Radial behaviour of the electron energy distribution function in the cylindrical magnetron discharge in argon

Journal of Physics D: Applied Physics

Volumn 32, Issue 20, 1999, Pages 2655-2665

  Passoth, E ^a   Behnke, J F ^a   Csambal, C ^a   Tichy M ^b   Kudrna, P ^b   Golubovskii, Yu B ^c   Porokhova, I A ^c  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b CHARLES UNIVERSITY   (Czech Republic)

^c ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN EQUATION; CYLINDRICAL MAGNETRON DISCHARGE; ELECTRON ENERGY DISTRIBUTION FUNCTION; RADIAL DIRECTION; TUNGSTEN CYLINDRICAL PROBE;

ANISOTROPY; ARGON; ELECTRIC DISCHARGES; ELECTRIC FIELDS; MAGNETIC FIELDS; MAGNETRONS; NUMERICAL METHODS; TUNGSTEN;

ELECTRON ENERGY LEVELS;

EID: 0033208999     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/20/312     Document Type: Article

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