Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1218-1224

  Buyle, G ^a   Depla, D ^a   Eufinger, K ^a   Haemers, J ^a   De Gryse, R ^a   De Bosscher, W ^b  

^a GHENT UNIVERSITY   (Belgium)

^b Bekaert sa   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; EROSION; ION BOMBARDMENT; IONIZATION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS; NUMERICAL ANALYSIS; PRESSURE EFFECTS; PROBABILITY;

HIGH ENERGY ELECTRONS; MAGNETIC TRAP; MAGNETRON DISCHARGE;

MAGNETRONS;

EID: 0041529512     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1572169     Document Type: Article

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