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Volumn 10, Issue 5, 2008, Pages 581-587
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Simulation to predict target erosion of planar DC magnetron
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Author keywords
Discharge; Erosion; Magnetron sputtering; Particle simulation; Plasma
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Indexed keywords
ELECTRIC DISCHARGES;
ELECTRIC FIELD EFFECTS;
ELECTRIC FIELDS;
FINITE ELEMENT METHOD;
IONIZATION;
MAGNETIC FIELDS;
MAGNETRON SPUTTERING;
MAGNETRONS;
MATHEMATICAL MODELS;
MONTE CARLO METHODS;
PLASMAS;
SOIL MECHANICS;
TARGETS;
COLLISION PROCESSES;
DC MAGNETRONS;
DISCHARGE;
DYNAMIC EROSIONS;
ENERGETIC ELECTRONS;
EROSION PROFILES;
IONIZATION EVENTS;
IONIZATION POINTS;
MEASURED RESULTS;
PARTICLE METHODS;
PARTICLE SIMULATION;
PLASMA PROPERTIES;
SHEATH THICKNESSES;
SPATIAL PROFILES;
SPEED-UP;
STEP SIZES;
TARGET EROSIONS;
TIME STEPS;
TWO DIMENSIONS;
EROSION;
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EID: 58149461426
PISSN: 10090630
EISSN: None
Source Type: Journal
DOI: 10.1088/1009-0630/10/5/12 Document Type: Article |
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Times cited : (7)
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References (28)
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