Computational studies on plasma generation and erosion in a rectangular magnetron sputtering system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 4 A, 1996, Pages 2302-2305

  Ido, Shunji ^a   Nakamura, Kosuke ^a  

^a SAITAMA UNIVERSITY   (Japan)

Author keywords

Electron orbit simulation; External magnetic fields; Magnetron sputtering; Monte Carlo method; Plasma distribution; Rectangular magnet

Indexed keywords

ARGON; ATOMS; CALCULATIONS; COMPUTER SIMULATION; ELECTRONS; MAGNETIC FIELDS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PERMANENT MAGNETS; PLASMA DENSITY; PLASMAS; THREE DIMENSIONAL;

ELECTRON ORBIT SIMULATION; NEUTRAL GAS ATOMS; PARTICLE ORBIT SIMULATION; PLASMA DISTRIBUTION; PLASMA GENERATION; RECTANGULAR MAGNET; RECTANGULAR MAGNETRON SPUTTERING SYSTEM;

MAGNETRON SPUTTERING;

EID: 0030123745     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.2302     Document Type: Article

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