Detailed numerical investigation of a DC sputter magnetron

IEEE Transactions on Plasma Science

Volumn 34, Issue 3 PART 2, 2006, Pages 886-894

  Kolev, Ivan ^a   Bogaerts, Annemie ^a  

^a UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

Gas heating; Magnetron; Modeling; Particle in cell (PIC); Sputtering

Indexed keywords

COORDINATE SPACES; DENSITY DISTRIBUTIONS; DIRECT CURRENTS; DISCHARGE CHARACTERISTICS; ELECTRICAL POTENTIALS; EROSION PROFILES; EXPERIMENTAL DATUM; MODELING; MONTE CARLO COLLISIONS; NUMERICAL INVESTIGATIONS; NUMERICAL MODELS; PARTICLE-IN-CELL (PIC); PLASMA SPECIES; SPUTTERED ATOMS; TWO-DIMENSIONAL;

ELECTRIC DISCHARGES; GAS HEATING; GASES; PLASMAS; SIGNAL INTERFERENCE; SPUTTERING; THREE DIMENSIONAL;

MAGNETRONS;

EID: 36248971493     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2006.875843     Document Type: Conference Paper

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