Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture

Journal of Physics D: Applied Physics

Volumn 33, Issue 18, 2000, Pages 2274-2283

  Nanbu, K ^a   Mitsui, K ^a   Kondo, S ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATHODES; COMPUTER SIMULATION; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; MONTE CARLO METHODS; OXYGEN; PARTIAL PRESSURE; PARTICLE OPTICS; PRESSURE EFFECTS;

PLANAR MAGNETRON DISCHARGES; SELF-CONSISTENT PARTICLE MODELING;

BINARY MIXTURES;

EID: 0034270419     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/18/311     Document Type: Article

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