153 (1998), and references therein.
20. D. J. Kester and R. Messier, J. Appl. Phys. 72, 504 (1992).
21. S. Reinke, M. Kuhr, W. Kulish, and R. Kassing, Diamond Relat. Mater. 4, 272 (1995).
22. K. S. Park, D. Y. Lee, K. J. Kim, and D. W. Moon, Appl. Phys. Lett. 70, 315 (1997).
23. R. Trehan, Y. Lifshitz, and S. W. Rabalais, J. Vac. Sci. Technol. A 8, 4026 (1990).
24. Handbook of X-ray Photoelectron Spectroscopy, edited by J. Chastain (Perkin-Elmer, Eden Prairie, MN, 1992), p. 215.
25. R. H. Fowler and L. W. Nordheim, Proc. R. Soc. London, Ser. A 119, 173 (1928).
26. R. Schlesser, M. T. McClure, B. L. McCarson, and Z. Sitar, J. Appl. Phys. 82, 5763 (1997).