-
1
-
-
84894599326
-
-
EE Times
-
Maxfield, C., 2012, "2D vs. 2.5D vs. 3D ICs 101, " EE Times, http://www.eetimes.com/design/programmable-logic/4370596/2D-vs-2-5D-vs-3D-ICs- 101
-
(2012)
2D Vs. 2.5D Vs. 3D ICs 101
-
-
Maxfield, C.1
-
2
-
-
80052923981
-
-
Ph.D. thesis University of Texas at Austin, Austin, TX
-
Lu, K. H., 2010, "Thermo-Mechanical Reliability of 3-D Interconnects Containing Through-Silicon-Vias (TSVs), " Ph.D. thesis, University of Texas at Austin, Austin, TX.
-
(2010)
Thermo-Mechanical Reliability of 3-D Interconnects Containing Through-Silicon-Vias (TSVs)
-
-
Lu, K.H.1
-
3
-
-
84883403747
-
Assessment and characterization of stress induced by via-first tsv technology
-
Pares, G., De Crecy, F., Moreau, S., Maurice, C., Borbely, A., Mazuir, J., Chap-elon, L. L., and Sillon, N., 2011, "Assessment and Characterization of Stress Induced by Via-First TSV Technology, " J. Microelectron. Electron. Packag., 8(4), pp. 129-139.
-
(2011)
J. Microelectron. Electron. Packag.
, vol.8
, Issue.4
, pp. 129-139
-
-
Pares, G.1
De Crecy, F.2
Moreau, S.3
Maurice, C.4
Borbely, A.5
Mazuir, J.6
Chap-Elon, L.L.7
Sillon, N.8
-
4
-
-
81355132142
-
Nonlinear thermo-mechanical analysis of tsv interposer filling with solder, cu and cu-cored solder
-
Shanghai, August
-
He, R., Wang, H., Zhou, J., Guo, X., Yu, D., and Wan, L., 2011, "Nonlinear Thermo-Mechanical Analysis of TSV Interposer Filling With Solder, Cu and Cu-Cored Solder, " 12th International Conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), Shanghai, August 8-11.
-
(2011)
12th International Conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP)
, pp. 8-11
-
-
He, R.1
Wang, H.2
Zhou, J.3
Guo, X.4
Yu, D.5
Wan, L.6
-
5
-
-
24644433947
-
3D stacked flip chip packaging with through silicon vias and copper plating or conductive adhesive filling
-
Lake Buena Vista, FL, May 31-June 5
-
Lee, S. W. R., Hon, R., Zhang, S. X. D., and Wong, C. K., 2005, "3D Stacked Flip Chip Packaging With Through Silicon Vias and Copper Plating or Conductive Adhesive Filling, " 55th Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 31-June 5, pp. 795-801.
-
(2005)
55th Electronic Components and Technology Conference (ECTC)
, pp. 795-801
-
-
Lee, S.W.R.1
Hon, R.2
Zhang, S.X.D.3
Wong, C.K.4
-
6
-
-
83455264462
-
A review of recent advances in thermal management in three dimensional chip stacks in electronic systems
-
Venkatadri, V., Sammakia, B., Srihari, K., and Santos, D., 2011, "A Review of Recent Advances in Thermal Management in Three Dimensional Chip Stacks in Electronic Systems, " ASME J. Electron. Packag., 133(4), p. 041011.
-
(2011)
ASME J. Electron. Packag.
, vol.133
, Issue.4
, pp. 041011
-
-
Venkatadri, V.1
Sammakia, B.2
Srihari, K.3
Santos, D.4
-
7
-
-
77955178259
-
Mitigating heat dissipation and thermo-mechanical stress challenges in 3-d ic using thermal through silicon via (ttsv)
-
Las Vegas, NV, June 1-4
-
Onkaraiah, S., and Chuan Seng, T., 2010, "Mitigating Heat Dissipation and Thermo-Mechanical Stress Challenges in 3-D IC Using Thermal Through Silicon Via (TTSV), " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 411-416.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 411-416
-
-
Onkaraiah, S.1
Chuan Seng, T.2
-
8
-
-
84864687002
-
Stacked & loaded: Xilinx ssi, 28-gbps i/o yield amazing fpgas
-
Santarini, M., 2011, "Stacked & Loaded: Xilinx SSI, 28-Gbps I/O Yield Amazing FPGAs, " Xcell J., 74(1), pp. 8-13.
-
(2011)
Xcell J.
, vol.74
, Issue.1
, pp. 8-13
-
-
Santarini, M.1
-
9
-
-
84872114131
-
Transition from flip chip solder joint to 3d ic microbump: Its effect on microstructure anisotropy
-
Tu, K. N., Hsiao, H.-Y., and Chen, C., 2012, "Transition From Flip Chip Solder Joint to 3D IC Microbump: Its Effect on Microstructure Anisotropy, " Micro-electron. Reliab., 53(1), pp. 2-6.
-
(2012)
Micro-electron. Reliab.
, vol.53
, Issue.1
, pp. 2-6
-
-
Tu, K.N.1
Hsiao, H.-Y.2
Chen, C.3
-
10
-
-
79951951987
-
Reliability challenges in 3d ic packaging technology
-
Tu, K. N., 2011, "Reliability Challenges in 3D IC Packaging Technology, " Microelectron. Reliab., 51(3), pp. 517-523.
-
(2011)
Microelectron. Reliab.
, vol.51
, Issue.3
, pp. 517-523
-
-
Tu, K.N.1
-
11
-
-
84866862511
-
Development of a stacked wcsp package platform using tsv (through silicon via) technology
-
San Diego, CA, May 29-June 1
-
Dunne, R., Takahashi, Y., Mawatari, K., Matsuura, M., Bonifield, T., Stein-mann, P., and Stepniak, D., 2012, "Development of a Stacked WCSP Package Platform Using TSV (Through Silicon Via) Technology, " IEEE 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 1062-1067.
-
(2012)
IEEE 62nd Electronic Components and Technology Conference (ECTC)
, pp. 1062-1067
-
-
Dunne, R.1
Takahashi, Y.2
Mawatari, K.3
Matsuura, M.4
Bonifield, T.5
Stein-Mann, P.6
Stepniak, D.7
-
12
-
-
84863251233
-
A novel chip-to-wafer (c2w) three-dimensional (3d) integration approach using a template for precise alignment
-
Chen, Q., Zhang, D., Xu, Z., Beece, A., Patti, R., Tan, Z., Wang, Z., Liu, L., and Lu, J.-Q., 2012, "A Novel Chip-to-Wafer (C2W) Three-Dimensional (3D) Integration Approach Using a Template for Precise Alignment, " Microelectron. Eng., 92, pp. 15-18.
-
(2012)
Microelectron. Eng.
, vol.92
, pp. 15-18
-
-
Chen, Q.1
Zhang, D.2
Xu, Z.3
Beece, A.4
Patti, R.5
Tan, Z.6
Wang, Z.7
Liu, L.8
Lu, J.-Q.9
-
13
-
-
70349686526
-
Study of 15lm pitch solder microbumps for 3d ic integration
-
San Diego, CA, May 26-29
-
Yu, A., Lau, J. H., Ho, S. W., Kumar, A., Hnin, W. Y., Yu, D.-Q., Jong, M. C., Kripesh, V., Pinjala, D., and Kwong, D.-L., 2009, "Study of 15lm Pitch Solder Microbumps for 3D IC Integration, " 59th Electronic Components and Technology Conference (ECTC), San Diego, CA, May 26-29, pp. 6-10.
-
(2009)
59th Electronic Components and Technology Conference (ECTC)
, pp. 6-10
-
-
Yu, A.1
Lau, J.H.2
Ho, S.W.3
Kumar, A.4
Hnin, W.Y.5
Yu, D.-Q.6
Jong, M.C.7
Kripesh, V.8
Pinjala, D.9
Kwong, D.-L.10
-
14
-
-
84866842263
-
Wafer bumping, assembly, and reliability assessment of l bumps with 5lm pads on 10lm pitch for 3d ic integration
-
San Diego, CA, May 29-June 1
-
Lee, C.-K., Zhan, C.-J., Lau, J. H., Huang, Y.-J., Fu, H.-C., Huang, J.-H., Hsiao, Z.-C., Chen, S.-W., Huang, S.-Y., Fan, C.-W., Lin, Y.-M., Kao, K.-S., Ko, C.-T., Chen, T.-H., Lo, R., and Kao, M. J., 2012, "Wafer Bumping, Assembly, and Reliability Assessment of l bumps With 5lm Pads on 10lm Pitch for 3D IC Integration, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 636-640.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 636-640
-
-
Lee, C.-K.1
Zhan, C.-J.2
Lau, J.H.3
Huang, Y.-J.4
Fu, H.-C.5
Huang, J.-H.6
Hsiao, Z.-C.7
Chen, S.-W.8
Huang, S.-Y.9
Fan, C.-W.10
Lin, Y.-M.11
Kao, K.-S.12
Ko, C.-T.13
Chen, T.-H.14
Lo, R.15
Kao, M.J.16
-
15
-
-
79960391251
-
Thru silicon via stacking & numerical characterization for multi-die interconnections using full array & very fine pitch micro c4 bumps
-
Lake Buena Vista, FL, May 31-June 3
-
Au, K. Y., Beleran, J. D., Yang, Y. B., Zhang, Y. F., Kriangsak, S. L., Wilson, P. L. O., Drake, Y. S. K., Toh, C. H., and Surasit, C., 2011, "Thru Silicon Via Stacking & Numerical Characterization for Multi-Die Interconnections Using Full Array & Very Fine Pitch Micro C4 Bumps, " 61st Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 31-June 3, pp. 296-303.
-
(2011)
61st Electronic Components and Technology Conference (ECTC)
, pp. 296-303
-
-
Au, K.Y.1
Beleran, J.D.2
Yang, Y.B.3
Zhang, Y.F.4
Kriangsak, S.L.5
Wilson, P.L.O.6
Drake, Y.S.K.7
Toh, C.H.8
Surasit, C.9
-
16
-
-
77955208213
-
3D chip stacking & reliability using tsv-micro c4 solder interconnection
-
Las Vegas, NV, June 1-4
-
Au, K. Y., Kriangsak, S. L., Zhang, X. R., Zhu, W. H., and Toh, C. H., 2010, "3D Chip Stacking & Reliability Using TSV-Micro C4 Solder Interconnection, " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 1376-1384.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 1376-1384
-
-
Au, K.Y.1
Kriangsak, S.L.2
Zhang, X.R.3
Zhu, W.H.4
Toh, C.H.5
-
17
-
-
61649084986
-
3D chip stacking with c4 technology
-
Dang, B., Wright, S. L., Andry, P. S., Sprogis, E. J., Tsang, C. K., Interrante, M. J., Webb, B. C., Polastre, R. J., Horton, R. R., Patel, C. S., Sharma, A., Zheng, J., Sakuma, K., and Knickerbocker, J. U., 2008, "3D Chip Stacking With C4 Technology, " IBM J. Res. Dev., 52(6), pp. 599-609.
-
(2008)
IBM J. Res. Dev.
, vol.52
, Issue.6
, pp. 599-609
-
-
Dang, B.1
Wright, S.L.2
Andry, P.S.3
Sprogis, E.J.4
Tsang, C.K.5
Interrante, M.J.6
Webb, B.C.7
Polastre, R.J.8
Horton, R.R.9
Patel, C.S.10
Sharma, A.11
Zheng, J.12
Sakuma, K.13
Knickerbocker, J.U.14
-
18
-
-
79960402562
-
3D chip stacking with 50 lm pitch lead-free micro-c4 interconnections
-
Lake Buena Vista, FL, May 31-June 3
-
Maria, J., Dang, B., Wright, S. L., Tsang, C. K., Andry, P., Polastre, R., Liu, Y., Wiggins, L., and Knickerbocker, J. U., 2011, "3D Chip Stacking With 50 lm Pitch Lead-Free Micro-C4 Interconnections, " 61st Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 31-June 3, pp. 268-273.
-
(2011)
61st Electronic Components and Technology Conference (ECTC)
, pp. 268-273
-
-
Maria, J.1
Dang, B.2
Wright, S.L.3
Tsang, C.K.4
Andry, P.5
Polastre, R.6
Liu, Y.7
Wiggins, L.8
Knickerbocker, J.U.9
-
19
-
-
84875451521
-
2.5d/3d packaging enablement through copper pillar technology
-
Patterson, D. S., 2012, "2.5D/3D Packaging Enablement Through Copper Pillar Technology, " Chip Scale Review, 16(3), pp. 20-26.
-
(2012)
Chip Scale Review
, vol.16
, Issue.3
, pp. 20-26
-
-
Patterson, D.S.1
-
20
-
-
84856981864
-
3D copper tsv integration, testing and reliability, "
-
Washington DC, December 5-7
-
Farooq, M. G., Graves-Abe, T. L., Landers, W. F., Kothandaraman, C., Him-mel, B. A., Andry, P. S., Tsang, C. K., Sprogis, E., Volant, R. P., Petrarca, K. S., Winstel, K. R., Safran, J. M., Sullivan, T. D., Chen, F., Shapiro, M. J., Han-non, R., Liptak, R., Berger, D., and Iyer, S. S., 2011, "3D Copper TSV Integration, Testing and Reliability, " 2011 IEEE International Electron Devices Meeting (IEDM), Washington, DC, December 5-7, pp. 7.1.1-7.1.4.
-
(2011)
2011 IEEE International Electron Devices Meeting (IEDM)
, pp. 711-714
-
-
Farooq, M.G.1
Graves-Abe, T.L.2
Landers, W.F.3
Kothandaraman, C.4
Him-Mel, B.A.5
Andry, P.S.6
Tsang, C.K.7
Sprogis, E.8
Volant, R.P.9
Petrarca, K.S.10
Winstel, K.R.11
Safran, J.M.12
Sullivan, T.D.13
Chen, F.14
Shapiro, M.J.15
Han-Non, R.16
Liptak, R.17
Berger, D.18
Iyer, S.S.19
-
21
-
-
49149107479
-
C4NP lead free solder bumping and 3d micro bumping
-
Cambridge, MA, May 5-7
-
Busby, J., Dang, B., Gruber, P., Hawken, D., Shah, J., Weisman, R., Perfecto, E., Ruhmer, K., and Buchwalter, S., 2008, "C4NP Lead Free Solder Bumping and 3D Micro Bumping, " IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2008), Cambridge, MA, May 5-7, pp. 333-339.
-
IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2008)
, pp. 333-339
-
-
Busby, J.1
Dang, B.2
Gruber, P.3
Hawken, D.4
Shah, J.5
Weisman, R.6
Perfecto, E.7
Ruhmer, K.8
-
22
-
-
52449117714
-
C4NP for pb-free solder wafer bumping and 3d fine-pitch applications
-
Shanghai, July
-
Shih, D. Y., Dang, B., Gruber, P., Lu, M., Kang, S., Buchwalter, S., Knickerbocker, J., Perfecto, E., Garant, J., Knickerbocker, S., Semkow, K., Sundlof, B., Busby, J., Weisman, R., Ruhmer, K., and Hughlett, E., 2008, "C4NP for Pb-Free Solder Wafer Bumping and 3D Fine-Pitch Applications, " International Conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), Shanghai, July 28-31.
-
(2008)
International Conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP)
, pp. 28-31
-
-
Shih, D.Y.1
Dang, B.2
Gruber, P.3
Lu, M.4
Kang, S.5
Buchwalter, S.6
Knickerbocker, J.7
Perfecto, E.8
Garant, J.9
Knickerbocker, S.10
Semkow, K.11
Sundlof, B.12
Busby, J.13
Weisman, R.14
Ruhmer, K.15
Hughlett, E.16
-
23
-
-
35348826098
-
Detailed characterisation of ni microinsert technology for flip chip die on wafer attachment
-
Reno, NV, May 29-June 1
-
Mathewson, A., Brun, J., Ponthenier, G., Franiatte, R., Nowodzinski, A., Sillon, N., Poupon, G., Deputot, F., and Dubois-Bonvalot, B., 2007, "Detailed Characterisation of Ni Microinsert Technology For Flip Chip Die on Wafer Attachment, " 57th Electronic Components and Technology Conference (ECTC), Reno, NV, May 29-June 1, pp. 616-621.
-
(2007)
57th Electronic Components and Technology Conference (ECTC)
, pp. 616-621
-
-
Mathewson, A.1
Brun, J.2
Ponthenier, G.3
Franiatte, R.4
Nowodzinski, A.5
Sillon, N.6
Poupon, G.7
Deputot, F.8
Dubois-Bonvalot, B.9
-
24
-
-
42549132240
-
Microstructured interconnections for high security systems
-
Dresden, Germany, September 5-7
-
Mathewson, A., Brun, J., Puget, C., Franiatte, R., Sillon, N., Depoutot, F., and Dubois-Bonvalot, B., 2006, "Microstructured Interconnections for High Security Systems, " 1st Electronics Systemintegration Technology Conference, Dresden, Germany, September 5-7, pp. 126-132.
-
(2006)
1st Electronics Systemintegration Technology Conference
, pp. 126-132
-
-
Mathewson, A.1
Brun, J.2
Puget, C.3
Franiatte, R.4
Sillon, N.5
Depoutot, F.6
Dubois-Bonvalot, B.7
-
25
-
-
61549125296
-
System on wafer: A new silicon concept in sip
-
Poupon, G., Sillon, N., Henry, D., Gillot, C., Mathewson, A., Di Cioccio, L., Charlet, B., Leduc, P., Vinet, M., and Batude, P., 2009, "System on Wafer: A New Silicon Concept in SiP, " Proc. IEEE, 97(1), pp. 60-69.
-
(2009)
Proc. IEEE
, vol.97
, Issue.1
, pp. 60-69
-
-
Poupon, G.1
Sillon, N.2
Henry, D.3
Gillot, C.4
Mathewson, A.5
Di Cioccio, L.6
Charlet, B.7
Leduc, P.8
Vinet, M.9
Batude, P.10
-
26
-
-
84876915491
-
Flip chip process using mushroom bumps and interlocking bumps
-
San Jose, CA, November 11-15
-
Park, S.-H., Lee, K.-Y., Won, H.-J., Oh, T.-S., and Kim, Y.-H., 2007, "Flip Chip Process Using Mushroom Bumps and Interlocking Bumps, " 40th International Symposium on Microelectronics (IMAPS 2007), San Jose, CA, November 11-15, pp. 723-727.
-
40th International Symposium on Microelectronics (IMAPS 2007)
, pp. 723-727
-
-
Park, S.-H.1
Lee, K.-Y.2
Won, H.-J.3
Oh, T.-S.4
-
27
-
-
72149113584
-
Flip-chip process using interlocking-bump joints
-
Oh, T. S., Lee, K.-Y., and Won, H.-J., 2009, "Flip-Chip Process Using Interlocking-Bump Joints, " IEEE Trans. Compon. Packag. Technol., 32(4), pp. 909-914.
-
(2009)
IEEE Trans. Compon. Packag. Technol.
, vol.32
, Issue.4
, pp. 909-914
-
-
Oh, T.S.1
Lee, K.-Y.2
Won, H.-J.3
-
28
-
-
35348919396
-
Development and evaluation of 3-d sip with vertically inter-connected through silicon vias (tsv)
-
Reno, NV, May 29-June 1
-
Jang, D. M., Ryu, C., Lee, K. Y., Cho, B. H., Kim, J., Oh, T. S., Lee, W. J., and Yu, J., 2007, "Development and Evaluation of 3-D SiP With Vertically Inter-connected Through Silicon Vias (TSV), " 57th Electronic Components and Technology Conference (ECTC), Reno, NV, May 29-June 1, pp. 847-852.
-
(2007)
57th Electronic Components and Technology Conference (ECTC)
, pp. 847-852
-
-
Jang, D.M.1
Ryu, C.2
Lee, K.Y.3
Cho, B.H.4
Kim, J.5
Oh, T.S.6
Lee, W.J.7
Yu, J.8
-
29
-
-
84866881803
-
3D multi-stacking of thin dies based on tsv and micro-inserts interconnections
-
San Diego, CA, May 29-June 1
-
Souriau, J. C., Castagne, L., Liotard, J., Inal, K., Mazuir, J., Le Texier, F., Fres-quet, G., Varvara, M., Launay, N., Dubois, B., and Malia, T., 2012, "3D Multi-Stacking of Thin Dies Based on TSV and Micro-Inserts Interconnections, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 1047-1053.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 1047-1053
-
-
Souriau, J.C.1
Castagne, L.2
Liotard, J.3
Inal, K.4
Mazuir, J.5
Le Texier, F.6
Fres-Quet, G.7
Varvara, M.8
Launay, N.9
Dubois, B.10
Malia, T.11
-
30
-
-
84871836454
-
Reliability tests on micro-insert die bonding technology
-
Grenoble, France, September 24-26
-
Nowodzinski, A., Boutry, H., Franiatte, R., Mandrillon, V., Anciant, R., Verrun, S., and Simon, G., 2012, "Reliability Tests on Micro-Insert Die Bonding Technology, " International Semiconductor Conference Dresden-Grenoble (ISCDG), Grenoble, France, September 24-26, pp. 83-87.
-
(2012)
International Semiconductor Conference Dresden-Grenoble (ISCDG)
, pp. 83-87
-
-
Nowodzinski, A.1
Boutry, H.2
Franiatte, R.3
Mandrillon, V.4
Anciant, R.5
Verrun, S.6
Simon, G.7
-
31
-
-
51349126506
-
Cu pillar bumps as a lead-free drop-in replacement for solder-bumped, flip-chip interconnects
-
Lake Buena Vista, FL, May 27-30
-
Ebersberger, B., and Lee, C., 2008, "Cu Pillar Bumps as a Lead-Free Drop-In Replacement for Solder-Bumped, Flip-Chip Interconnects, " 58th Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 27-30, pp. 59-66.
-
(2008)
58th Electronic Components and Technology Conference (ECTC)
, pp. 59-66
-
-
Ebersberger, B.1
Lee, C.2
-
32
-
-
70349469831
-
Interconnection with copper pillar bumps: Process and applications
-
Sapporo, Japan, June 1-3
-
Lee, C. H., 2009, "Interconnection With Copper Pillar Bumps: Process and Applications, " IEEE International Interconnect Technology Conference (IITC 2009), Sapporo, Japan, June 1-3, pp. 214-216.
-
IEEE International Interconnect Technology Conference (IITC 2009)
, pp. 214-216
-
-
Lee, C.H.1
-
33
-
-
84861937215
-
Reliable microjoints formed by solid-liquid interdiffusion (slid) bonding within a chip-stacking architecture
-
Chang, J. Y., Cheng, R. S., Kao, K. S., Chang, T. C., and Chuang, T. H., 2012, "Reliable Microjoints Formed by Solid-Liquid Interdiffusion (SLID) Bonding Within a Chip-Stacking Architecture, " IEEE Trans. Compon., Packag. Manuf. Technol., 2(6), pp. 979-984.
-
(2012)
IEEE Trans. Compon., Packag. Manuf. Technol.
, vol.2
, Issue.6
, pp. 979-984
-
-
Chang, J.Y.1
Cheng, R.S.2
Kao, K.S.3
Chang, T.C.4
Chuang, T.H.5
-
34
-
-
77955220697
-
Joint properties of solder capped copper pillars for 3d packaging
-
Las Vegas, NV, June 1-4
-
Sa, Y.-K., Yoo, S., Shin, Y.-S., Han, M.-K., and Lee, C.-W., 2010, "Joint Properties of Solder Capped Copper Pillars for 3D Packaging, " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 2019-2024.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 2019-2024
-
-
Sa, Y.-K.1
Yoo, S.2
Shin, Y.-S.3
Han, M.-K.4
Lee, C.-W.5
-
35
-
-
84861935593
-
Electroless ni plating to compensate for bump height variation in cu-cu 3-d packaging
-
Lee, J., Fernandez, D. M., Paing, M., Yeo, Y. C., and Gao, S., 2012, "Electroless Ni Plating to Compensate for Bump Height Variation in Cu-Cu 3-D Packaging, " IEEE Trans. Compon., Packag. Manuf. Technol., 2(6), pp. 964-970.
-
(2012)
IEEE Trans. Compon., Packag. Manuf. Technol.
, vol.2
, Issue.6
, pp. 964-970
-
-
Lee, J.1
Fernandez, D.M.2
Paing, M.3
Yeo, Y.C.4
Gao, S.5
-
36
-
-
84855888472
-
Wafer-level cu-cu bonding technology
-
Tang, Y.-S., Chang, Y.-J., and Chen, K.-N., 2012, "Wafer-Level Cu-Cu Bonding Technology, " Microelectron. Reliab., 52(2), pp. 312-320.
-
(2012)
Microelectron. Reliab.
, vol.52
, Issue.2
, pp. 312-320
-
-
Tang, Y.-S.1
Chang, Y.-J.2
Chen, K.-N.3
-
37
-
-
0000336248
-
Controlled collapse reflow chip joining
-
Miller, L. F., 1969, "Controlled Collapse Reflow Chip Joining, " IBM J. Res. Dev., 13, pp. 239-250.
-
(1969)
IBM J. Res. Dev.
, vol.13
, pp. 239-250
-
-
Miller, L.F.1
-
38
-
-
84954039395
-
Ultra-fine pitch pb-free & eutectic solder bumping with fine particle size solder paste for nano packaging
-
Singapore, December 10-12
-
Kripesh, V., Wong Wai, K., and Iyer, M., 2003, "Ultra-Fine Pitch Pb-Free & Eutectic Solder Bumping With Fine Particle Size Solder Paste for Nano Packaging, " 5th Electronics Packaging Technology Conference (EPTC 2003), Singapore, December 10-12, pp. 732-737.
-
(2003)
5th Electronics Packaging Technology Conference (EPTC 2003)
, pp. 732-737
-
-
Kripesh, V.1
Wong Wai, K.2
Iyer, M.3
-
39
-
-
33845563481
-
Pb-free microjoints (50 lm pitch) for the next generation microsystems: The fabrication, assembly and characterization
-
San Diego, CA, May 30-June 2
-
Gan, H., Wright, S. L., Polastre, R., Buchwalter, L. P., Horton, R., Andry, P. S., Patel, C., Tsang, C., Knickerbocker, J., Sprogis, E., Pavlova, A., Kang, S. K., and Lee, K. W., 2006, "Pb-Free Microjoints (50 lm Pitch) for the Next Generation Microsystems: the Fabrication, Assembly and Characterization, " 56th Electronic Components and Technology Conference (ECTC), San Diego, CA, May 30-June 2.
-
(2006)
56th Electronic Components and Technology Conference (ECTC)
-
-
Gan, H.1
Wright, S.L.2
Polastre, R.3
Buchwalter, L.P.4
Horton, R.5
Andry, P.S.6
Patel, C.7
Tsang, C.8
Knickerbocker, J.9
Sprogis, E.10
Pavlova, A.11
Kang, S.K.12
Lee, K.W.13
-
40
-
-
51349107972
-
50 lm pitch pb-free micro-bumps by c4np technology
-
Lake Buena Vista, FL, May 27-30
-
Dang, B., Shih, D.-Y., Buchwalter, S., Tsang, C., Patel, C., Knickerbocker, J., Gruber, P., Knickerbocker, S., Garant, J., Semkow, K., Ruhmer, K., and Hugh-lett, E., 2008, "50 lm Pitch Pb-Free Micro-Bumps by C4NP Technology, " 58th Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 27-30, pp. 1505-1510.
-
(2008)
58th Electronic Components and Technology Conference (ECTC)
, pp. 1505-1510
-
-
Dang, B.1
Shih, D.-Y.2
Buchwalter, S.3
Tsang, C.4
Patel, C.5
Knickerbocker, J.6
Gruber, P.7
Knickerbocker, S.8
Garant, J.9
Semkow, K.10
Ruhmer, K.11
Hugh-Lett, E.12
-
41
-
-
84866881093
-
Development of micro-alloying method for cu pillar solder bump by solid liquid interaction
-
San Diego, CA, May 29-June 1
-
Yin, W., Yu, D., Dai, F., Song, C., Bo, Z., Wan, L., Yu, H., and Sun, J., 2012, "Development of Micro-Alloying Method for Cu Pillar Solder Bump by Solid Liquid Interaction, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 1709-1714.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 1709-1714
-
-
Yin, W.1
Yu, D.2
Dai, F.3
Song, C.4
Bo, Z.5
Wan, L.6
Yu, H.7
Sun, J.8
-
42
-
-
77955212633
-
Assembly and reliability characterization of 3d chip stacking with 30 lm pitch lead-free solder micro bump interconnection
-
Las Vegas, NV, June 1-4
-
Zhan, C.-J., Chuang, C.-C., Juang, J.-Y., Lu, S.-T., and Chang, T.-C., 2010, "Assembly and Reliability Characterization of 3D Chip Stacking With 30 lm Pitch Lead-Free Solder Micro Bump Interconnection, " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 1043-1049.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 1043-1049
-
-
Zhan, C.-J.1
Chuang, C.-C.2
Juang, J.-Y.3
Lu, S.-T.4
Chang, T.-C.5
-
43
-
-
84866869533
-
Design and process development of a stacked sram memory chip module with tsv interconnection
-
San Diego, CA, May 29-June 1
-
Ma, S., Sun, X., Zhu, Y., Zhu, Z., Cui, Q., Chen, M., Xiao, Y., Chen, J., Miao, M., Lu, W., and Jin, Y., 2012, "Design and Process Development of a Stacked SRAM Memory Chip Module With TSV Interconnection, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 1925-1929.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 1925-1929
-
-
Ma, S.1
Sun, X.2
Zhu, Y.3
Zhu, Z.4
Cui, Q.5
Chen, M.6
Xiao, Y.7
Chen, J.8
Miao, M.9
Lu, W.10
Jin, Y.11
-
44
-
-
77955181072
-
3D sip module using tsv and novel solder bump maker
-
Las Vegas, NV, June 1-4
-
Bae, H.-C., Choi, K.-S., Eom, Y.-S., Lim, B.-O., Sung, K.-J., Jung, S., Kim, B.-G., Kang, I.-S., and Moon, J.-T., 2010, "3D SiP Module Using TSV and Novel Solder Bump Maker, " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 1637-1641.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 1637-1641
-
-
Bae, H.-C.1
Choi, K.-S.2
Eom, Y.-S.3
Lim, B.-O.4
Sung, K.-J.5
Jung, S.6
Kim, B.-G.7
Kang, I.-S.8
Moon, J.-T.9
-
45
-
-
84867310398
-
Novel bumping and underfill technologies for 3d ic integration
-
Sung, K.-J., Choi, K.-S., Bae, H.-C., Kwon, Y.-H., and Eom, Y.-S., 2012, "Novel Bumping and Underfill Technologies for 3D IC Integration, " ETRI J., 34(5), pp. 706-712.
-
(2012)
ETRI J.
, vol.34
, Issue.5
, pp. 706-712
-
-
Sung, K.-J.1
Choi, K.-S.2
Bae, H.-C.3
Kwon, Y.-H.4
Eom, Y.-S.5
-
46
-
-
78449289046
-
Solder bump maker with coining process on tsv chips for 3d packages
-
Xi'an, China, August 16-19
-
Sung, K.-J., Choi, K.-S., Lim, B.-O., Bae, H.-C., Choo, S.-W., Moon, J.-T., Kwon, Y. H., Nam, E. S., and Eom, Y.-S., 2010, "Solder Bump Maker With Coining Process on TSV Chips for 3D Packages, " 11th International Conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP), Xi'an, China, August 16-19, pp. 185-189.
-
(2010)
11th International Conference on Electronic Packaging Technology and High Density Packaging (ICEPT-HDP)
, pp. 185-189
-
-
Sung, K.-J.1
Choi, K.-S.2
Lim, B.-O.3
Bae, H.-C.4
Choo, S.-W.5
Moon, J.-T.6
Kwon, Y.H.7
Nam, E.S.8
Eom, Y.-S.9
-
47
-
-
85199278008
-
-
Springer, New York
-
Xie, Y., Cong, J. J., and Sapatnekar, S., 2010, 3D Process Technology Considerations, Three-Dimensional Integrated Circuit Design: EDA, Design and Microarchitectures, Springer, New York.
-
(2010)
3D Process Technology Considerations, Three-Dimensional Integrated Circuit Design: EDA, Design and Microarchitectures
-
-
Xie, Y.1
Cong, J.J.2
Sapatnekar, S.3
-
48
-
-
84855873096
-
Low temperature bonding technology for 3d integration
-
Ko, C.-T., and Chen, K.-N., 2012, "Low Temperature Bonding Technology for 3D Integration, " Microelectron. Reliab., 52(2), pp. 302-311.
-
(2012)
Microelectron. Reliab.
, vol.52
, Issue.2
, pp. 302-311
-
-
Ko, C.-T.1
Chen, K.-N.2
-
49
-
-
84866871983
-
Study of low temperature and high heat-resistant flux-less bonding via nanoscale thin film control toward wafer-level multiple chip stacking for 3d lsi
-
San Diego, CA, May 29-June 1
-
Morinaga, E., Oka, Y., Nishimori, H., Miyagawa, H., Satoh, R., Iwata, Y., and Kanezaki, R., 2012, "Study of Low Temperature and High Heat-Resistant Flux-less Bonding Via Nanoscale Thin Film Control Toward Wafer-Level Multiple Chip Stacking for 3D LSI, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 14-19.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 14-19
-
-
Morinaga, E.1
Oka, Y.2
Nishimori, H.3
Miyagawa, H.4
Satoh, R.5
Iwata, Y.6
Kanezaki, R.7
-
50
-
-
79960397188
-
Design, simulation and process optimization of auinsn low temperature tlp bonding for 3d ic stacking
-
Lake Buena Vista, FL, May 31-June 3
-
Xie, L., Choi, W. K., Premachandran, C. S., Selvanayagam, C. S., Bai, K. W., Zeng, Y. Z., Ong, S. C., Liao, E., Khairyanto, A., Sekhar, V. N., and Thew, S., 2011, "Design, Simulation and Process Optimization of AuInSn Low Temperature TLP Bonding for 3D IC Stacking, " 61st Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 31-June 3, pp. 279-284.
-
(2011)
61st Electronic Components and Technology Conference (ECTC)
, pp. 279-284
-
-
Xie, L.1
Choi, W.K.2
Premachandran, C.S.3
Selvanayagam, C.S.4
Bai, K.W.5
Zeng, Y.Z.6
Ong, S.C.7
Liao, E.8
Khairyanto, A.9
Sekhar, V.N.10
Thew, S.11
-
51
-
-
77955205027
-
Cu/sn microbumps interconnect for 3d tsv chip stacking
-
Las Vegas, NV, June 1-4
-
Agarwal, R., Zhang, W., Limaye, P., Labie, R., Dimcic, B., Phommahaxay, A., and Soussan, P., 2010, "Cu/Sn Microbumps Interconnect for 3D TSV Chip Stacking, " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 858-863.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 858-863
-
-
Agarwal, R.1
Zhang, W.2
Limaye, P.3
Labie, R.4
Dimcic, B.5
Phommahaxay, A.6
Soussan, P.7
-
52
-
-
78651280731
-
Fine pitch cu/sn solid state diffusion bonding for making high yield bump interconnections and its application in 3d integration
-
Berlin, September
-
Zhang, W., Limaye, P., Civale, Y., Labie, R., and Soussan, P., 2010, "Fine Pitch Cu/Sn Solid State Diffusion Bonding for Making High Yield Bump Interconnections and Its Application in 3D Integration, " 3rd Electronic System-Integration Technology Conference (ESTC), Berlin, September 13-16.
-
(2010)
3rd Electronic System-Integration Technology Conference (ESTC)
, pp. 13-16
-
-
Zhang, W.1
Limaye, P.2
Civale, Y.3
Labie, R.4
Soussan, P.5
-
53
-
-
77955188792
-
IMC bonding for 3d interconnection
-
Las Vegas, NV, June 1-4
-
Sakuma, K., Sueoka, K., Kohara, S., Matsumoto, K., Noma, H., Aoki, T., Oyama, Y., Nishiwaki, H., Andry, P. S., Tsang, C. K., Knickerbocker, J. U., and Orii, Y., 2010, "IMC Bonding for 3D Interconnection, " 60th Electronic Components and Technology Conference (ECTC), Las Vegas, NV, June 1-4, pp. 864-871.
-
(2010)
60th Electronic Components and Technology Conference (ECTC)
, pp. 864-871
-
-
Sakuma, K.1
Sueoka, K.2
Kohara, S.3
Matsumoto, K.4
Noma, H.5
Aoki, T.6
Oyama, Y.7
Nishiwaki, H.8
Andry, P.S.9
Tsang, C.K.10
Knickerbocker, J.U.11
Orii, Y.12
-
54
-
-
7244258739
-
Recent advances in flip-chip underfill: Materials, process, and reliability
-
Zhang, Z., and Wong, C. P., 2004, "Recent Advances in Flip-Chip Underfill: Materials, Process, and Reliability, " IEEE Trans. Adv. Packag., 27(3), pp. 515-524.
-
(2004)
IEEE Trans. Adv. Packag.
, vol.27
, Issue.3
, pp. 515-524
-
-
Zhang, Z.1
Wong, C.P.2
-
55
-
-
79952633393
-
Development of vacuum underfill technology for a 3d chip stack
-
Sakuma, K., Kohara, S., Sueoka, K., Orii, Y., Kawakami, M., Asai, K., Hir-ayama, Y., and Knickerbocker, J. U., 2011, "Development of Vacuum Underfill Technology for a 3D Chip Stack, " J. Micromechan. Microeng., 21(3), p. 035024.
-
(2011)
J. Micromechan. Microeng.
, vol.21
, Issue.3
, pp. 035024
-
-
Sakuma, K.1
Kohara, S.2
Sueoka, K.3
Orii, Y.4
Kawakami, M.5
Asai, K.6
Hir-Ayama, Y.7
Knickerbocker, J.U.8
-
56
-
-
79951932680
-
3D stacking by hybrid bonding with low temperature solder
-
Singapore, December 8-10
-
Myo, P., Chong, S. C., Xie, L., Ho, S. W., Toh, W. H. S., and Chai, T. C., 2010, "3D Stacking by Hybrid Bonding With Low Temperature Solder, " 12th Electronics Packaging Technology Conference (EPTC), Singapore, December 8-10, pp. 246-250.
-
(2010)
12th Electronics Packaging Technology Conference (EPTC)
, pp. 246-250
-
-
Myo, P.1
Chong, S.C.2
Xie, L.3
Ho, S.W.4
Toh, W.H.S.5
Chai, T.C.6
-
57
-
-
84866873384
-
High density metal-metal interconnect bonding with pre-applied fluxing underfill
-
San Diego, CA, May 29-June 1
-
Gregory, C., Lueck, M., Huffman, A., Lannon, J. M., and Temple, D. S., 2012, "High Density Metal-Metal Interconnect Bonding With Pre-Applied Fluxing Underfill, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 20-25.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 20-25
-
-
Gregory, C.1
Lueck, M.2
Huffman, A.3
Lannon, J.M.4
Temple, D.S.5
-
58
-
-
79960423083
-
Solder/adhesive bonding using simple planarization technique for 3d integration
-
Lake Buena Vista, FL, May 31-June 3
-
Nimura, M., Mizuno, J., Sakuma, K., and Shoji, S., 2011, "Solder/Adhesive Bonding Using Simple Planarization Technique for 3D Integration, " 61st Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL, May 31-June 3, pp. 1147-1152.
-
(2011)
61st Electronic Components and Technology Conference (ECTC)
, pp. 1147-1152
-
-
Nimura, M.1
Mizuno, J.2
Sakuma, K.3
Shoji, S.4
-
59
-
-
84883317061
-
Hybrid au-au bonding technology using planar adhesive structure for 3d integration
-
Las Vegas, NV, May 28-31
-
Nimura, M., Mizuno, J., Shigetou, A., Sakuma, K., Ogino, H., Enomoto, T., and Shoji, S., 2013, "Hybrid Au-Au Bonding Technology Using Planar Adhesive Structure for 3D Integration, " 63rd Electronic Components and Technology Conference (ECTC), Las Vegas, NV, May 28-31, pp. 1153-1157.
-
(2013)
63rd Electronic Components and Technology Conference (ECTC)
, pp. 1153-1157
-
-
Nimura, M.1
Mizuno, J.2
Shigetou, A.3
Sakuma, K.4
Ogino, H.5
Enomoto, T.6
Shoji, S.7
-
60
-
-
84875907152
-
Study on hybrid au-underfill resin bonding method with lock-and-key structure for 3-d integration
-
Nimura, M., Mizuno, J., Shigetou, A., Sakuma, K., Ogino, H., Enomoto, T., and Shoji, S., 2013, "Study on Hybrid Au-Underfill Resin Bonding Method With Lock-and-Key Structure for 3-D Integration, " IEEE Trans. Compon., Packag. Manuf. Technol., 3(4), pp. 558-565.
-
(2013)
IEEE Trans. Compon., Packag. Manuf. Technol.
, vol.3
, Issue.4
, pp. 558-565
-
-
Nimura, M.1
Mizuno, J.2
Shigetou, A.3
Sakuma, K.4
Ogino, H.5
Enomoto, T.6
Shoji, S.7
-
61
-
-
85199313540
-
Thermal stress analysis of die stacks with fine-pitch imc interconnections for 3d integration
-
Osaka, Japan, January 31-February 2
-
Kohara, S., Horibe, A., Sueoka, K., Matsumoto, K., Yamada, F., Orii, Y., Sakuma, K., Kinoshita, T., and Kawakami, T., 2012, "Thermal Stress Analysis of Die Stacks With Fine-Pitch IMC Interconnections for 3D Integration, " IEEE International 3D Systems Integration Conference (3DIC), Osaka, Japan, January 31-February 2.
-
(2012)
IEEE International 3D Systems Integration Conference (3DIC)
-
-
Kohara, S.1
Horibe, A.2
Sueoka, K.3
Matsumoto, K.4
Yamada, F.5
Orii, Y.6
Sakuma, K.7
Kinoshita, T.8
Kawakami, T.9
-
62
-
-
64549095226
-
System-level cost analysis and design exploration for three-dimensional integrated circuits (3d ics)
-
Yokohama, Japan, January 19-22
-
Dong, X., and Xie, Y., 2009, "System-Level Cost Analysis and Design Exploration for Three-Dimensional Integrated Circuits (3D ICs), " 14th Asia and South Pacific Design Automation Conference (ASP-DAC 2009), Yokohama, Japan, January 19-22, pp. 234-241.
-
(2009)
14th Asia and South Pacific Design Automation Conference (ASP-DAC 2009)
, pp. 234-241
-
-
Dong, X.1
Xie, Y.2
-
63
-
-
78650872716
-
Cost-effective integration of three-dimensional (3d) ics emphasizing testing cost analysis
-
San Jose, CA, November 7-11
-
Chen, Y., Niu, D., Xie, Y., and Chakrabarty, K., 2010, "Cost-Effective Integration of Three-Dimensional (3D) ICs Emphasizing Testing Cost Analysis, " IEEE/ACM International Conference on Computer-Aided Design (ICCAD), San Jose, CA, November 7-11, pp. 471-476.
-
(2010)
IEEE/ACM International Conference on Computer-Aided Design (ICCAD)
, pp. 471-476
-
-
Chen, Y.1
Niu, D.2
Xie, Y.3
Chakrabarty, K.4
-
64
-
-
85199299371
-
Die-to-wafer bonding of thin dies using a 2-step approach; High accuracy placement, then gang bonding
-
Scottsdale/Fountain Hills, AZ, March
-
Lecarpentier, G., Agarwal, R., Wenqizhang, Limaye, P., Labie, R., Phomma-haxay, A., and Soussan, P., 2010, "Die-to-Wafer Bonding of Thin Dies Using a 2-Step Approach; High Accuracy Placement, Then Gang Bonding, " 6th International Conference and Exhibit on Device Packaging, Scottsdale/Fountain Hills, AZ, March 7-11.
-
(2010)
6th International Conference and Exhibit on Device Packaging
, pp. 7-11
-
-
Lecarpentier, G.1
Agarwal, R.2
Wenqizhang Limaye, P.3
Labie, R.4
Phomma-Haxay, A.5
Soussan, P.6
-
65
-
-
77950021566
-
Wafer level bonding/stacking technology for 3d integration
-
Ko, C.-T., and Chen, K.-N., 2010, "Wafer Level Bonding/Stacking Technology for 3D Integration, " Microelectron. Reliab., 50(4), pp. 481-488.
-
(2010)
Microelectron. Reliab.
, vol.50
, Issue.4
, pp. 481-488
-
-
Ko, C.-T.1
Chen, K.-N.2
-
66
-
-
84862014626
-
A wafer-level three-dimensional integration scheme with cu tsvs based on microbump/adhesive hybrid bonding for three-dimensional memory application
-
Ko, C.-T., Hsiao, Z.-C., Chang, Y.-J., Chen, P.-S., Hwang, Y.-J., Fu, H.-C., Huang, J.-H., Chiang, C.-W., Sheu, S.-S., Chen, Y.-H., Lo, W.-C., and Chen, K.-N., 2012, "A Wafer-Level Three-Dimensional Integration Scheme With Cu TSVs Based on Microbump/Adhesive Hybrid Bonding for Three-Dimensional Memory Application, " IEEE Trans. Device Mater. Reliab., 12(2), pp. 209-216.
-
(2012)
IEEE Trans. Device Mater. Reliab.
, vol.12
, Issue.2
, pp. 209-216
-
-
Ko, C.-T.1
Hsiao, Z.-C.2
Chang, Y.-J.3
Chen, P.-S.4
Hwang, Y.-J.5
Fu, H.-C.6
Huang, J.-H.7
Chiang, C.-W.8
Sheu, S.-S.9
Chen, Y.-H.10
Lo, W.-C.11
Chen, K.-N.12
-
67
-
-
84863713680
-
Electrical characterization and reliability investigations of cu tsvs with wafer-level cu/sn-bcb hybrid bonding
-
Hsinchu, Taiwan, April
-
Chang, Y. J., Ko, C. T., Hsiao, Z. C., Yu, T. H., Chen, Y. H., Lo, W. C., and Chen, K. N., 2012, "Electrical Characterization and Reliability Investigations of Cu TSVs With Wafer-Level Cu/Sn-BCB Hybrid Bonding, " International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA), Hsinchu, Taiwan, April 23-25.
-
(2012)
International Symposium on VLSI Technology, Systems, and Applications (VLSI-TSA)
, pp. 23-25
-
-
Chang, Y.J.1
Ko, C.T.2
Hsiao, Z.C.3
Yu, T.H.4
Chen, Y.H.5
Lo, W.C.6
Chen, K.N.7
-
68
-
-
77955624552
-
Cu to cu interconnect using 3d-tsv and wafer to wafer thermocompression bonding
-
Burlingame, CA, June
-
Huyghebaert, C., Van Olmen, J., Civale, Y., Phommahaxay, A., Jourdain, A., Sood, S., Farrens, S., and Soussan, P., 2010, "Cu to Cu Interconnect Using 3D-TSV and Wafer to Wafer Thermocompression Bonding, " 2010 International Interconnect Technology Conference (IITC), Burlingame, CA, June 6-9.
-
(2010)
2010 International Interconnect Technology Conference (IITC)
, pp. 6-9
-
-
Huyghebaert, C.1
Van Olmen, J.2
Civale, Y.3
Phommahaxay, A.4
Jourdain, A.5
Sood, S.6
Farrens, S.7
Soussan, P.8
-
69
-
-
64549139638
-
A 300-mm wafer-level three-dimensional integration scheme using tungsten through-silicon via and hybrid cu-adhesive bonding
-
San Francisco, CA, December
-
Liu, F., Yu, R. R., Young, A. M., Doyle, J. P., Wang, X., Shi, L., Chen, K. N., Li, X., Dipaola, D. A., Brown, D., Ryan, C. T., Hagan, J. A., Wong, K. H., Lu, M., Gu, X., Klymko, N. R., Perfecto, E. D., Merryman, A. G., Kelly, K. A., Purushothaman, S., Koester, S. J., Wisnieff, R., and Haensch, W., 2008, "A 300-mm Wafer-Level Three-Dimensional Integration Scheme Using Tungsten Through-Silicon Via and Hybrid Cu-Adhesive Bonding, " IEEE International Electron Devices Meeting (IEDM 2008), San Francisco, CA, December 15-17.
-
IEEE International Electron Devices Meeting (IEDM 2008)
, pp. 15-17
-
-
Liu, F.1
Yu, R.R.2
Young, A.M.3
Doyle, J.P.4
Wang, X.5
Shi, L.6
Chen, K.N.7
Li, X.8
Dipaola, D.A.9
Brown, D.10
Ryan, C.T.11
Hagan, J.A.12
Wong, K.H.13
Lu, M.14
Gu, X.15
Klymko, N.R.16
Perfecto, E.D.17
Merryman, A.G.18
Kelly, K.A.19
Purushothaman, S.20
Koester, S.J.21
Wisnieff, R.22
more..
-
70
-
-
46049098824
-
3D integration by cu-cu thermo-compression bonding of extremely thinned bulk-si die containing 10 lm pitch through-si vias
-
San Francisco, CA, December
-
Swinnen, B., Ruythooren, W., De Moor, P., Bogaerts, L., Carbonell, L., De Munck, K., Eyckens, B., Stoukatch, S., Sabuncuoglu Tezcan, D., Tokei, Z., Vaes, J., Van Aelst, J., and Beyne, E., 2006, "3D Integration by Cu-Cu Thermo-Compression Bonding of Extremely Thinned Bulk-Si Die Containing 10 lm Pitch Through-Si Vias, " International Electron Devices Meeting (IEDM '06), San Francisco, CA, December 11-13.
-
(2006)
International Electron Devices Meeting (IEDM '06)
, pp. 11-13
-
-
Swinnen, B.1
Ruythooren, W.2
De Moor, P.3
Bogaerts, L.4
Carbonell, L.5
De Munck, K.6
Eyckens, B.7
Stoukatch, S.8
Sabuncuoglu Tezcan, D.9
Tokei, Z.10
Vaes, J.11
Van Aelst, J.12
Beyne, E.13
-
71
-
-
84858297667
-
Formation of tsv for the stacking of advanced logic devices utilizing bumpless wafer-on-wafer technology
-
Diehl, D., Kitada, H., Maeda, N., Fujimoto, K., Ramaswami, S., Sirajuddin, K., Yalamanchili, R., Eaton, B., Rajagopalan, N., Ding, R., Patel, S., Cao, Z., Gage, M., Wang, Y., Tu, W., Kim, S. W., Kulzer, R., Drucker, I., Erickson, D., Ritzdorf, T., Nakamura, T., and Ohba, T., 2012, "Formation of TSV for the Stacking of Advanced Logic Devices Utilizing Bumpless Wafer-on-Wafer Technology, " Microelectron. Eng., 92, pp. 3-8.
-
(2012)
Microelectron. Eng.
, vol.92
, pp. 3-8
-
-
Diehl, D.1
Kitada, H.2
Maeda, N.3
Fujimoto, K.4
Ramaswami, S.5
Sirajuddin, K.6
Yalamanchili, R.7
Eaton, B.8
Rajagopalan, N.9
Ding, R.10
Patel, S.11
Cao, Z.12
Gage, M.13
Wang, Y.14
Tu, W.15
Kim, S.W.16
Kulzer, R.17
Drucker, I.18
Erickson, D.19
Ritzdorf, T.20
Nakamura, T.21
Ohba, T.22
more..
-
72
-
-
84866852405
-
Development of cost-effective wafer level process for 3d-integration with bump-less tsv interconnects
-
San Diego, CA, May 29-June 1
-
Fujimoto, K., Maeda, N., Kitada, H., Kim, Y. S., Kodama, S., Nakamura, T., Suzuki, K., and Ohba, T., 2012, "Development of Cost-Effective Wafer Level Process for 3D-Integration With Bump-Less TSV Interconnects, " 62nd Electronic Components and Technology Conference (ECTC), San Diego, CA, May 29-June 1, pp. 537-540.
-
(2012)
62nd Electronic Components and Technology Conference (ECTC)
, pp. 537-540
-
-
Fujimoto, K.1
Maeda, N.2
Kitada, H.3
Kim, Y.S.4
Kodama, S.5
Nakamura, T.6
Suzuki, K.7
Ohba, T.8
-
73
-
-
70349463104
-
Stress sensitivity analysis on tsv structure of wafer-on-a-wafer (wow) by the finite element method (fem)
-
Sapporo, Japan, June 1-3
-
Kitada, H., Maeda, N., Fujimoto, K., Suzuki, K., Kawai, A., Arai, K., Suzuki, T., Nakamura, T., and Ohba, T., 2009, "Stress Sensitivity Analysis on TSV Structure of Wafer-on-a-Wafer (WOW) by the Finite Element Method (FEM), " IEEE International Interconnect Technology Conference (IITC), Sapporo, Japan, June 1-3, pp. 107-109.
-
(2009)
IEEE International Interconnect Technology Conference (IITC)
, pp. 107-109
-
-
Kitada, H.1
Maeda, N.2
Fujimoto, K.3
Suzuki, K.4
Kawai, A.5
Arai, K.6
Suzuki, T.7
Nakamura, T.8
Ohba, T.9
-
74
-
-
84891582287
-
-
Wiley-VCH, Weinheim, Germany
-
Ramm, P., Lu, J. J.-Q., and Taklo, M. M. V., 2012, Handbook of Wafer Bonding, Wiley-VCH, Weinheim, Germany.
-
(2012)
Handbook of Wafer Bonding
-
-
Ramm, P.1
Lu, J.J.-Q.2
Taklo, M.M.V.3
-
75
-
-
34748923685
-
Three dimensional chip stacking using a wafer-to-wafer integration
-
Burlingame, CA, June 4-6
-
Chatterjee, R., Fayolle, M., Leduc, P., Pozder, S., Jones, B., Acosta, E., Charlet, B., Enot, T., Heitzmann, M., Zussy, M., Roman, A., Louveau, O., Maitrejean, S., Louis, D., Kernevez, N., Sillon, N., Passemard, G., Po, V., Mathew, V., Garcia, S., Sparks, T., and Zhihong, H., 2007, "Three Dimensional Chip Stacking Using a Wafer-to-Wafer Integration, " IEEE International Interconnect Technology Conference (IITC), Burlingame, CA, June 4-6, pp. 81-83.
-
(2007)
IEEE International Interconnect Technology Conference (IITC)
, pp. 81-83
-
-
Chatterjee, R.1
Fayolle, M.2
Leduc, P.3
Pozder, S.4
Jones, B.5
Acosta, E.6
Charlet, B.7
Enot, T.8
Heitzmann, M.9
Zussy, M.10
Roman, A.11
Louveau, O.12
Maitrejean, S.13
Louis, D.14
Kernevez, N.15
Sillon, N.16
Passemard, G.17
Po, V.18
Mathew, V.19
Garcia, S.20
Sparks, T.21
Zhihong, H.22
more..
-
76
-
-
34547322811
-
Interconnects in the third dimension: Design challenges for 3d ics
-
San Diego, CA, June 4-8
-
Bernstein, K., Andry, P., Cann, J., Emma, P., Greenberg, D., Haensch, W., Ignatowski, M., Koester, S., Magerlein, J., Puri, R., and Young, A., 2007, "Interconnects in the Third Dimension: Design Challenges for 3D ICs, " 44th ACM/IEEE Design Automation Conference (DAC '07), San Diego, CA, June 4-8, pp. 562-567.
-
(2007)
44th ACM/IEEE Design Automation Conference (DAC '07)
, pp. 562-567
-
-
Bernstein, K.1
Andry, P.2
Cann, J.3
Emma, P.4
Greenberg, D.5
Haensch, W.6
Ignatowski, M.7
Koester, S.8
Magerlein, J.9
Puri, R.10
Young, A.11
-
77
-
-
84864862721
-
Wafer-scale oxide fusion bonding and wafer thinning development for 3d systems integration: Oxide fusion wafer bonding and wafer thinning development for tsv-last integration
-
Tokyo, May 22-23
-
Skordas, S., Tulipe, D. C. L., Winstel, K., Vo, T. A., Priyadarshini, D., Upham, A., Song, D., Hubbard, A., Johnson, R., Cauffman, K., Kanakasabapathy, S., Lin, W., Knupp, S., Malley, M., Farooq, M. G., Hannon, R., Berger, D., and Iyer, S. S., 2012, "Wafer-Scale Oxide Fusion Bonding and Wafer Thinning Development for 3D Systems Integration: Oxide Fusion Wafer Bonding and Wafer Thinning Development for TSV-Last Integration, " 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D), Tokyo, May 22-23, pp. 203-208.
-
(2012)
3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
, pp. 203-208
-
-
Skordas, S.1
Tulipe, D.C.L.2
Winstel, K.3
Vo, T.A.4
Priyadarshini, D.5
Upham, A.6
Song, D.7
Hubbard, A.8
Johnson, R.9
Cauffman, K.10
Kanakasabapathy, S.11
Lin, W.12
Knupp, S.13
Malley, M.14
Farooq, M.G.15
Hannon, R.16
Berger, D.17
Iyer, S.S.18
-
78
-
-
34748834812
-
Progress of 3d integration technologies and 3d interconnects
-
Burlingame, CA, June 4-6
-
Pozder, S., Chatterjee, R., Jain, A., Huang, Z., Jones, R. E., and Acosta, E., 2007, "Progress of 3D Integration Technologies and 3D Interconnects, " IEEC International Interconnect Technology Conference (IITC), Burlingame, CA, June 4-6, pp. 213-215.
-
(2007)
IEEC International Interconnect Technology Conference (IITC)
, pp. 213-215
-
-
Pozder, S.1
Chatterjee, R.2
Jain, A.3
Huang, Z.4
Jones, R.E.5
Acosta, E.6
-
79
-
-
70549095282
-
Low cost of ownership scalable copper direct bond interconnect 3d ic technology for three dimensional integrated circuit applications
-
San Francisco, CA, September
-
Enquist, P., Fountain, G., Petteway, C., Hollingsworth, A., and Grady, H., 2009, "Low Cost of Ownership Scalable Copper Direct Bond Interconnect 3D IC Technology for Three Dimensional Integrated Circuit Applications, " IEEE International Conference on 3D System Integration (3DIC 2009), San Francisco, CA, September 28-30.
-
(2009)
IEEE International Conference on 3D System Integration (3DIC 2009)
, pp. 28-30
-
-
Enquist, P.1
Fountain, G.2
Petteway, C.3
Hollingsworth, A.4
Grady, H.5
-
80
-
-
85199300241
-
-
i-Micronews
-
Donabedian, D. L., Enquist, P., and Sanders, C., 2008, "Ziptronix Pioneering 3D Integrated Circuit Process Technology, " i-Micronews, http://www. i-micronews. com/lectureArticle.asp?id2009
-
(2008)
Ziptronix Pioneering 3D Integrated Circuit Process Technology
-
-
Donabedian, D.L.1
Enquist, P.2
Sanders, C.3
-
81
-
-
79955944133
-
Recent developments of cu-cu non-thermo compression bonding for wafer-to-wafer 3d stacking
-
Munich, Germany, November
-
Radu, I., Landru, D., Gaudin, G., Riou, G., Tempesta, C., Letertre, F., Di Cioc-cio, L., Gueguen, P., Signamarcheix, T., Euvrard, C., Dechamp, J., Clavelier, L., and Sadaka, M., 2010, "Recent Developments of Cu-Cu Non-Thermo Compression Bonding for Wafer-to-Wafer 3D Stacking, " IEEE International 3D Systems Integration Conference (3DIC), Munich, Germany, November 16-18.
-
(2010)
IEEE International 3D Systems Integration Conference (3DIC)
, pp. 16-18
-
-
Radu, I.1
Landru, D.2
Gaudin, G.3
Riou, G.4
Tempesta, C.5
Letertre, F.6
Di Cioc-Cio, L.7
Gueguen, P.8
Signamarcheix, T.9
Euvrard, C.10
Dechamp, J.11
Clavelier, L.12
Sadaka, M.13
|