Modeling of plasma-target interaction during reactive magnetron sputtering of TiN

Journal of Applied Physics

Volumn 102, Issue 9, 2007, Pages

  Moller W ^a   Guttler D ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; COMPUTER SIMULATION; ION IMPLANTATION; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; NITROGEN;

MAGNETRON PLASMA; PLASMA-TARGET INTERACTION; SURFACE MODELS; SURFACE PROCESSES; SURFACE SATURATION;

TITANIUM NITRIDE;

EID: 36248933606     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2800262     Document Type: Article

References (46)

1. S. Schiller, U. Heisig, and C. Korndörfer, Surf. Coat. Technol. 33, 405 (1987).
2. A. A. Voevodin, P. Stevenson, C. Rebholz, J. M. Schneider, and A. Matthews, Vacuum 46, 723 (1995).
3. W. D. Sproul, Science 273, 889 (1996).
4. J. Musil, P. Baroch, J. Vlcek, K. H. Nam, and J. G. Han, Thin Solid Films 475, 208 (2005).
5. B. Szyszka, V. Sittinger, and X. Jiang, Thin Solid Films 442, 179 (2003).
6. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
7. T. Wallendorf, S. Marke, C. May, and J. Strümpfel, Surf. Coat. Technol. 174-175, 222 (2003).
8. F. Ruske, A. Pflug, V. Sittinger, W. Werner, and B. Szyszka, Thin Solid Films 502, 44 (2006).
9. S. Berg, H.-O. Blom, T. Larsson, and C. Nender, J. Vac. Sci. Technol. A 5, 202 (1987).
10. T. Larsson, H.-O. Blom, C. Nender, and S. Berg, J. Vac. Sci. Technol. A 6, 1832 (1988).
11. S. Berg and T. Nyberg, Thin Solid Films 476, 215 (2005).
12. D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2003.10.006 183, 184 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2003.10.007 183, 190 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 183, 196 (2004).
13. D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2003.10.006 183, 184 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2003.10.007 183, 190 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 183, 196 (2004).
14. D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2003.10.006 183, 184 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2003.10.007 183, 190 (2004); D. Depla and R. De Gryse, Surf. Coat. Technol. 183, 196 (2004).
15. D. Güttler, B. Abendroth, R. Grötzschel, W. Möller, and D. Depla, Appl. Phys. Lett. 85, 6134 (2004).
16. D. Rosen, I. Katardjiev, S. Berg, and W. Möller, Nucl. Instrum. Methods Phys. Res. B 228, 193 (2005).
17. T. Kubart, O. Kappertz, T. Nyberg, and S. Berg, Thin Solid Films 515, 421 (2006).
18. W. Möller and W. Eckstein, Nucl. Instrum. Methods Phys. Res. B 2, 814 (1984).
19. W. Möller, W. Eckstein, and J. P. Biersack, Comput. Phys. Commun. 51, 355 (1988).
20. A. Palmero, E. D. van Hattum, W. M. Arnoldbik, and F. H. P. M. Habraken, Surf. Coat. Technol. 188-189, 392 (2004).
21. G. Buyle, D. Depla, K. Eufinger, J. Haemers, R. De Gryse, and W. De Bosscher, J. Vac. Sci. Technol. A 21, 1218 (2003).
22. J. Musschoot, D. Depla, G. Buyle, J. Haemers, and R. De Gryse, J. Phys. D 39, 3989 (2006).
23. I. Kolev and A. Bogaerts, IEEE Trans. Plasma Sci. 34, 886 (2006).
24. U. H. Kwon, S. H. Choi, Y. H. Park, and W. J. Lee, Thin Solid Films 475, 17 (2005).
25. SIGLO DataBase by J. P. Boeuf and L. C. Pitchford (http://www.siglo- kinema.com).
26. D. Hasselkamp, H. Rothard, K. O. Groeneveld, J. Kemmler, P. Varga, and H. Winter, in Particle Induced Emission II, Springer Tracts in Modern Physics Vol. 123, edited by, G. Höhler, (Springer, Heidelberg, 1991).
27. F. Debal, J. Bretagne, M. Jumet, M. Wautelet, J. P. Dauchot, and M. Hecq, Plasma Sources Sci. Technol. 7, 219 (1998).
28. J. Neidhardt, L. Hultman, B. Abendroth, R. Gago, and W. Möller, J. Appl. Phys. 94, 7059 (2003).
29. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), Vol. 1; http://www.srim.org.
30. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985), Vol. 1; http://www.srim.org.
31. A. K. Gupta and J. H. Leck, Vacuum 25, 362 (1975).
32. D. J. Harra, J. Vac. Sci. Technol. 13, 471 (1976).
33. D. Mao, K. Tao, and J. Hopwood, J. Vac. Sci. Technol. A 20, 379 (2002).
34. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer-Verlag, Berlin, 1991).
35. W. Möller, F. Besenbacher, and J. Bøttiger, Appl. Phys. A: Solids Surf. 27, 19 (1982).
36. W. Möller, D. Bouchier, O. Burat, and V. Stambouli, Surf. Coat. Technol. 45, 73 (1991).
37. W. Möller and M. Posselt, TRIDYN_FZR User Manual, (Forschungszentrum Rossendorf, Dresden, 2001), Report No. FZR-317.
38. W. Möller and M. Posselt, TRIDYN_FZR User Manual, (Forschungszentrum Rossendorf, Dresden, 2001), Report No. FZR-317.
39. D. Rosen, Vacuum 80, 944 (2006).
40. R. Ranjan, J. P. Allain, M. R. Hendricks, and D. N. Ruzic, J. Vac. Sci. Technol. A 19, 1004 (2001).
41. J. P. Biersack and W. Eckstein, Appl. Phys. A: Solids Surf. 34, 73 (1984).
42. D. Güttler, R. Grötzschel, and W. Möller, Appl. Phys. Lett. 90, 263502 (2007).
43. H. C. Straub, P. Renaud, B. G. Lindsay, K. A. Smith, and R. F. Stebbings, Phys. Rev. A 52, 1115 (1995).
44. D. Rapp and P. Englander-Golden, J. Chem. Phys. 43, 1464 (1965).
45. H. C. Straub, P. Renaud, B. G. Lindsay, K. A. Smith, and R. F. Stebbings, Phys. Rev. A 54, 2146 (1996).
46. P. C. Cosby, J. Chem. Phys. 98, 9544 (1993).