PIC - MCC numerical simulation of a DC planar magnetron

Plasma Processes and Polymers

Volumn 3, Issue 2, 2006, Pages 127-134

  Kolev, Ivan ^a   Bogaerts, Annemie ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Magnetron; Modeling; Particles; Plasma; Sputtering

Indexed keywords

ARGON; COMPUTER SIMULATION; DIFFUSION IN GASES; GAS HEATING; KINETIC THEORY; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS;

MONTE CARLO COLLISIONS; PARTICLE-IN-CELL; PLANAR MAGNETRON;

MAGNETRONS;

EID: 33644534463     PISSN: 16128850     EISSN: None     Source Type: Journal    
DOI: 10.1002/ppap.200500118     Document Type: Article

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