Self-consistent numerical analysis of a planar dc magnetron discharge by the particle-in-cell/Monte Carlo method

Journal of Physics D: Applied Physics

Volumn 32, Issue 10, 1999, Pages 1142-1152

  Kondo, S ^a   Nanbu, K ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELECTRIC SPACE CHARGE; ELECTRON EMISSION; MAGNETIZATION; MAGNETRON SPUTTERING; MAGNETS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMA OSCILLATIONS; PLASMA SHEATHS; PLASMA WAVES;

MAGNETRON DISCHARGES; PARTICLE-IN-CELL METHOD;

ELECTRIC DISCHARGES;

EID: 0032665057     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/10/311     Document Type: Article

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