Electrical properties and thermal stability of ion beam deposited BN thin films

Diamond and Related Materials

Volumn 6, Issue 9, 1997, Pages 1129-1134

  Ronning, C ^a   Dreher, E ^a   Feldermann, H ^a   Gross, M ^a   Sebastian, M ^a   Hofsass H ^a  

^a UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

Cubic boron nitride; Electrical properties; Ion beam deposition; Thermal stability

Indexed keywords

EID: 0001461614     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00021-6     Document Type: Article

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