Research updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies

APL Materials

Volumn 1, Issue 4, 2013, Pages

  King, Sean W ^a   Simka, Harsono ^a   Herr, Dan ^b   Akinaga, Hiro ^c   Garner, Mike ^d  

^a INTEL CORPORATION   (United States)

^b UNIVERSITY OF NORTH CAROLINA AT GREENSBORO   (United States)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^d Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84893781961     PISSN: None     EISSN: 2166532X     Source Type: Journal    
DOI: 10.1063/1.4822437     Document Type: Article

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