Calculation of the effective gas interaction probabilities of the secondary electrons in a dc magnetron discharge

Journal of Physics D: Applied Physics

Volumn 37, Issue 12, 2004, Pages 1639-1647

  Buyle, G ^a   Depla, D ^a   Eufinger, K ^a   De Gryse, R ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON EMISSION; ELECTRON TRAPS; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; MONTE CARLO METHODS; PROBABILITY;

ELECTRON-TARGET INTERACTIONS; MAGNETRON DISCHARGES; SECONDARY ELECTRONS (SE);

MAGNETRON SPUTTERING;

EID: 3042693156     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/12/008     Document Type: Article

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