Study of the plasma pre-sheath in magnetron discharges dominated by Bohm diffusion of electrons

Plasma Sources Science and Technology

Volumn 7, Issue 4, 1998, Pages 572-580

  Bradley, J W ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; ELECTRIC DISCHARGES; ELECTRONS; MAGNETRONS; PLASMA DENSITY; PLASMA SIMULATION;

ELECTRON TEMPERATURE; MAGNETRON DISCHARGES;

PLASMA SHEATHS;

EID: 0032204645     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/7/4/014     Document Type: Article

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