The growth of thick cBN films employing fluorine chemistry and ECR deposition

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 1162-1168

  Chan, C Y ^a   Zhang, W J ^a   Meng, X M ^a   Chan, K M ^a   Bello, I ^a   Lifshitz, Y ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Cubic boron nitride; Nitrides; Plasma chemical vapor deposition (CVD); Raman spectroscopy

Indexed keywords

CRYSTALLINE MATERIALS; CUBIC BORON NITRIDE; ELECTRON CYCLOTRON RESONANCE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BOMBARDMENT; RAMAN SCATTERING; RESIDUAL STRESSES; TRANSMISSION ELECTRON MICROSCOPY;

GAS COMPOSITION;

THICK FILMS;

DIAMOND;

EID: 0037508553     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00288-1     Document Type: Article

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