Simplified model for the DC planar magnetron discharge

Vacuum

Volumn 74, Issue 3-4 SPEC. ISS., 2004, Pages 353-358

  Buyle, G ^a   Depla, D ^a   Eufinger, K ^a   Haemers, J ^a   De Bosscher, W ^b   De Gryse, R ^a  

^a GHENT UNIVERSITY   (Belgium)

^b Bekaert sa   (Belgium)

Author keywords

Magnetron discharge; Magnetron sputtering; Modelling; Simulation

Indexed keywords

CATHODES; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRONS; IONIZATION; MONTE CARLO METHODS; PRESSURE EFFECTS; VACUUM APPLICATIONS;

HIGH ENERGY ELECTRONS; MAGNETRON DISCHARGES; SECONDARY ELECTRONS; VOLTAGE DEPENDENCES;

MAGNETRON SPUTTERING;

EID: 2442534676     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.01.014     Document Type: Article

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