Purity of epitaxial cubic BoronNitride films on (001) Diamond - A prerequisite for their doping

Diamond and Related Materials

Volumn 17, Issue 3, 2008, Pages 276-282

  Yin, H ^a   Boyen, H G ^a   Ziemann, P ^a   Dohuard, B ^b   Houssiau, L ^b   Renaux, F ^c   Hecq, M ^c   Bittencourt, C ^c  

^a UNIVERSITY OF ULM   (Germany)

^b UNIVERSITY OF NAMUR   (Belgium)

^c MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

c BN; Si doping; ToF SIMS depth profiles

Indexed keywords

DIAMONDS; DOPING (ADDITIVES); EPITAXIAL FILMS; IMPURITIES; SECONDARY ION MASS SPECTROMETRY; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILES; PURITY; RESOLUTION LIMIT; VACANCY SITES;

CUBIC BORON NITRIDE;

EID: 40749115183     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.12.062     Document Type: Article

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