-
3
-
-
0006840121
-
-
O. Tsuda, Y. Yamada, T. Fujii and T. Yoshida, J. Vac. Sci. Technol. A, 13 (1995) 2483.
-
(1995)
J. Vac. Sci. Technol. A
, vol.13
, pp. 2483
-
-
Tsuda, O.1
Yamada, Y.2
Fujii, T.3
Yoshida, T.4
-
4
-
-
0042861840
-
-
O. Tsuda, Y. Yamada, Y. Tatebayashi and T. Yoshida, Proc. 12th Int. Symp. on Plasma Chemistry, Minnesota, 1995, p. 2041.
-
Proc. 12th Int. Symp. on Plasma Chemistry, Minnesota, 1995
, pp. 2041
-
-
Tsuda, O.1
Yamada, Y.2
Tatebayashi, Y.3
Yoshida, T.4
-
5
-
-
3142644704
-
-
T. Ichiki, S. Amagi and T. Yoshida, Proc. 12th Int. Symp. on Plasma Chemistry, Minnesota, 1995, p. 2047.
-
Proc. 12th Int. Symp. on Plasma Chemistry, Minnesota, 1995
, pp. 2047
-
-
Ichiki, T.1
Amagi, S.2
Yoshida, T.3
-
9
-
-
0025462188
-
-
M. Mieno and T. Yoshida, Jpn. J. Appl. Phys., 29 (1990) L1175; Surf. Coat. Technol., 52 (1992) 87.
-
(1992)
Surf. Coat. Technol.
, vol.52
, pp. 87
-
-
-
10
-
-
0027588969
-
-
K. Bewilogua, J. Buth, H. Hübsch and M. Grischke, Diamond Relat. Mater., 2 (1993) 1206.
-
(1993)
Diamond Relat. Mater.
, vol.2
, pp. 1206
-
-
Bewilogua, K.1
Buth, J.2
Hübsch, H.3
Grischke, M.4
-
12
-
-
0000727757
-
-
S. Ulrich, J. Scherer, J. Schwan, I. Barzen, K. Jung and H. Ehrhardt, Diamond Relat. Mater., 4 (1995) 288.
-
(1995)
Diamond Relat. Mater.
, vol.4
, pp. 288
-
-
Ulrich, S.1
Scherer, J.2
Schwan, J.3
Barzen, I.4
Jung, K.5
Ehrhardt, H.6
-
17
-
-
0027608960
-
-
D.J. Kester, K.S. Ailey, R.F. Davis and K.L. More, J. Mater. Res., 8 (1993) 1213.
-
(1993)
J. Mater. Res.
, vol.8
, pp. 1213
-
-
Kester, D.J.1
Ailey, K.S.2
Davis, R.F.3
More, K.L.4
-
18
-
-
3142534298
-
-
L.B. Hackenberger, L.J. Pilione, R. Messier and G.P. Lamaze, J. Vac. Sci. Technol. A, 12 (1994) 15.
-
(1994)
J. Vac. Sci. Technol. A
, vol.12
, pp. 15
-
-
Hackenberger, L.B.1
Pilione, L.J.2
Messier, R.3
Lamaze, G.P.4
-
19
-
-
21844489067
-
-
D.J. Kester, K.S. Ailey, D.J. Lichtenwalner and R.F. Davis, J. Vac. Sci. Technol. A, 12 (1994) 3074.
-
(1994)
J. Vac. Sci. Technol. A
, vol.12
, pp. 3074
-
-
Kester, D.J.1
Ailey, K.S.2
Lichtenwalner, D.J.3
Davis, R.F.4
-
20
-
-
0028514659
-
-
T.A. Friedmann, P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, E.J. Klaus, D.R. Boehme, H.A. Johnsen, M.J. Mills, D.K. Ottesen and J.C. Barbou, J. Appl. Phys., 76 (1994) 3088.
-
(1994)
J. Appl. Phys.
, vol.76
, pp. 3088
-
-
Friedmann, T.A.1
Mirkarimi, P.B.2
Medlin, D.L.3
McCarty, K.F.4
Klaus, E.J.5
Boehme, D.R.6
Johnsen, H.A.7
Mills, M.J.8
Ottesen, D.K.9
Barbou, J.C.10
-
21
-
-
0001008353
-
-
D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, M.J. Mills and K.F. McCarty, Phys. Rev. B, 50 (1994) 7884.
-
(1994)
Phys. Rev. B
, vol.50
, pp. 7884
-
-
Medlin, D.L.1
Friedmann, T.A.2
Mirkarimi, P.B.3
Mills, M.J.4
McCarty, K.F.5
-
22
-
-
0002879173
-
-
H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke and M. Kuhr, Appl. Phys. Lett., 67 (1995) 46.
-
(1995)
Appl. Phys. Lett.
, vol.67
, pp. 46
-
-
Hofsäss, H.1
Ronning, C.2
Griesmeier, U.3
Gross, M.4
Reinke, S.5
Kuhr, M.6
-
24
-
-
0027912372
-
-
A. Weber, U. Bringmann, R. Nikulski and C.-P. Klages, Surf. Coat. Technol., 60 (1993) 493.
-
(1993)
Surf. Coat. Technol.
, vol.60
, pp. 493
-
-
Weber, A.1
Bringmann, U.2
Nikulski, R.3
Klages, C.-P.4
-
26
-
-
0040211842
-
-
A. Bergmaier, G. Dollinger, T. Faestermann, C.M. Frey, W. Dworschak and H. Ehrhardt, Diamond Relat. Mater., 4 (1995) 478.
-
(1995)
Diamond Relat. Mater.
, vol.4
, pp. 478
-
-
Bergmaier, A.1
Dollinger, G.2
Faestermann, T.3
Frey, C.M.4
Dworschak, W.5
Ehrhardt, H.6
-
27
-
-
0042861829
-
-
to be published
-
M. Kuhr, S. Reinke and W. Kulisch, Proc. Plasma Surface Engineering '94, Garmisch-Partenkirchen, Germany, 1994, to be published.
-
Proc. Plasma Surface Engineering '94, Garmisch-partenkirchen, Germany, 1994
-
-
Kuhr, M.1
Reinke, S.2
Kulisch, W.3
-
28
-
-
0000036569
-
-
S. Reinke, M. Kuhr, W. Kulisch and R. Kassing, Diamond Relat. Mater., 4 (1995) 272.
-
(1995)
Diamond Relat. Mater.
, vol.4
, pp. 272
-
-
Reinke, S.1
Kuhr, M.2
Kulisch, W.3
Kassing, R.4
-
29
-
-
0028463481
-
-
D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, P. Rez, M.J. Mills and K.F. McCarty, J. Appl. Phys., 76 (1994) 295.
-
(1994)
J. Appl. Phys.
, vol.76
, pp. 295
-
-
Medlin, D.L.1
Friedmann, T.A.2
Mirkarimi, P.B.3
Rez, P.4
Mills, M.J.5
McCarty, K.F.6
-
30
-
-
0000754567
-
-
R.A. Roy, P. Catania, K.L. Saenger, J.J. Cuomo and R.L. Lossy, J. Vac. Sci. Technol. B, 11 (1993) 1921.
-
(1993)
J. Vac. Sci. Technol. B
, vol.11
, pp. 1921
-
-
Roy, R.A.1
Catania, P.2
Saenger, K.L.3
Cuomo, J.J.4
Lossy, R.L.5
-
31
-
-
0028543108
-
-
P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedmann, E.J. Klaus, G.F. Cardinale and D.G. Howitt, J. Mater. Res., 9 (1994) 2925.
-
(1994)
J. Mater. Res.
, vol.9
, pp. 2925
-
-
Mirkarimi, P.B.1
McCarty, K.F.2
Medlin, D.L.3
Wolfer, W.G.4
Friedmann, T.A.5
Klaus, E.J.6
Cardinale, G.F.7
Howitt, D.G.8
-
32
-
-
21544477583
-
-
D.R. McKenzie, W.D. McFall, W.G. Sainty, C.A. Davis and R.E. Collins, Diamond Relat. Mater., 2 (1993) 970.
-
(1993)
Diamond Relat. Mater.
, vol.2
, pp. 970
-
-
McKenzie, D.R.1
McFall, W.D.2
Sainty, W.G.3
Davis, C.A.4
Collins, R.E.5
-
34
-
-
36449009291
-
-
J. Robertson, J. Gerber, S. Sattel, M. Weiler, K. Jung and H. Ehrhardt, Appl. Phys. Lett., 66 (1995) 3287.
-
(1995)
Appl. Phys. Lett.
, vol.66
, pp. 3287
-
-
Robertson, J.1
Gerber, J.2
Sattel, S.3
Weiler, M.4
Jung, K.5
Ehrhardt, H.6
-
36
-
-
84957278646
-
-
K. Inagawa, K. Watanabe, H. Ohsone, K. Saitoh and A. Itoh, J. Vac. Sci. Technol. A, 5 (1987) 2696.
-
(1987)
J. Vac. Sci. Technol. A
, vol.5
, pp. 2696
-
-
Inagawa, K.1
Watanabe, K.2
Ohsone, H.3
Saitoh, K.4
Itoh, A.5
-
38
-
-
0000057686
-
-
W.L. Zhou, Y. Ikuhara, M. Murakawa, S. Watanabe and T. Suzuki, Appl. Phys. Lett., 66 (1995) 2490.
-
(1995)
Appl. Phys. Lett.
, vol.66
, pp. 2490
-
-
Zhou, W.L.1
Ikuhara, Y.2
Murakawa, M.3
Watanabe, S.4
Suzuki, T.5
|