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Diamond and Related Materials

Volumn 14, Issue 9, 2005, Pages 1474-1481

Microstructure of the intermediate turbostratic boron nitride layer

(5) Zhang, X W a,b Boyen, H G a Yin, H a Ziemann, P a Banhart, F a,c

a UNIVERSITY OF ULM (Germany)

b INSTITUTE OF SEMICONDUCTORS (China)

c JOHANNES GUTENBERG UNIVERSITY (Germany)

Author keywords

Cubic boron nitride films; Morphology; Temperature dependence; Turbostratic interlayer

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COMPRESSIVE STRESS; EPITAXIAL GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HIGH TEMPERATURE EFFECTS; MORPHOLOGY; NUCLEATION; PHYSICAL VAPOR DEPOSITION; SILICON WAFERS; THERMAL CONDUCTIVITY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CUBIC BORON NITRIDE FILMS; ION BEAM ASSISTED DEPOSITION (IBAD); TEMPERATURE DEPENDENCE; TURBOSTRATIC INTERLAYERS;

CUBIC BORON NITRIDE;

EID: 21344456716 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2005.03.002 Document Type: Article

Times cited : (38)

References (37)

1
- 0001079019
- D.L. Medlin, T.A. Friedmann, P.B. Mirkarimi, G.F. Cardinale, and K.F. McCarty J. Appl. Phys. 79 1996 3567
- (1996) J. Appl. Phys. , vol.79 , pp. 3567
- Medlin, D.L.¹ Friedmann, T.A.² Mirkarimi, P.B.³ Cardinale, G.F.⁴ McCarty, K.F.⁵

2
- 21344467455
- H. Hofsäss, H. Feldermann, M. Sebastian, and C. Ronning Phys. Rev., B 55 1997 230
- (1997) Phys. Rev., B , vol.55 , pp. 230
- Hofsäss, H.¹ Feldermann, H.² Sebastian, M.³ Ronning, C.⁴

3
- 0001627483
- P. Widmayer, P. Ziemann, S. Ulrich, and H. Ehrhardt Diamond Relat. Mater. 6 1997 621
- (1997) Diamond Relat. Mater. , vol.6 , pp. 621
- Widmayer, P.¹ Ziemann, P.² Ulrich, S.³ Ehrhardt, H.⁴

4
- 0000522367
- D. Litvinov, and R. Clarke Appl. Phys. Lett. 74 1999 955
- (1999) Appl. Phys. Lett. , vol.74 , pp. 955
- Litvinov, D.¹ Clarke, R.²

5
- 0346119973
- J. Yu, and S. Matsumoto Diamond Relat. Mater. 12 2003 1903
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1903
- Yu, J.¹ Matsumoto, S.²

6
- 0031339504
- P.B. Mirkarimi, K.F. McCarty, and D.L. Medlin Mater. Sci. Eng., R Rep. 21 1997 47
- (1997) Mater. Sci. Eng., R Rep. , vol.21 , pp. 47
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³

7
- 0141819201
- X.W. Zhang, H.-G. Boyen, N. Deyneka, P. Ziemann, F. Banhart, and M. Schreck Nat. Mater. 2 2003 312
- (2003) Nat. Mater. , vol.2 , pp. 312
- Zhang, X.W.¹ Boyen, H.-G.² Deyneka, N.³ Ziemann, P.⁴ Banhart, F.⁵ Schreck, M.⁶

8
- 12344278801
- X.W. Zhang, H.-G. Boyen, P. Ziemann, and F. Banhart Appl. Phys., A 80 2005 735
- (2005) Appl. Phys., A , vol.80 , pp. 735
- Zhang, X.W.¹ Boyen, H.-G.² Ziemann, P.³ Banhart, F.⁴

9
- 0036841219
- C. Iwamoto, H.S. Yang, and T. Yoshida Diamond Relat. Mater. 11 2002 1854
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1854
- Iwamoto, C.¹ Yang, H.S.² Yoshida, T.³

10
- 0041766637
- H.S. Yang, C. Iwamoto, and T. Yoshida J. Appl. Phys. 94 2003 1248
- (2003) J. Appl. Phys. , vol.94 , pp. 1248
- Yang, H.S.¹ Iwamoto, C.² Yoshida, T.³

11
- 21544477583
- D.R. McKenzie, W.D. McFall, W.G. Sainty, C.A. Davis, and R.E. Collins Diamond Relat. Mater. 2 1993 970
- (1993) Diamond Relat. Mater. , vol.2 , pp. 970
- McKenzie, D.R.¹ McFall, W.D.² Sainty, W.G.³ Davis, C.A.⁴ Collins, R.E.⁵

12
- 30244519010
- G.F. Cardinale, D.G. Howitt, K.F. McCarty, D.L. Medlin, P.B. Mirkarimi, and N.R. Moody Diamond Relat. Mater. 5 1996 1295
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1295
- Cardinale, G.F.¹ Howitt, D.G.² McCarty, K.F.³ Medlin, D.L.⁴ Mirkarimi, P.B.⁵ Moody, N.R.⁶

13
- 0033666824
- W. Fukarek, C. Fitz, A. Kolitsch, and W. Moeller Mat. Sci. Forum 347-349 2000 156
- (2000) Mat. Sci. Forum , vol.347-349 , pp. 156
- Fukarek, W.¹ Fitz, C.² Kolitsch, A.³ Moeller, W.⁴

14
- 0031211578
- P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, D.C. Dibble, W.M. Clift, J.A. Knapp, and J.C. Barbour J. Appl. Phys. 82 1997 1617
- (1997) J. Appl. Phys. , vol.82 , pp. 1617
- Mirkarimi, P.B.¹ Medlin, D.L.² McCarty, K.F.³ Dibble, D.C.⁴ Clift, W.M.⁵ Knapp, J.A.⁶ Barbour, J.C.⁷

15
- 0037439911
- W. Kulisch, and S. Ulrich Thin Solid Films 423 2003 183
- (2003) Thin Solid Films , vol.423 , pp. 183
- Kulisch, W.¹ Ulrich, S.²

16
- 0028543108
- P.B. Mirkarimi, K.F. McCarty, D.L. Medlin, W.G. Wolfer, T.A. Friedmann, E.J. Klaus, G.F. Cardinale, and D.G. Howitt J. Mater. Res. 9 1994 2925
- (1994) J. Mater. Res. , vol.9 , pp. 2925
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³ Wolfer, W.G.⁴ Friedmann, T.A.⁵ Klaus, E.J.⁶ Cardinale, G.F.⁷ Howitt, D.G.⁸

17
- 0031994395
- P. Widmayer, P. Ziemann, and H.-G. Boyen Diamond Relat. Mater. 7 1998 385
- (1998) Diamond Relat. Mater. , vol.7 , pp. 385
- Widmayer, P.¹ Ziemann, P.² Boyen, H.-G.³

18
- 0032674370
- J. Ullmann, A.J. Kellock, and A.E.E. Baglin Thin Solid Films 341 1999 238
- (1999) Thin Solid Films , vol.341 , pp. 238
- Ullmann, J.¹ Kellock, A.J.² Baglin, A.E.E.³

19
- 1842633387
- N. Deyneka, X.W. Zhang, H.-G. Boyen, P. Ziemann, and F. Banhart Diamond Relat. Mater. 13 2004 473
- (2004) Diamond Relat. Mater. , vol.13 , pp. 473
- Deyneka, N.¹ Zhang, X.W.² Boyen, H.-G.³ Ziemann, P.⁴ Banhart, F.⁵

20
- 21844489067
- D.J. Kester, K.S. Ailey, D.J. Lichtenwalner, and R.F. Davis J. Vac. Sci. Technol., A, Vac. Surf. Films 12 1994 3074
- (1994) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.12 , pp. 3074
- Kester, D.J.¹ Ailey, K.S.² Lichtenwalner, D.J.³ Davis, R.F.⁴

21
- 0000109524
- H. Feldermann, R. Merk, H. Hofsäss, C. Ronning, and T. Zheleva Appl. Phys. Lett. 74 1999 1552
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1552
- Feldermann, H.¹ Merk, R.² Hofsäss, H.³ Ronning, C.⁴ Zheleva, T.⁵

22
- 0028259292
- T.A. Friedmann, K.F. McCarty, E.J. Klaus, J.C. Barbour, W.M. Clift, H.A. Johnsen, D.L. Medlin, M.J. Mills, and D.K. Ottesen Thin Solid Films 237 1994 48
- (1994) Thin Solid Films , vol.237 , pp. 48
- Friedmann, T.A.¹ McCarty, K.F.² Klaus, E.J.³ Barbour, J.C.⁴ Clift, W.M.⁵ Johnsen, H.A.⁶ Medlin, D.L.⁷ Mills, M.J.⁸ Ottesen, D.K.⁹

23
- 0029208056
- W. Dworschak, K. Jung, and H. Ehrhardt Thin Solid Films 254 1995 65
- (1995) Thin Solid Films , vol.254 , pp. 65
- Dworschak, W.¹ Jung, K.² Ehrhardt, H.³

24
- 21544433109
- G.S. Higashi, Y.J. Chabal, G.W. Trucks, and K. Raghavachari Appl. Phys. Lett. 56 1990 656
- (1990) Appl. Phys. Lett. , vol.56 , pp. 656
- Higashi, G.S.¹ Chabal, Y.J.² Trucks, G.W.³ Raghavachari, K.⁴

25
- 21544477583
- D.R. Mckenzie, W.D. McFall, W.G. Sainty, C.A. Davis, and R.E. Collins Diamond Relat. Mater. 2 1993 970
- (1993) Diamond Relat. Mater. , vol.2 , pp. 970
- McKenzie, D.R.¹ McFall, W.D.² Sainty, W.G.³ Davis, C.A.⁴ Collins, R.E.⁵

26
- 0031542705
- G.F. Cardinale, D.L. Medlin, P.B. Mirkarimi, K.F. McCarty, and D.G. Howitt J. Vac. Sci. Technol., A, Vac. Surf. Films 15 1997 196
- (1997) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.15 , pp. 196
- Cardinale, G.F.¹ Medlin, D.L.² Mirkarimi, P.B.³ McCarty, K.F.⁴ Howitt, D.G.⁵

27
- 0000333919
- Y. Sasaki, Y. Nishina, M. Sato, and K. Okamura Phys. Rev., B 40 1989 1762
- (1989) Phys. Rev., B , vol.40 , pp. 1762
- Sasaki, Y.¹ Nishina, Y.² Sato, M.³ Okamura, K.⁴

28
- 0027676906
- A.S. Rozenberg, Y.S. Sinenko, and N.V. Chukanov J. Mater. Sci. 28 1993 5675
- (1993) J. Mater. Sci. , vol.28 , pp. 5675
- Rozenberg, A.S.¹ Sinenko, Y.S.² Chukanov, N.V.³

29
- 0242377524
- J. Thomas Jr., N.E. Weston, and T.E. O'Connor J. Am. Chem. Soc. 84 1963 4619
- (1963) J. Am. Chem. Soc. , vol.84 , pp. 4619
- Thomas Jr., J.¹ Weston, N.E.² O'Connor, T.E.³

30
- 0000564258
- C. Collazo-Davila, E. Bengu, C. Leslie, and L. Marks Appl. Phys. Lett. 72 1997 314
- (1997) Appl. Phys. Lett. , vol.72 , pp. 314
- Collazo-Davila, C.¹ Bengu, E.² Leslie, C.³ Marks, L.⁴

31
- 0037081480
- Quan Li, L.D. Marks, Y. Lifshitz, S.T. Lee, and I. Bello Phys. Rev., B 65 2002 045415
- (2002) Phys. Rev., B , vol.65 , pp. 045415
- Quan, L.¹ Marks, L.D.² Lifshitz, Y.³ Lee, S.T.⁴ Bello, I.⁵

32
- 0036645357
- Quan Li, R.Q. Zhang, L.D. Marks, W.J. Zhang, and I. Bello Diamond Relat. Mater. 11 2002 1416
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1416
- Quan, L.¹ Zhang, R.Q.² Marks, L.D.³ Zhang, W.J.⁴ Bello, I.⁵

33
- 0037088192
- H. Hofsäss, H. Feldermann, S. Eyhusen, and C. Ronning Phys. Rev., B 65 2002 115410
- (2002) Phys. Rev., B , vol.65 , pp. 115410
- Hofsäss, H.¹ Feldermann, H.² Eyhusen, S.³ Ronning, C.⁴

34
- 0032003070
- H. Hofsäss, H. Feldermann, R. Merk, M. Sebastian, and C. Ronning Appl. Phys., A 66 1998 153
- (1998) Appl. Phys., A , vol.66 , pp. 153
- Hofsäss, H.¹ Feldermann, H.² Merk, R.³ Sebastian, M.⁴ Ronning, C.⁵

35
- 0000302511
- J. Robertson Diamond Relat. Mater. 5 1996 519
- (1996) Diamond Relat. Mater. , vol.5 , pp. 519
- Robertson, J.¹

36
- 0001212412
- K. Albe Phys. Rev., B 55 1997 6203
- (1997) Phys. Rev., B , vol.55 , pp. 6203
- Albe, K.¹

37
- 0001122859
- H. Sachdev, R. Haubner, H. Noth, and B. Lux Diamond Relat. Mater. 6 1997 286
- (1997) Diamond Relat. Mater. , vol.6 , pp. 286
- Sachdev, H.¹ Haubner, R.² Noth, H.³ Lux, B.⁴

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