Moore's crystal ball: Device physics and technology past the 15 nm generation

Microelectronic Engineering

Volumn 88, Issue 7, 2011, Pages 1044-1049

  Kuhn, Kelin J ^a  

^a INTEL CORPORATION   (United States)

Author keywords

CMOS; ETSOI; FDSOI; FinFET; Ge channels; Nanowire; Strained silicon; TriGate

Indexed keywords

CMOS; ETSOI; FDSOI; FINFET; STRAINED SILICON; TRIGATE;

GERMANIUM; INTEGRATED CIRCUITS; MESFET DEVICES; NANOWIRES;

ARCHITECTURE;

EID: 79958038168     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.03.163     Document Type: Conference Paper

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