Review of advances in cubic boron nitride film synthesis

Materials Science and Engineering R: Reports

Volumn 21, Issue 2, 1997, Pages 47-100

  Mirkarimi, P B ^a,b   McCarty, K F ^a   Medlin, D L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

c BN; Characterization; Cubic boron nitride; Deposition; Films; Mechanisms

Indexed keywords

CRYSTAL MICROSTRUCTURE; DEPOSITION; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; SYNTHESIS (CHEMICAL); THIN FILMS;

FILM CHARACTERIZATION;

CUBIC BORON NITRIDE;

EID: 0031339504     PISSN: 0927796X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-796X(97)00009-0     Document Type: Review

References (290)

1. L. Vel, G. Demazeau, J. Etourneau, Mater. Sci. Engin. B 10 (1991) 149.
2. H. Holleck, J. Vac. Sci. Technol. A 4 (1986) 2661.
3. R.C. DeVries, in: R.E. Clausing (ed.), Diamond and Diamond-Like Films and Coatings, Plenum Press, New York, 1991, p. 151.
4. R. Haubner, B. Lux, Diamond Relat. Mater. 2 (1993) 1277.
5. R.C. DeVries, General Electric Company Corporate Research and Development Report No. 72CRD178, 1972.
6. P.J. Gielisse, S.S. Mitra, J.N. Plendl, R.D. Griffis, L.C. Mansur, R. Marshall, E.A. Pascoe, Phys. Rev. 155 (1967) 1039.
7. R.H. Wentorf, Jr., J. Chem. Phys. 36 (1962) 1990.
8. O. Mishima, in: J.J. Pouch, S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride, Materials Science Forum, Vol. 54/55, Trans Tech Publications, Brookfield, 1990, p. 313.
9. W.A. Yarborough, J. Vac. Sci. Technol. A 9 (1991) 1145.
10. O. Mishima, K. Era, J. Tanaka, S. Yamaoka, Appl. Phys. Lett. 53 (1988) 962.
11. D.R. McKenzie, D.J.H. Cockayne, D.A. Muller, M. Murakawa, S. Miyake, S. Wantanabe, P. Fallon, J. Appl. Phys. 70 (1991) 3007.
12. D.J. Kester, K.S. Ailey, R.F. Davis, K.L. More, J. Mater. Res. 8 (1993) 1213.
13. S.P.S. Arya, A. D'Amico, Thin Solid Films 157 (1988) 267.
14. L.B. Hackenberger, L.J. Pilione, R. Messier, in: F. Matacotta, G. Ottaviani (eds.), Science and Technology of Thin Films, World Scientific, Singapore, 1996.
15. W. Kulisch, S. Reinke, Diamond Films Technol. 7 (1997) 105.
16. F. Richter, in: Diamond Materials IV Electrochemical Society Proc., Vol. 94/95, eds. K.V. Ravi, K.E. Spear, J.L. Davidson, R.H. Hauge, J.P. Dismukes, The Electrochemical Society, Pennington, NJ, 1995.
17. T. Yoshida, Diamond Relat. Mater. 5 (1996) 501.
18. A.V. Kurdyumov, V.L. Solozhenko, W.B. Zelyavski, J. Appl. Cryst. 28 (1995) 540.
19. R.S. Pease, Acta. Cryst. 5 (1952) 356.
20. T. Ishii, T. Sato, Y. Sekikawa, M. Iwata, J. Cryst. Growth 52 (1981) 285.
21. F.S. Galasso, Structure and Properties of Inorganic Solids, Pergamon Press, Oxford, 1970.
22. R.R. Wills, Int. J. High Technology Ceramics 1 (1985) 139.
23. R.H. Wentorf, Jr., J. Chem Phys. 26 (1957) 956.
24. F.P. Bundy, R.H. Wentorf, J. Chem. Phys. 38 (1963) 1144.
25. A. Herold, B. Marzluf, P. Perio, C.R. Acad. Sci. 246 (1958) 1866.
26. B.T. Kelly, Physics of Graphite, Applied Science Publishers, London, 1981.
27. J. Thomas Jr., N.E. Weston, T.E. O'Connor, J. Amer. Chem. Soc. 84 (1963) 4619.
28. K.F. McCarty, P.B. Mirkarimi, D.L. Medlin, T.F. Friedmann, Diamond Relat. Mater. 5 (1996) 1519.
29. G. Demazeau, Diamond Relat. Mater. 4 (1995) 284.
30. F.R. Corrigan, F.P. Bundy, J. Chem. Phys. 63 (1975) 3812.
31. V.L. Solozhenko, Thermochimica Acta 218 (1993) 221.
32. S. Nakano, O. Fukunaga, Diamond Relat. Mater. 2 (1993) 1409.
33. S. Bohr, R. Haubner, B. Lux, Diamond Relat. Mater. 4 (1995) 714.
34. T. Sato, T. Ishii, N. Setaka, Commun. Am. Ceram. Soc. 65 (1982) C162.
35. M. Ueno, K. Hasegawa, R. Oshima, A. Onodera, O. Shimomura, K. Takemura, H. Nakae, T. Matsuda, T. Hirai, Phys. Rev. B 45 (1992) 10226.
36. D.R. McKenzie, W.G. Sainty, D. Green, in: J.J. Pouch, S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride, Materials Science Forum, Vol. 54/55, Trans Tech Publications, Brookfield, 1990, p. 193.
37. G. Turrell, Infrared and Raman Spectra of Crystals, Academic Press, London, 1972.
38. M.H. Brodsky, in: M. Cardona, G. Güntherodt (eds.), Light Scattering in Solids I, Topics in Appl. Phys., Vol. 8, Springer, Berlin, 1982, p. 205.
39. M.I. Eremets, M. Gauthier, A. Polian, J.C. Chervon, J.M. Besson, G.A. Dubitskii, Y.Y. Semenova, Phys. Rev. B 52 (1995) 8854.
40. O. Brafman, G. Lengyel, S.S. Mitra, P.J. Gielisse, J.N. Plendl, L.C. Mansur, Solid State Commun. 6 (1968) 523.
41. G.L. Doll, in: J.H. Edgar (ed.), Properties of Group III Nitrides, INSPEC, London, 1994, p. 245.
42. R. Geick, C.H. Perry, G. Rupprecht, Phys. Rev. 146 (1966) 543.
43. R.J. Nemanich, S.A. Solin, R.M. Martin, Phys. Rev. B 23 (1980) 6348.
44. T. Sato, Proc. Japan Acad. 61B (1985) 459.
45. J. Liu, Y.K. Vohra, T.J.T., S.S. Vagarali, Phys. Rev. B 51 (1995) 8591.
46. G. Kessler, K.D. Bauer, W. Pompe, J.J. Scheibe, Thin Solid Films 147 (1987) L45.
47. Light Scattering in Solids III, Topics Applied Physics, Vol. 51, eds. M. Cardona, G. Guntherodt, Springer, Berlin, 1982, p. 8.
48. G.L. Doll, Sprong meeting of the Materials Research Society, San Francisco, CA, (1995).
49. T.A. Friedmann, K.F. McCarty, E.J. Klaus, J.C. Barbour, W.M. Clift, H.A. Johnsen, D.L. Medlin, M.J. Mills, D.K. Ottesen, Thin Solid Films 237 (1993) 48.
50. W. Dworschak, K. Jung, H. Ehrhardt, Thin Solid Films 254 (1995) 65.
51. M. Kuhr, S. Reinke, W. Kulisch, Diamond Relat. Mater. 4 (1995) 375.
52. P. Lin, C. Deshpandey, H.J. Doerr, R.F. Bunshah, K.L. Chopra, V. Vankar, Thin Solid Films 153 (1987) 487.
53. D.M. Back, in: Physics of Thin Films, Vol. 15, Academic Press, Boston, MA, 1991, p. 287.
54. Y.S. Yen, J.S. Wang, J. Phys. Chem. 93 (1989) 7208.
55. T.A. Friedmann, P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, E.J. Klaus, D. Boehme, H.A. Johnsen, M.J. Mills, D.K. Ottesen, J. Appl. Phys. 76 (1994) 3088.
56. P.B. Mirkarimi, K.F. McCarty, G.F. Cardinale, D.L. Medlin, D.K. Ottesen, H.A. Johnsen, J. Vac. Sci. Technol. A 14 (1996) 251.
57. S. Jäger, K. Bewilogua, C.-P. Klages, Thin Solid Films 245 (1994) 50.
58. O. Tsuda, Y. Yamada, T. Fujii, T. Yoshida, J. Vac. Sci. Technol. 13 (1995) 2843.
59. H. Yokoyama, M. Okamoto, Y. Osaka, Jpn. J. Appl. Phys. 30 (1991) 344.
60. M. Friedrich, J. Hahn, S. Laufer, F. Richter, H.-J. Hinneberg, D.R.T. Zahn, in: K.V. Ravi, K.E. Spear, J.L. Davidson, R.H. Hauge, J.P. Dismukes (eds.), Diamond Materials IV Electrochemical Society Proc., Vol. 94/95, The Electrochemical Society, Pennington, NJ, 1995.
61. D.R. McKenzie, W.D. McFall, W.G. Sainty, C.A. Davis, R.E. Collins, Diamond Relat. Mater. 2 (1993) 970-976.
62. S. Fahy, Phys. Rev. B 51 (1995) 12873.
63. S. Fahy, Phys. Rev. B 53 (1996) 11884.
64. See also M. Cardona, E. Anastassakis, Phys. Rev. B 54 (1996) 14888.
65. L.B. Hackenberger, L.J. Pilione, R. Messier, G.P. Lamaze, J. Vac. Sci. Technol. A 12 (1994) 1569.
66. S. Fahy, C.A. Taylor II, R. Clarke, Phys. Rev. B (1997), submitted.
67. W. Gissler, J. Haupt, T.A. Crabb, P.N. Gibson, D.G. Rickerby, Mater. Sci. Engin. A 139 (1991) 284.
68. W. Dworschak, K. Jung, H. Ehrhardt, Diamond Relat. Mater. 3 (1994) 337.
69. Joint Committee on Powder Diffraction Standards, JCPDS, Swarthmore, PA, pattern 25-1033.
70. Y.G. Andreev, T. Lundstrom, J. Appl. Cryst. 27 (1994) 767.
71. C.R. Aita, in: J.J. Pouch, S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride, Materials ScienceForum, Vol. 54/55, Trans Tech Publications, Brookfield, 1990, p. 1.
72. V.Y. Kulikovsky, L.R. Shaginyan, V.M. Vereschaka, N.G. Hatyenko, Diamond Relat. Mater. 4 (1995) 113.
73. G.L. Doll, T.A. Perry, J.A. Sell, in: H.A. Atwater, F.A. Houle, D.H. Lowndes (eds.), Surface Chemistry and Beam-Solid Interactions, Vol. 201, Materials Research Society, Pittsburgh, PA, 1991, p. 207.
74. Joint Committee on Powder Diffraction Standards, JCPDS, Swarthmore, PA, pattern 34-421.
75. Joint Committee on Powder Diffraction Standards, JCPDS, Swarthmore, PA, pattern 12-377.
76. B.D. Cullity, Elements of X-Ray Diffraction, 2nd edn., Addison-Wesley, Reading, MA, 1978.
77. D.G. Rickerby, P.N. Gibson, W. Gissler, J. Haupt, Thin Solid Films 209 (1992) 155.
78. S. Kidner, C.A. Taylor II, R. Clarke, Appl. Phys. Lett. 64 (1994) 1859.
79. A.K. Ballal, L. Salamanca-Riba, C.A. Taylor II, G.L. Doll, Thin Solid Films 224 (1993) 46.
80. D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, P. Rez, K.F. McCarty, M.J. Mills, J. Appl. Phys. 76 (1994) 295.
81. L.F. Allard, A.K. Datye, T.A. Nolan, S.L. Mahan, R.T. Paine, Ultramicroscopy 37 (1991) 153.
82. S. Turan, K.M. Knowles, Phys. Status Solidi 150 (1995) 227.
83. D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, M.J. Mills, F.M. K, Phys. Rev. B 50 (1994) 7884.
84. D.J. Smith, W.O. Saxton, M.A. O'Keefe, G.J. Wood, W.M. Stobbs, Ultramicroscopy 11 (1983) 263.
85. K.F. McCarty, M.J. Mills, D.L. Medlin, T.A. Friedmann, Phys. Rev. B 50 (1994) 8907.
86. H.K. Schmid, Microsc. Microanal. Microstruct. 6 (1995) 99.
87. C.A. Davis, K.M. Knowles, G.A.J. Araratunga, Surf. Coat. Technol. 76 (1995) 316.
88. D.A. Muller, Y. Tzou, R. Raj, J. Silcox, Nature 366 (1993) 725.
89. G. Sené, D. Bouchier, S. Ilias, M.A. Djouadi, V. Stambouli, P. Möller, G. Hug, S. Reinke, unpublished work, 1996.
90. O. Burat, D. Bouchier, V. Stambouli, G. Gautherin, J. Appl. Phys. 68 (1990) 2780.
91. W.B. Sainty, P.J. Martin, R.P. Netterfield, D.R. McKenzie, D.J.H. Cockayne, D.M. Dwarte, J. Appl. Phys. 64 (1988) 3980.
92. R. Trehan, Y. Lifshitz, J.W. Rabalais, J. Vac. Sci. Technol. A 8 (1990) 4026.
93. A. Weber, U. Bringmann, R. Nikulski, C.P. Klages, Diamond Relat. Mater. 2 (1993) 201.
94. G.P. Lamaze, R.G. Downing, L.B. Hackenberger, L.J. Pilione, R. Messier, Diamond Relat. Mater. 3 (1994) 728.
95. T. Werninghaus, J. Hahn, F. Richter, D.R.T. Zahn, Appl. Phys. Lett. 70 (1997) 958.
96. J.W. Robinson, Handbook of Spectroscopy, Vol. 2, CRC Press, Cleveland, OH, 1974, p. 108.
97. A. Chaiken, L.J. Terminello, J. Wong, G.L. Doll, C.A. Taylor II, Appl. Phys. lett. 63 (1993) 2112.
98. L.J. Terminello, A. Chaiken, D.A. Lapiano-Smith, G.L. Doll, T. Sato, J. Vac. Sci. Technol. 12 (1994) 2462.
99. M. Jaouen, G. Hug, V. Gonnet, G. Demazeau, G. Tourillon, Microsc. Microanal. Microstruc. 6 (1995) 127.
100. O. Stenzel, J. Hahn. M. Röder, A. Ehrlich, S. Prause, F. Richter, Phys. Status Solidi A 158 (1996) 281.
101. H. Hofsäss, H. Feldermann, M. Sebastian, C. Ronning, Phys. Rev. B55 (1997) 13230.
102. T. Ishii, T. Sato, J. Crystal Growth 61 (1983) 689.
103. K. Inagawa, K. Watanabe, H. Ohsone, K. Saitoh, A. Itoh, J. Vac. Sci. Technol. A 5 (1987) 2696.
104. T. Ikeda, Y. Kawate, Y. Hirai, J. Vac. Sci. Technol. A 8 (1990) 3168.
105. D.J. Kester, R. Messier, J. Appl. Phys. 72 (1992) 504.
106. T. Ikeda, Appl. Phys. Lett. 61 (1992) 786.
107. N. Tanabe, T. Hayashi, M. Iwaki, Diamond Relat. Mater. 1 (1992) 151.
108. P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedmann, E.J. Klaus, G.F. Cardinale, D.G. Howitt, J. Mater. Res. 9 (1994) 2925.
109. D. Bouchier, G. Sené, M.A. Djouadi, P. Möller, Nucl. Instrum. Meth. B 89 (1994) 369.
110. R. Ganzetti, W. Gissler, Mater. Manuf. Processes 9 (1994) 507.
111. S. Reinke, M. Kuhr, W. Kulisch, Diamond Relat. Mater. 3 (1994) 341.
112. S. Reinke, M. Kuhr, W. Kulisch, Surf. Coat. Technol. 74/75 (1995) 723.
113. S. Reinke, M. Kuhr, W. Kulisch, R. Kassing, Diamond Relat. Mater. 4 (1995) 272.
114. J.D. Targove, H.A. Macleod, Appl. Opt. 27 (1988) 3779.
115. H. Kawashima, N. Shibata, Jpn. J. Appl. Phys. 34 (1995) 5758.
116. S. Ulrich, J. Schwan, W. Donner, H. Ehrhardt, Diamond Relat. Mater. 5 (1996) 548.
117. M.P. Johansson, I. Ivanoz, L. Hultman, P. Munger, A. Schütze, J. Vac. Sci. Tecnol. A 14 (1996) 3100.
118. D.J. Kester, R. Messier, Mater. Res. Soc. Symp. Proc. 235 (1992) 721.
119. M. Kuhr, S. Reinke, W. Kulisch, Surf. Coat. Technol. 74/75 (1995) 806.
120. G. Sené, D. Bouchier, S. Ilias, M.A. Djouadi, J. Pascallon, V. Stambouli, P. Möller, G. Hug, Diamond Relat. Mater. 5 (1996) 530.
121. C.A. Taylor II, R. Clarke, Appl. Phys. Lett. (1997). submitted.
122. D.R. McKenzie, W.D. McFall, H. Smith, B. Higgins, R.W. Boswell, A. Durandet, B.W. James, I.S. Falconer, Nucl. Instrum. Meth. B 106 (1995) 90.
123. J. Hahn, F. Richter, R. Pintaske, M. Röder, E. Schneider, T. Welzel, Surf. Coat. Technol. 92 (1996) 129.
124. M. Sueda, T. Kobayashi, H. Tsukamoto, T. Rokkaku, S. Morimoto, Y. Fukaya, N. Yamashita, T. Wada, Thin Solid Films 228 (1993) 97.
125. J.P. Biersack, L.G. Haggmark, Transport of Ions in Matter proaram, Nuclear Instruments and Methods 174 (1980) 257-269.
126. J.F. Ziegler, J.P. Biersak, U. Littmark, The Stopping and Range of Ions in Solids, Pergamon Press, New York, 1985.
127. P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, J.C. Barbour, Appl. Phys. Lett. 66 (1995) 2813.
128. K. Bewilogua, J. Buth, H. Hubsch, M. Grischke, Diamond Relat. Mater. 2 (1993) 1206.
129. M. Mieno, T. Yoshida, Jpn. J. Appl. Phys. 29 (1990) L1175.
130. T. Wada, N. Yamashita, J. Vac. Sci. Technol. A10 (1992) 515.
131. Y. Andoh, K. Ogata, E. Kamijo, Nucl. Instrum. Meth. 33 (1988) 678.
132. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, M. Kuhr, Appl. Phys. Lett. 67 (1995) 46.
133. D.J. Kester, K.S. Ailey, D.J. Lichtenwalner, R.F. Davis, J. Vac. Sci. Technol. A 12 (1994) 3074.
134. P.X. Yan, S.Z. Yang, B. Li, X.S. Chen, J. Cryst. Growth 148 (1995) 232.
135. W.L. Lin, Z. Xia, Y.L. Liu, Y.C. Fen, Mater. Sci. Engin. B 7 (1990) 107.
136. J.J. Cuomo, J.P. Doyle, J. Bruley, J.C. Liu, Appl. Phys. Lett. 58 (1991) 466.
137. P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, D.C. Dibble, W.M. Clift, J.A. Knapp, J.C. Barbour, J. Appl. Phys. 82 (1997) 1617.
138. M.J. Paisley, L.P. Bourget, R.F. Davis, Thin Solid Films 235 (1993) 30.
139. H. Lüthje, K. Bewilogua, S. Daaud, M. Johansson, L. Hultman, Thin Solid Films 257 (1995) 40.
140. M. Okamato, H. Yokoyama, Y. Osaka, Jpn. J. Appl. Phys. 29 (1990) 930.
141. M. Okamoto, Y. Utsumi, Y. Osaka, Jpn. J. Appl. Phys. 29 (1990) L1004.
142. F. Zhang, Y. Guo, Z. Song, G. Chen, Appl. Phys. Lett. 65 (1994) 971.
143. M. Murakawa, S. Watanabe, Surf. Coat. Technol. 43/44 (1990) 145.
144. S. Shanfield, R. Wolfson, J. Vac. Sci. Technol. A 1 (1983) 323.
145. S. Nishiyama, N. Kuratani, A. Ebe, K. Ogata, Nucl. Instrum. Meth. B 80/81 (1993) 1485.
146. T. Ikeda, T. Satou, H. Satoh, Surf. Coat. Technol. 50 (1991) 33.
147. M. Murakawa, S. Watanabe, Surf. Coat. Technol. 43/44 (1990) 128.
148. T. Ikeda, Appl. Phys. Lett. 61 (1992) 786.
149. S. Watanabe, S. Miyake, M. Murakawa, Surf. Coat. Technol. 49 (1991) 406.
150. M. Lu, A. Bousetta, R. Sukach, A. Bensaoula, K. Walters, K. Eipers-Smith, A. Schultz, Appl. Phys. Lett. 64 (1994) 1514.
151. S. Mineta, M. Kolrata, N. Yasunaga, Y. Kikuta, Thin Solid Films 189 (1990) 125.
152. A.K. Ballal, L. Salamanca-Riba, G.L. Doll, C.A. Taylor II, R. Clarke, J. Mater. Res. 7 (1992) 1618.
153. E.V. Pechen, A.V. Varlashkin, S.I. Krasnosvobodtsev, B. Brunner, K.F. Renk, Appl. Phys. Lett. 66 (1995) 2292.
154. M.D. Wiggins, C.R. Aita, F.S. Hickernell, J. Vac. Sci. Technol. A 2 (1984) 322.
155. W. Gissler, J. Haupt, A. Hoffmann, P.N. Gibson, D.G. Rickerby, Thin Solid Films 199 (1991) 113.
156. M. Mieno, T. Yoshida, Surf. Coat. Technol. 52 (1992) 87.
157. J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, F. Richter, Diamond Relat. Mater. 5 (1996) 1103.
158. A. Schütze, K. Bewilogua, H. Lüthje, S. Kouptsidas, S. Jäger, Surf. Coat. Technol. 74/75 (1995) 717.
159. N. Tanabe, M. Iwaki, Nucl. Instrum. Meth. B 80/81 (1993) 1349.
160. M.P. Johansson, L. Hultman, S. Daaud, K. Bewilogua, H. Lüthje, A. Schütze, S. Kouptsidas, G.S.A.M. Theunissen, Thin Solid Films 287 (1996) 193.
161. P.B. Mirkarimi, unpublished work, 1996.
162. A. Chayahara, H. Yokoyama, T. Imura, Y. Osaka, Jpn. I. Appl. Phys. 26 (1987) L1435.
163. A. Chayahara, H. Yokoyama, T. Imura, Y. Osaka, Appl. Surf. Sci. 33/34 (1988) 561.
164. H. Saitoh, T. Hirose, H. Matsui, Y. Hirotsu, Y. Ichinose, Surf. Coat. Technol. 39/40 (1989) 265.
165. Y. Osaka, A. Chayahara, H. Yokoyama, M. Okamoto, T. Hamada, T. Imura, M. Fujisawa, in: J.J. Pouch, S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride, Materials Science Forum, Vol. 54/55, Trans Tech Publications, Brookfield, 1990.
166. T. Ichiki, T. Momose, T. Yoshida, J. Appl. Phys. 75 (1994) 1330.
167. M. Okamoto, Y. Utsumi, Y. Osaka, Plasma Sources Sci. Technol. 2 (1993) 1.
168. K.J. Liao, W.L. Wang, Phys. Stat. Sol. 147 (1995) K9.
169. H. Saitoh, W.A. Yarbrough, Appl. Phys. Lett. 58 (1991) 2230.
170. S. Komatsu, Y. Moriyoshi, M. Kasamatsu, K. Yamada, J. Phys. D 24 (1991) 1687.
171. M.Z. Karim, D.C. Cameron, M.J. Murphy, M.J. Hashimi, Surf. Coat. Technol. 49 (1991) 416.
172. M.Z. Karim, D.C. Cameron, M.S.J. Hashimi, Surf. Coat. Technol. 54/55 (1992) 355.
173. D.C. Cameron, M.Z. Karim, M.S.J. Hashimi, Thin Solid Films 236 (1993) 96.
174. T. Ichiki, S. Amagi, T. Yoshida, J. Appl. Phys. 79 (1996) 4381.
175. M.F. Plass, W. Fukarek, A. Kolitsch, M. Mäder, W. Möller, Phys. Stat. Sol. A 155 (1996) K1.
176. D.H. Berns, M.A. Cappelli, Appl. Phys. Lett. 68 (1996) 2711.
177. G. Krannich, F. Richter, J. Hahn, R. Pintaske, V.B. Filippov, Y. Paderno, Diamond Relat. Mater. 6 (1997) 1005.
178. F. Richter, G. Krannich, J. Hahn, R. Pintaske, M. Friedrich, S. Schmidbauer, D.R.T. Zahn, Surf. Coat. Technol. 90 (1996) 178.
179. S. Manorama, G.N. Chaudhari, V.J. Rao, J. Phys. D 26 (1993) 1793.
180. A.R. Phani, G.N. Chaudhari, S. Manorama, J. Solid State Chem. 118 (1995) 99.
181. A.R. Phani, S. Roy, V.J. Rao, Thin Solid Films 258 (1995) 21.
182. G.L. Doll, J.A. Sell, CA. Taylor II, R. Clarke, Phys. Rev. B 43 (1991) 6816.
183. R. Clarke, C.A. Taylor II, G.L. Doll, T.A. Perry, Diamond Relat. Mater. 1 (1992) 93.
184. T.A. Friedmann, K.F. McCarty, E.J. Klaus, D. Boehme, W.M. Clift, H.A. Johnsen, M.J. Mills, D.K. Ottesen, Appl. Phys. Lett. 61 (1992) 2406.
185. R.W. Pryor, Z.L. Wu, K.R. Padmanabhan, S. Villanueva, R.L. Thomas, Thin Solid Films 253 (1994) 243.
186. R.W. Pryor, K.R. Padmanabhan, K. Chawla, Diamond Relat. Mater. 4 (1995) 128.
187. F. Qian, V. Nagabushnam, R.K. Singh, Appl. Phys. Lett. 63 (1993) 317.
188. P.A. Molian, J. Mater. Sci. 29 (1994) 5646.
189. WA. Yarbrough, R. Messier, Science 247 (1990) 688.
190. T. Klotzbucher, W. Pflenging, M. Mertin, D.A. Wesner, E.W. Kreutz, Appl. Surf. Sci. 86 (1995) 165.
191. W. Pfleging, T. Klotzbucher, D.A. Wesner, E.W. Kreutz, Diamond Relat. Mater. 4 (1995) 370.
192. J. Narayan, H. Wu, R.D. Vispute, J. Electronic Mater. 25 (1996) 143.
193. K. Inagawa, K. Watanabe, K. Saitoh, Y. Yuchi, A. Itoh, Surf. Coat. Technol. 39/40 (1989) 253.
194. W.D. Halverson, T.G. Tetreault, J.K. Hirvonen, in: J.J. Pouch, S.A. Alterovitz (eds.), Synthesis and Properties of Boron Nitride, Materials Science Forum, Vol. 54/55, Trans Tech Publications, Brookfield, 1990, p. 71.
195. D.J. Kester, K.S. Ailey, R.F. Davis, Diamond Relat. Mater. 3 (1994) 332.
196. H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, M. Kuhr, J. Zweck, R. Fischer, Nucl. Instrum. Meth. 6106 (1995) 153.
197. G.F. Cardinale, P.B. Mirkarimi, K.F. McCarty, E.J. Klaus, D.L. Medlin, W.M. Clift, D.G. Howitt, Thin Solid Films 253 (1994) 130.
198. D.G. McCulloch, D.R. McKenzie, S. Prawer, Philos. Mag. A 72 (1995) 1031.
199. D.R. McKenzie, J. Vac. Sci. Technol. B 11 (1993) 1928.
200. G.F. Cardinale, D.L. Medlin, P.B. Mirkarimi, K.F. McCarty, D.G. Howitt, J. Vac. Sci. Technol. A 15 (1997) 196.
201. K.F. McCarty, D.L. Medlin, Diamond Relat. Mater. 6 (1997) 1219.
202. D.S. Zhou, C.L. Chen, T.E. Mitchell, L.B. Hackenberger, R. Messier, Philos. Mag. Lett. 72 (1995) 163.
203. H. Yamashita, K. Kuroda, H. Saka, N. Yamashita, T. Watanabe, T. Wada, Thin Solid Films 253 (1994) 72.
204. W.L. Zhou, Y. Ikuhara, M. Murakawa, S. Watanabe, T. Suziki, Appl. Phys. Lett. 66 (1995) 2490.
205. W.L. Zhou, Y. Ikuhara, T. Suzuki, Appl. Phys. Lett. 67 (1995) 3551.
206. D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, G.F. Cardinale, K.F. McCarty, J. Appl. Phys. 79 (1996) 3567.
207. D.R. McKenzie, W.D. McFall, S. Reisch, B.W. James, I.S. Falconer, R.W. Boswell, H. Persing, A.J. Perry, A. Durandet, Surf. Coat. Technol. 78 (1996) 255.
208. K. Bewilogua, A. Schütze, S. Kouptsidis, H. Lüthje, in: A. Feldman, Y. Tzeng, W.A. Yarbrough, M. Yoshikawa, M. Murakawa (eds.), Applications of Diamond films and Related Materials: Third International Conference, NIST Special Publication 885, 1995, p. 831.
209. S. Reinke, M. Kuhr, W. Kulisch, in: K.V. Ravi, K.E. Spear, J.L. Davidson, R.H. Hauge, J.P. Dismukes (eds.), Diamond Materials IV Electrochemical Society Proc., Vol. 94/95, The Electrochemical Society, Diamond Materials IV Electrochemical Society Proc., 1995.
210. R.M. Wentzcovitch, S. Fahy, M.L. Cohen, S.G. Louie, Phys. Rev. B 38 (1988) 6191.
211. J.K. Dubray, C.G. Pantano, W.A. Yarbrough, J. Appl. Phys. 72 (1992) 3136.
212. Z. Li, L. Wang, T. Suzuki, A. Argoitia, P. Pirouz, J.C. Angus, J. Appl. Phys. 73 (1993) 711.
213. T. Suzuki, M. Yagi, K. Shibuki, M. Hasemi, Appl. Phys. Lett. 65 (1994) 540.
214. W.R.L. Lambrecht, C.H. Lee, B. Segall, J.C. Angus, Z. Li, M. Sunkara, Nature 364 (1993) 607.
215. J. Widany, T. Frauenheim, W.R.L. Lambrecht, J. Mater. Chem. 6 (1996) 899.
216. K.S. Park, D.Y. Lee, K.J. Kim, D.W. Moon, Appl. Phys. Lett. 70 (1997) 315.
217. A.V. Hamza, G.D. Kubiak, R.H. Stulen, Surface Science 237 (1990) 35.
218. Chem. Eng. News, Dec. 17, 1990, p. 28.
219. A. Argoita, J.C. Angus, J.S. Ma, L. Wang, P. Pirouz, W.R.L. Lambrecht, J. Mater. Res. 9 (1994) 1849.
220. K.F. McCarty, M.J. Mills, D.L. Medlin, T.A. Friedmann, Phys. Rev. B 50 (1994) 8907.
221. J. Robertson, Diamond Relat. Mater. 5 (1996) 519.
222. J. Malherbe, Crit. Rev. Sol. State 19 (1994) 55.
223. F. Seitz, J.S. Koehler, in Progress in Solid State Physics, Vol. 2, Academic Press, New York, 1954, p. 30.
224. C. Weissmantel, K. Bewilogua, D. Dietrich, H.-J. Erler, H.-J. Hinneberg, S. Klose, W. Nowick, G. Reisse, Thin Solid Films 72 (1980) 19.
225. C. Weissmantel, J. Vac. Sci. Technol. 18 (1981) 179.
226. C. Weissmantel, Thin Solid Films 92 (1982) 55.
227. T. Díaz de la Rubia, Ann. Rev. Mater. Science 26 (1996) 613.
228. T. Díaz de la Rubia, personal communication.
229. G.F. Cardinale, D.G. Howitt, K.F. McCarty, D.L. Medlin, P.B. Mirkarimi, N.R. Moody, Diamond Relat. Mater. 5 (1996) 1295.
230. S. Reinke, M. Kuhr, W. Kulisch, Diamond Relat. Mater. 5 (1996) 508.
231. R. Berman, F. Simon, Z. Elektrochem. 59 (1955) 333.
232. M.K. Puchert, P.Y. Timbrell, R.N. Lamb, D.R. McKenzie, J. Vac. Sci. Technol. A 12 (1994) 727.
233. F.M. D'Heurle, Metall. Trans, 1 (1970) 725.
234. H. Windischmann, J. Vac. Sci. Technol. A 9 (1991) 2431.
235. H. Windischmann, Crit. Rev. Solid State 17 (1992) 547.
236. H. Windischmann, J. Appl. Phys. 62 (1987) 1800.
237. P. Sigmund, in Sputtering by Particle Bombardment, Vol. 1, ed. R. Behrisch, Springer, Berlin, 1981, p. 49.
238. C.A. Davis, Thin Solid Films 226 (1993) 30.
239. J. Robertson, Diamond Relat. Mater. 2 (1993) 984.
240. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, Phys. Rev. Lett. 62 (1987) 1290.
241. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, Phys. Rev. B 41 (1990) 10468.
242. J. Robertson, Diamond Relat. Mater. 3 (1994) 361.
243. M. Nastasi, J.W. Mayer, Materials Science Reports 6 (1991) 1.
244. D.L. Pappas, K.L. Saenger, J. Bruley, W. Krakow, J.J. Cuomo, T. Gu, R.W. Collins, J. Appl. Phys. 71 (1992) 5675.
245. D.R. McKenzie, D. Muller, B.A. Pailthorpe, Phys. Rev. Lett. 67 (1991) 773.
246. B.W. Mott, Micro-Indentation Hardness Testing, Buttersworth Scientific, London, 1956.
247. P.J. Blau, B.R. Lawn, Microindentation Techniques in Materials Science and Engineering, ASTM Special Technical Publication 889, ASTM, Philadelphia, PA, 1985.
248. T. Taniguchi, M. Akaishi, S. Yamaoka, J. Amer. Ceram. Soc. 79 (1996) 547.
249. N.V. Novikov, Y.A. Sirota, V.l. Mal'nev, I.A. Petrusha, Diamond Relat. Mater. 2 (1993) 1253.
250. C.A. Brookes, in: J.E. Field (ed.), The Properties of Natural and Synthetic Diamond, Academic Press, London, 1992, p. 515.
251. V.B. Shipilo, E.M. Shishonok, E.M. Zaitsev, N.G. Anichenko, L.S. Unyarkha, Inorg. Mater. 26 (1990) 1401.
252. V.K. Nurmukhamedov, G.A. Adler, V.I. Veprintsev, N.A. Luchsheva, V.A. Botsulyak, Inorg. Mater. 14 (1978) 1497.
253. E. Knittle, R.M. Wentzcovitch, R. Jeanloz, M.L. Cohen, Nature 337 (1989) 6205.
254. V.I. Aleksandrov, A.P. Goncharov, I.N. Makarenko, A.N. Zisman, E.V. Jakovenko, S.M. Stishov, High Pressure Res. 1 (1989) 333.
255. M. Grimsditch, E.S. Zouboulis, A. Polian, J. Appl. Phys. 76 (1994) 832.
256. C.A. Brookes, in: E.A. Almond, C.A. Brookes, R. Warren (eds.), Proc. Int. Conf. on Science of Hard Materials, Inst. Phys. Conf. Series No. 75, Adam Hilger, Bristol, 1986.
257. P. Rodriguez-Hernandez, M. Gonzalez-Diaz, A. Munoz, Phys. Rev. B 51 (1995) 14 705.
258. K. Kim, W.R.L. Lambrecht, B. Segall, Phys. Rev. B 53 (1996) 16310.
259. P.K. Mehrota, D.T. Quinto, G.J. Wolfe, Proc. 9th Int. Conf. on CVD, The Electrochemical Society, Pennington, NJ, 1984, p. 757.
260. C. Feldman, F. Ordway, J. Bernstein, J. Vac. Sci. Technol. A 8 (1990) 117.
261. S.V. Hainsworth, T.F. Page, in: W.W. Gerberich, H. Gao, J.-E. Sundgren, S.P. Baker (eds.), Materials Research Society Proceedings, Vol. 436, Materials Research Society, Pittsburgh, PA, 1997.
262. S.J. Bull, P.R. Chalker, C. Johnston, Mater. Sci. Technol. 8 (1992) 679.
263. Y. Andoh, S. Nishiyama, H. Kirimura, T. Mikami, K. Ogata, F. Fujimoto, Nucl. Instrum. Meth. B 59/60 (1991) 276.
264. D.R. McKenzie, personal communicaton.
265. M.P. Johansson, H. Sjöström, L. Hultman, J. Mater. Res. (1996), submitted.
266. W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (1992) 1564.
267. M. Lu, A. Bousetta, A. Bensaoula, K. Walters, J.A. Schultz, Appl. Phys. Lett. 68 (1996) 622.
268. R.F. Davis, III-V Nitrides for Electronic and Optoelectronic Applications, Proceedings of IEEE 79 (1991) 702.
269. O. Mishima, J. Tanaka, S. Yamaoka, O. Fukunaga, Science 238 (1987) 181.
270. C. Ronning, E. Dreher, H. Feldermann, M. Sebastian, H. Hofsäss, Diamond Relat. Mater. 6 (1997) 1129.
271. H. Morkoc, S. Strite, G.B. Gao, M.E. Lin, B. Sverdlov, M. Burns, J. Appl. Phys. 76 (1994) 1363.
272. M.P. Surh' S.O. Louie, M.L. Cohen, Phys. Rev. B 43 (1991) 9126.
273. J. Szmidt, A. Werbowy, A. Michalski, A. Olszyna, A. Sokolowska, S. Mitura, Diamond Relat. Mater. 4 (1995) 1131.
274. J. Szmidt, Diamond Relat. Mater. 3 (3994) 650.
275. J. Szmidt, Diamond Relat. Mater. 1 (1992) 681.
276. T. Brozek, J. Szmidt, A. Jakubowski, A. Olszyna, Diamond Relat. Mater. 3 (1994) 720.
277. J. Szmidt, A. Jakubowski, A. Michalski, A. Rusek, Thin Solid Films 110 (1983) 7.
278. M. Sokolowski, A. Sokolowska, A. Michalski, Z. Romanowski, A. Rusek-Mazurek, M. Wronikowski, Thin Solid Films 80 (1981) 249.
279. A.R. Phani, S. Manorama, V.J. Rao, Semicond. Sci. Technol. 10 (1995) 1520.
280. V.A. Gubanov, L.A. Hemstreet, C.Y. Fong, B.M. Klein, Appl. Phys. Lett. 69 (1996) 227.
281. V.A. Gubanov, Z.W. Lu, B.M. Klein, C.Y. Fong, Phys. Rev. B 53 (1996) 4377.
282. M.Z. Karim, D.C. Cameron, in Proceedings of 5th SiC and Relat. Mater. Conf., Inst. Phys. Conf. Ser. No. 137, Washington, DC, 1993.
283. O. Madelung, W. von der Oster, U. Rössler, in Landolt-Börnstein: Numerical Data and Functional Relationships in Science and Technology, Vol. 22a, Springer-Verlag, Berlin, 1989.
284. J.P. Sullivan, T.A. Friedmann, C.A. Apblett, M.P. Siegal, N. Missert, M.L. Lovejoy, P.B. Mirkarimi, K.F. McCarty, in Materials Research Society Proceedings, Vol. 381, Materials Research Society, Pittsburgh, 1995.
285. M.J. Rand, J.F. Roberts, J. Electrochem Soc. 115 (1968) 423.
286. M.F. Doerner, W.D. Nix, Crit. Rev. Sol. State 14 (1988) 225.
287. H. Kohzuki, Y. Okuno, M. Motoyama, Diamond Films Technol. 5 (1995) 95.
288. W.D. McFall, D.R. McKenzie, R.P. Netterfield, Surf. Coat. Technol. 81 (1996) 72.
289. J.V. Busch, J.P. Dismukes, Diamond Relat. Mater. 3 (1994) 295.
290. K.F. McCarty, unpublished work.