Mechanisms of target poisoning during magnetron sputtering as investigated by real-time in situ analysis and collisional computer simulation

Applied Physics Letters

Volumn 85, Issue 25, 2004, Pages 6134-6136

  Guttler D ^a   Abendroth, B ^a   Grotzschel R ^a   Moller W ^a   Depla, D ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; COATING TECHNIQUES; COMPUTER SIMULATION; FLOW OF FLUIDS; ION IMPLANTATION; MAGNETIC HYSTERESIS; MAGNETRON SPUTTERING; MIXTURES; MONOLAYERS; REAL TIME SYSTEMS; SPUTTER DEPOSITION; STAINLESS STEEL; TITANIUM NITRIDE; ULTRAHIGH VACUUM;

ENERGY LOSS; FLOW CONTROLLERS; REACTIVE GAS; SURFACE ADSORPTION;

NITROGEN;

EID: 20444496530     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1835002     Document Type: Article

References (25)

1. R. F. Bunshah, Handbook of Deposition Technologies for Films and Coatings (Noyes, Park Ridge, N.J. 1984).
2. P. E. Hovsepian, D. B. Lewis, and W.-D. Münz, Surf. Coat. Technol. 133, 166 (2000).
3. J. M. Schneider, S. Rhode, W. D. Sproul, and A. Matthews, J. Phys. D 33, R173 (2000).
4. I. Safi, Surf. Coat. Technol. 127, 203 (2000).
5. A. A. Voevodin, P. Stevenson, C. Rebholz, J. M. Schneider, and A. Matthews, Vacuum 46, 723 (1995).
6. T. Wallendorf, S. Marke, C. May, and J. Strümpfel, Surf. Coat. Technol. 174, 222 (2003).
7. S. Berg, H.-O. Blom, T. Larsson, and C. Nender, J. Vac. Sci. Technol. A 5, 202 (1987).
8. T. Larsson, H.-O. Blom, C. Nender, and S. Berg, J. Vac. Sci. Technol. A 6, 1832 (1988).
9. E. Kusano, J. Appl. Phys. 70, 7089 (1991).
10. R. Mientus and K. Ellmer, Surf. Coat. Technol. 116, 1093 (1999).
11. D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 183, 184 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 183, 190 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 183, 196 (2004).
12. D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 183, 184 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 183, 190 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 183, 196 (2004).
13. D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 183, 184 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 183, 190 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 183, 196 (2004).
14. O. Kappertz, D. Rosen, T. Nyberg, I. Katardjiev, and S. Berg (unpublished).
15. W. Möller and W. Eckstein, Nucl. Instrum. Methods Phys. Res. B 2, 814 (1984).
16. W. Möller, W. Eckstein, and J. P. Biersack, Comput. Phys. Commun. 51, 355 (1988).
17. L. Combadiere and J. Machet, Surf. Coat. Technol. 82, 145 (1996).
18. A. F. Hmiel, J. Vac. Sci. Technol. A 3, 592 (1985).
19. D. Depla and R. De Gryse, Vacuum 69, 529 (2003).
20. H. S. W. Massey and E. H. S. Burhop, Electronic and Ionic Impact Phenomena (Oxford University Press, London, 1956).
21. J. Neidhardt, L. Hultman, B. Abendroth, R. Gago, and W. Möller, J. Appl. Phys. 94, 7059 (2003).
22. F. Debal, J. Bretagne, M. Jumet, M. Wautelet, J. P. Dauchot, and M Hecq, Plasma Sources Sci. Technol. 7, 219 (1998).
23. M. A. Lewis, D. A. Glocker, and J. Jorne, J. Vac. Sci. Technol. A 7, 1019 (1989).
24. Y. Itikawa, M. Hayashi, A. Ichimura, K. Onda, K. Sakimoto, K. Takayanagi, M. Nakamura, H. Nishimura, and T. Takayanagi, J. Phys. Chem. Ref. Data 15, 985 (1986).
25. W. Möller and M. Posselt, TRIDYN_FZR User Manual, Report No. FZR-317 (Forschungszentrum, Rossendorf, 2001).