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Thin Solid Films

Volumn 437, Issue 1-2, 2003, Pages 83-88

On the influence of substrate temperature for cubic boron nitride growth

(2) Le, Y K a Oechsner, H a

a Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

Auger electron spectroscopy; Boron nitride; Film composition; Plasma processing and deposition

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PHASE COMPOSITION; STOICHIOMETRY; SUBSTRATES; THIN FILMS;

FILM COMPOSITION;

CUBIC BORON NITRIDE;

EID: 0038785719 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(03)00686-2 Document Type: Article

Times cited : (23)

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