Direct growth of c-BN on a mono-structured transition layer by plasma-enhanced chemical vapor deposition

Diamond and Related Materials

Volumn 11, Issue 11, 2002, Pages 1854-1857

  Iwamoto, C ^a   Yang, H S ^a   Yoshida, T ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Boron nitride; c BN; Chemical vapor deposition; Electron microscopy

Indexed keywords

AMORPHOUS MATERIALS; BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; PLASMAS; SILICON COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

MONO-STRUCTURED TRANSITIONS;

DIAMONDS;

BORON NITRIDE; CHEMICAL VAPOR DEPOSITION; ELECTRON MICROSCOPY;

EID: 0036841219     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00173-5     Document Type: Article

References (19)