Materials with extreme properties: Their structuring and applications

Vacuum

Volumn 86, Issue 6, 2012, Pages 575-585

  Bello, I ^a   Chong, Y M ^a   Ye, Q ^a   Yang, Y ^a   He, B ^a   Kutsay, O ^a   Wang, H E ^a   Yan, C ^a   Jha, S K ^a   Zapien, J A ^a   Zhang, W J ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Cubic boron nitride; Deposition; Diamond; Nanodiamond; Reactive ion etching; Structuring materials

Indexed keywords

COMMERCIAL APPLICATIONS; CUBIC BORON NITRIDE (CBN); DESIGN PATTERNS; DEVICE FABRICATIONS; FILM CONDUCTIVITY; FILM PATTERNING; GENERAL METHODOLOGIES; HARSH ENVIRONMENT; HIGH-POWER ELECTRONIC DEVICES; LOW PRESSURES; MORPHOLOGICAL STRUCTURES; N-TYPE CONDUCTIVITY; NANOCRYSTALLINE DIAMONDS; NANODIAMOND; PLASMA PROCESS; POLYCRYSTALLINE DIAMONDS; REACTIVE ION; STRUCTURAL COMPATIBILITY; SURFACE ACOUSTIC WAVE DEVICE; TRIBOLOGICAL APPLICATIONS; WIDE BAND-GAP MATERIAL;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; BORON; CHEMICAL STABILITY; COMPOSITE MATERIALS; CUBIC BORON NITRIDE; DEPOSITION; DIAMONDS; ELECTRIC POWER SYSTEMS; ELECTRONIC PROPERTIES; FILM PREPARATION; MULTILAYER FILMS; MULTILAYERS; REACTIVE ION ETCHING; SEMICONDUCTOR DOPING; THERMAL CONDUCTIVITY;

MATERIALS PROPERTIES;

EID: 84856533628     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.08.010     Document Type: Conference Paper

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