Numerical modelling of charged particle motion in electric and magnetic fields to assist magnetron design

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 626-632

  Liebig, J S ^a   Frach, P ^a   Bartzsch, H ^a   Schulze, D ^b   Schwanbeck, H ^b  

^a Fraunhofer Institute for Electron Beam and Plasma Technology   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Design optimization; Field calculations; Magnetron sputtering; Numerical modelling; Particle motion

Indexed keywords

CHARGED PARTICLES; COMPUTATIONAL METHODS; COMPUTER SIMULATION; MAGNETIC FIELDS; MATHEMATICAL MODELS; MONTE CARLO METHODS; OPTIMIZATION; SPUTTER DEPOSITION; SUBSTRATES;

CHARGED PARTICLE MOTION; DEPOSITION GEOMETRY;

MAGNETRON SPUTTERING;

EID: 0031379086     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00336-8     Document Type: Article

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