Influence of the geometrical configuration on the plasma ionization distribution and erosion profile of a rotating cylindrical magnetron: A Monte Carlo simulation

Journal of Physics D: Applied Physics

Volumn 39, Issue 18, 2006, Pages 3989-3993

  Musschoot, J ^a   Depla, D ^a   Buyle, G ^b   Haemers, J ^a   De Gryse, R ^a  

^a GHENT UNIVERSITY   (Belgium)

^b CENTEXBEL   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRONS; EROSION; IONIZATION; MAGNETRONS;

CYLINDRICAL MAGNETRONS; ELECTRON TRAJECTORIES; PLASMA IONIZATION DISTRIBUTION;

PLASMAS;

EID: 33748350922     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/18/010     Document Type: Article

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