Computer modelling of magnetron discharges

Journal of Physics D: Applied Physics

Volumn 42, Issue 19, 2009, Pages

  Bogaerts, Annemie ^a   Bultinck, Evi ^a   Kolev, Ivan ^a   Schwaederlé, Laurent ^a   Van Aeken, Koen ^b   Buyle, Guy ^b   Depla, Diederik ^b  

^a UNIVERSITY OF ANTWERP   (Belgium)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL MODEL; COMPUTER MODELLING; DIRECT-CURRENT MAGNETRONS; HYBRID MONTE CARLO; MAGNETIC FIELD DISTRIBUTION; MAGNETRON DISCHARGES; MONTE CARLO COLLISION; MONTE CARLO SIMULATION; PARTICLE-IN-CELL; RESEARCH GROUPS; SIMULATION METHODS; SIMULATION RESULT; SPUTTERED ATOMS;

MAGNETIC FIELDS; MAGNETRONS; MONTE CARLO METHODS; SPUTTERING; SYSTEMS ENGINEERING;

SIMULATORS;

EID: 70350655421     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/42/19/194018     Document Type: Review

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