Adhesion improvement of cubic BN:C film synthesized by a helicon wave plasma chemical vapor deposition process

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 3, 2000, Pages 900-906

  Kim, Kyoung Bo ^a   Kim, Seon Hyo ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CARBON; CUBIC BORON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SILICON WAFERS; STRESS ANALYSIS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

HELICON WAVE PLASMA CHEMICAL VAPOR DEPOSITION;

THIN FILMS;

EID: 0034187817     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582273     Document Type: Article

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